Abstract: One embodiment of the present invention relates to a method for manufacturing solar cells having a nano-micro composite structure on a silicon substrate and solar cells manufactured thereby. The technical problem to be solved is to provide a method for manufacturing solar cells and solar cells manufactured thereby, the method being capable of forming micro wires in various sizes according to the lithographic design of a photoresist and forming nano wires, which have various sizes and aspect ratios, by adjusting the concentration of a wet etching solution and immersion time.
Type:
Grant
Filed:
December 2, 2016
Date of Patent:
May 15, 2018
Assignee:
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
Inventors:
Chae Hwan Jeong, Jong Hwan Lee, Chang Heon Kim, Ho Sung Kim