Abstract: A method of forming an image in an electron microscope. Because of the oscillating behaviour of the phase contrast transfer function (PCTF), images made by means of an electron microscope are liable to exhibit contrast whereas the object does not exhibit such contrast. In order to counteract these deviations, it is proposed to form sub-images, each sub-image having its own defocusing of the imaging lens and each sub-image being formed with its own weighting factor, and to add said sub-images. A substantially flat variation of the PCTF is achieved by imparting an oscillating dependence as a function of the defocusing to the weighting factor. The invention offers a simple method of image reconstruction from the sub-images in that the value of the oscillating function has the same sign throughout the defocusing range. The desired image can then be obtained by addition of the sub-images on, for example a photographic film.

Abstract: An electron detector for use in particle beam apparatus, providing particularly high acceptance of backscattered electrons. The electron detector includes an electron multiplier for detecting electrons and an electrode deployed between the electron multiplier and a specimen. The electrode is biased at a negative potential with respect to the specimen and also with respect to the electron multiplier.

Abstract: An ion beam implanter having a remote ion beam collector to reduce particulate contamination in the region of the implant chamber. A resolving magnet is activated during implantation to bend ions that exit a source to a trajectory leading to an ion implantation chamber. By de-activating the resolving magnet when not implanting, ions from the source follow a linear path to the ion beam collector.

Abstract: A probe closely positioned to an information carrier in apparatus to effect information reading and/or input on the information carrier is formed by opposing an electrode to an end portion of the probe to be formed. The distance between probe end portion and the electrode is detected to control the position of the electrode with respect to the probe. A voltage is applied to the probe end portion through the electrode under positioning control to form the probe end portion. The probe end portion is formed and may be reformed to maintain reliable performance of the information reading and/or input apparatus.