Abstract: A resonant, photoconductive detector for infrared radiation in which a reduced-volume pattern of the photoconductor permits impedance-matching to free space. The photoconductor pattern is a split-ring pattern, typically made of HgCdTe, which is virtually cylindrically symmetric, yielding a non-polarization-sensitive response. The region below the patterned photoconductor is a quarter-wavelength resonant cavity type structure. The ohmic contacts are conductively distanced from one another by use of the split-ring pattern. Spacing dimensions are slightly less than a wavelength for the infrared wavelengths to be absorbed; but ring-width dimensions of the photoconductor are substantially less to effect the volume reduction and the corresponding detectivity and radiation-hardness improvements. The essentially cylindrical isotropic pattern eases fabrication by averaging etching nonuniformities.

Abstract: An implantation system (10) is provided that comprises a rotating drum (12) which holds a wafer chuck (28) which in turn holds a semiconductor wafer (26). The wafer chuck (28) rotates during the implantation of oxygen from an oxygen beam (24) created by a beam generator (22). The wafer chuck (28) is rotated via shaft (30) from a motor (32). The wafer chuck (28) also holds a thermal reflector (36) which allows for control of the temperature of the wafer during the implantation process.

Abstract: A detection system will detect and identify self-propelled objects, such as missiles, which create a hot exhaust plume. The exhaust plume has radiation which modulates with a frequency range of interest. This frequency range can be detected with various detectors, such as an infrared detector, an ultraviolet detector, or even a radio frequency detector. Guided missiles have radiation frequencies which are much higher than the radiation frequencies of jet aircraft and of reciprocating engines. A filter will filter the output signals from the detector, and discard those outside of the frequency range of interest. A warning signal will indicate if frequencies are encountered within the frequency range of interest.

Abstract: An infrared energy emitter is disclosed which comprises a longitudinally extending tubular enclosure of infrared energy transmitting material enclosing a longitudinally extending filament. A longitudinally extending outer tubular sheath of infrared energy transmitting material coaxially receives the tubular enclosure. The outer sheath has a reflector which extends longitudinally substantially coextensive with the filament, and circumferentially with the sheath through at least 180 degrees to create a window through which the infrared energy is emitted. A cooling fluid may be passed through a space created between the inner envelope and outer sheath to allow higher power densities or to cool the outer sheath for use in explosive environments.

Abstract: An ion mobility detector is disclosed having a drift tube of non-electrically conductive material and a series of spaced conductive rings disposed upon the exterior surface of the tube. An adjustable high voltage source is provided to apply voltages to the rings to establish a potential gradient along the drift tube. The detector further includes a reaction region separated from the drift tube by an injection gate. The ratio of the width of the conductive rings to their thickness is at least 2.1 and the ratio of the internal diameter of the drift tube to the maximum transverse dimension of the injection gate also is at least 2:1.

Abstract: A double wall housing for a camera contains a thermostatic switch which senses elevated temperature within the housing to activate a compressed air powered vortex tube which is capable of producing cool air. The cool air is supplied to a helical path between inner and outer housing members of the housing to cool the housing and its interior space. A second thermoswitch mounted outside the housing senses the ambient temperature and, if the temperature rises to a selected level, activates a compressed air supply for supplying purging air to the lens tube.

Abstract: An apparatus is disclosed for measuring a body fluid constituent. In a preferred embodiment, the apparatus directs light against a tissue containing the constituent and detects an amount of light absorption in a reflected light from said tissue. The amount of absorption is analyzed to determine the amount of constituent in the blood within the tissue.

Abstract: The present invention is directed to systems and methods for accurately detecting the presence of particles, such as contaminants and residual gases in an end station during wafer processing. In a preferred embodiment, the type and amount of each contaminant can be determined by spectrally decomposing in situ light generated during wafer processing to detect characteristics of potential contaminants and/or residual gases. Characteristics which can be used to identify the presence of contaminants include abnormal wavelength, frequency and/or intensity of energy present during wafer processing.

Abstract: A detecting electrode disposed at a position opposed to an article to be conveyed and an auxiliary electrode shielded from an external electric field are connected to a field effect transistor through switch means. When the article to be conveyed passes the front of the detecting electrode, charge is induced at the detecting electrode, the gate electric field of the field effect transistor is varied according to the quantity of charge to produce an output responsive to the quantity of charge. When the switch means is switched to the auxiliary electrode, a zero potential is detected. Therefore, the charged potential of the article to be conveyed can be accurately measured.

Abstract: A plasma analyzer for trace element analysis has a gas supply system comprising a plurality of gas sources, an electromagnetic valve provided on a line connecting each gas source to a plasma generating space, a buffer tank provided after the electromagnetic valve on the line, and a flow regulating flowmeter provided after the buffer tank on the line. Each electromagnetic valves is controlled for on-off operation and the corresponding buffer tank suppresses the sudden change of the flow rate of the corresponding gas, so that the composition of the gas supplied to the plasma generating space changes gradually in spite of the simple on-off operation of the electromagnetic valves. Thus, the fluctuation and extinction of the plasma attributable to the sudden change of the composition of the gas supplied to the plasma generating space can be effectively prevented.

Abstract: A spectral bandpass filter with a sharp angle independent absorption edge for reducing optical noise is used in conjunction with a known atomic resonance filter-detector or QLORD detector such as described in U.S. Pat. No. 4,292,526. The QLORD detector comprises two spectral bandpass filters enclosing or sandwiching a chamber containing atomic vapor. In accordance with the present invention, between the high-pass filter and the atomic vapor is placed a strip of volume absorbing filter material. The high pass filter has already admitted light which can be absorbed by the atomic vapor thereby excluding that incoming light which is in the spectral range of the light readmitted by radiative decay. The volume absorbing material then makes the further attenuative selection between the various sets of hyperfine lines.

Abstract: Method and apparatus for the control of the rate of emission of electrons added to an ion implantation beam to neutralize charging effects on semiconductor wafers being processed. A net charging current, or equivalent voltage, is sensed continuously, but is sampled only when a selected wafer, or multiple selected wafers, are positioned to receive the entire cross section of the ion beam. The sampled charging current is used to control the addition of charge-neutralizing electrons to the ion beam, thereby eliminating problems that ensue from the use of an averaged charging current that is sensed without regard to the relative beam position or the number of wafers being processed.

Abstract: A photo cathode used for an electron image projection apparatus has a silver layer as a photo electric material and a layer of an alkali metal or alkaline earth metal, such as cesium, coated on the silver layer. The cesium is as thick as several atomic layers, and reduces the work function of the photo cathode. The silver layer may be coated all over a substrate, and portions other than the cathode may be masked by a non photoelectric metal, or non transparent metal, such as platinum. Or, the silver layer may be patterned on the layer of a non photoelectric metal coated on the substrate. An excitation light to the photo cathode may be irradiated onto the surface of the silver, or onto the back of the silver layer through a transparent substrate. After depositing the cesium layer on the silver, the layers are heated in a vacuum at 50.degree. to 200.degree. C., thus a contrast ratio, i.e. ratio of electron current from the cathode and from the non cathode portion, is achieved as high as 20.

Abstract: A radioluminescent source is provided by a radioactive element entrapped in an amorphous semiconductor. A preferred light source comprises a beta-emitting radioactive element, such as tritium, occluded within a matrix of amorphous semiconductor material, such as amorphous silicon, with or without dopants. The matrix may serve as an intrinsic radioluminescent light source, or as an electron source to irradiate a separate phosphor.

Abstract: An apparatus and method are disclosed for determining a level of a constituent such as glucose in a body fluid such as blood. The apparatus and method utilize a light generator for generating a testing light of known intensity with the testing light including a wavelength absorbable by the constituent being measured. The light generator also generates a reference light of known intensity having a wavelength not absorbable by the constituent being measured. The testing light and reference light are directed toward a fluid containing an unknown concentration of a constituent. A light detector is provided for measuring the intensity of the testing light and reference light being spectrally modified by the fluid. A light path distance measurer is provided for measuring a distance of a light path traveled by the testing light and reference light.

Abstract: A radiation detection circuit integrates output currents of a plurality of X-ray CT scanner radiation detectors, which are combinations of scintillators and photodiodes, during a short period to convert them to charge information in order to collect data for reproducing a tomogram. A current amplifier is connected to the output terminal of the photo-diode, and an output current of the current amplifier is charged in an integration capacitor. In this manner, the radiation detection circuit enables reduction of the measurement period.

Abstract: Long term stability of a focussed ion beam from a liquid metal ion source is maintained by the combination of a conventional analog feedback technique using a beam current detection, with a superimposed digital control using a CPU which monitors current, beam current and beam extraction voltage to determine the current source state and controls the source to produce optimum operation.

Abstract: A method and apparatus for detecting a defect in a workpiece are disclosed. The workpiece is positioned with a surface of the workpiece to be inspected in an optical path of an infrared radiation detector. A selected portion of the workpiece is heated by scanning with electromagnetic radiation for a selected duration to cause an increase in radiance from any defect present in the selected portion. Any defects, present in the workpiece selected portion, which may cause a failure of the workpiece, may be detected and distinguished from minor surface anomalies by analyzing a transient response of the irradiance received by the infrared radiation detector.

Abstract: It has been determined that the symmetric stretching frequency of water at concentrations of 10 ppm and more in liquid hydrocarbons is effectively independent of the nature of the hydrocarbon. On this basis one can rapidly, accurately, and precisely measure such water concentrations by comparing the transmittance of a narrow band of infrared frequencies within the symmetric stretching band of a wet sample with the transmittance at a frequency in the 3770-4000 cm.sup.-1 range, performing a second comparison with a dried sample, and forming the ratio of the two comparative measurements as a measure of dissolved water content.

Abstract: A thermal copier for reproducing an image printed on a document on a thermosensitive sheet by transporting the document and sheet together and illuminating them by thermal rays that pass through the sheet. A belt for transporting the document and sheet to an exposing position has opposite ends, as distinguished from an endless belt. The opposite ends of the belt each is anchored to respective one of a reversible feed roller and a reversible take-up roller. The document and sheet are driven to the exposing position by the reversible rotation of the rollers.