Abstract: A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer piezoelectric tube, with a first end of the outer piezoelectric tube connected to the base. A first end of the inner piezoelectric tube is rigidly connected to a second end of the outer piezoelectric tube. Thin inner conductors are disposed on the inner surfaces of the inner piezoelectric tube and the other piezoelectric tube, and quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube and the outer piezoelectric tube. Variable voltages are applied to the quadrant conductors of the outer piezoelectric tube and the inner piezoelectric tube and varied to cause lateral and axial movement of the second end of the outer piezoelectric tube and also to cause lateral and perpendicular movement of the second end of the inner piezoelectric tube relative to its first end.
Type:
Grant
Filed:
May 2, 1991
Date of Patent:
April 7, 1992
Assignee:
Wyko Corporation
Inventors:
John B. Hayes, Jamshid Jahanmir, Eric M. Frey