Abstract: A method and system for providing a texture to a surface of a workpiece, such as a chamber component is provided. The method comprises providing a workpiece to a texturizing chamber and scanning a beam of electromagnetic energy across the surface of the workpiece to form a plurality of features thereon. The features formed are generally depressions, protuberances, and combinations thereof. The chamber components may include, for example, a chamber shield and related assembly, a target, a shadow ring, a contact ring, a substrate support or other component disposable within a processing chamber. Also provided is a method of reducing contamination in a process chamber. The method comprises scanning a beam of electromagnetic energy across a surface of one or more process chamber components to form a plurality of features thereon, positioning the one or more chamber components into a process chamber, and initiating a process sequence within the process chamber.
Type:
Grant
Filed:
July 17, 2003
Date of Patent:
November 2, 2004
Assignee:
Applied Materials, Inc.
Inventors:
Alan R Popiolkowski, Shannon M. Hart, Marc O. Schweitzer, Alan B. Liu, Jennifer L. Watia, Brian West, Mark Menzie