Abstract: This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.

Abstract: Provided is a sample observation apparatus including a charged particle optical column that irradiates a sample including an observation target portion that is a concave portion with a charged particle beam at an acceleration voltage, an image generation section that acquires an image including the observation target portion from a signal acquired with irradiation of the charged particle beam, a storage section that stores information representing a relationship between a brightness ratio of a concave portion and its neighboring portion of a reference sample that is irradiated with the charged particle beam at the acceleration voltage and a value that represents a structure of the concave portions of the reference sample in advance, a calculation section that acquires a brightness ratio of the concave portion and its neighboring portion of the image, and a determination section that determines whether or not a defect occurs in the observation target portion based on the information that represents the relatio

Abstract: An intermittent contact atomic force microscope includes: a cantilever configured to receive a contact resonance modulation; a sample disposed proximate to the cantilever; a contact resonance modulator in communication with the cantilever and configured to provide the contact resonance modulation to the cantilever; and a scan modulator in mechanical communication with the sample to provide a scan modulation to the sample.

Abstract: When a sample plate 3 is set on a sample stage 2, an irradiation trace formation controller 22 appropriately moves the sample stage 2 and throws a short pulse of high-power laser beam to create an irradiation trace at a predetermined position on the sample plate 3. The irradiation trace has a unique shape. A microscopic image of the irradiation trace is captured and saved in an image storage section 32. After the sample plate 3 is temporarily removed from the stage 2 to apply a matrix to a sample, the sample plate 3 is re-set on the same stage 2. Then, the displacement of the sample plate 3 from its original position is calculated from the difference in the position of the irradiation trace between an image taken at that point in time and the image previously stored in the image storage section 32. Based on the calculated result, an analysis position corrector 24 modifies the position information of an area selected by an operator. Thus, the displacement of the re-set sample plate can be accurately detected.

Abstract: A volumetric imaging device for constructing a three dimensional image includes a source, and absorbing detector, and an image constructor. The source includes a photon source, and a scatter detector arranged between the object and the photon source. The photon source emits photons towards the scatter detector. The scatter detector scatters at least some of the photons and detects the scattered photons. The object scatters at least some of the photons that were first scattered by the scatter detector. The absorbing detector is arranged to detect scattered photons from the object. The image constructor constructs the three dimensional image based on the scattered photons.

Abstract: Apparatus, systems, and methods that provide an X-ray interrogation system having a plurality of stationary X-ray point sources arranged to substantially encircle an area or space to be interrogated. A plurality of stationary detectors are arranged to substantially encircle the area or space to be interrogated, A controller is adapted to control the stationary X-ray point sources to emit X-rays one at a time, and to control the stationary detectors to detect the X-rays emitted by the stationary X-ray point sources.

Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Abstract: A system for scanning an object, the system may include (a) charged particles optics that is configured to: scan, with a charged particle beam and at a first scan rate, a first region of interest (ROI) of an area of the object; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam and at a second scan rate, a second ROI of the area of the object; wherein the second scan rate is lower than the first scan rate; wherein first ROI differs from the second ROI by at least one parameter; detect second particles that were generated as a result of the scanning of the second ROA; and (b) a processor that is configured to generate at least one image of the area in response to the first and second particles.

Abstract: A method of operating a charged particle microscope comprises: providing settings of a focus, an x-stigmator and an y-stigmator of the charged particle microscope; and then repeatedly performing adjusting the charged particle microscope to the settings, recording an image of an object using the settings, determining a sharpness measure from the recorded image, and changing at least one of the settings of the focus, the x-stigmator and the y-stigmator based on the sharpness measure until a stop criterion is fulfilled. Herein, the determining of the sharpness measure comprises: determining an orientation of an intensity gradient at each of a plurality of locations within one of the recorded image and a processed image generated by processing the recorded image, and determining the sharpness measure based on the plurality of determined orientations.

Abstract: The invention relates to a method for determining a performance of a photolithographic mask at an exposure wavelength with the steps of scanning at least one electron beam across at least one portion of the photolithographic mask, measuring signals generated by the at least one electron beam interacting with the at least one portion of the photolithographic mask, and determining the performance of the at least one portion of the photolithographic mask at the exposure wavelength based on the measured signals.

Abstract: A multi-reflecting time-of-flight (MR-TOF) mass spectrometer, which includes two quasi-planar electrostatic ion mirrors extended along drift direction (Z) and is formed of parallel electrodes, separated by a field-free region. The MR-TOF includes a pulsed ion source to release ion packets at a small angle to X-direction which is orthogonal to the drift direction Z. Ion packets are reflected between ion mirrors and drift along the drift direction. The mirrors are arranged to provide time-of-flight focusing ion packets on the receiver. The MR-TOF mirrors provide spatial focusing in the Y-direction orthogonal to both drift direction Z and ion injection direction X. In a preferred embodiment, at least one mirror has a feature providing periodic spatial focusing of ion packets in the drift Z-direction.

Abstract: A method and apparatus are disclosed for improving ion mobility spectrometry by using a fast and spatially wide ion gate based on local RF field barrier opposed to a switching DC field. The improvement accelerates the ion mobility analysis and improves charge throughput and dynamic range of the IMS. The invention is particularly suited for rapid dual gas chromatography. In one important embodiment, the accelerated IMS is coupled to a multi-reflecting time-of-flight mass spectrometer with a fast encoded orthogonal acceleration. There are described methods of comprehensive and orthogonal separation in multiple analytical dimensions.

Abstract: A sample cell for IR spectrophotometric analysis of a liquid sample is provided. The sample cell comprises two substantially parallel transparent plates enclosing a cavity for holding the liquid sample, and a temperature control loop for controlling a temperature of the liquid sample in the cavity. The temperature control loop comprises at least one temperature sensor for measuring a temperature in or close to the cavity, at least one heating element for increasing a temperature of the liquid sample, and control means, coupled to the temperature sensor and the heating element for controlling the heating element in dependence of the temperature in or close to the cavity. The heating element comprises at least one heating foil which is attached to or thermally coupled to a first one of the transparent plates in such a way to allow an IR light beam to pass through the transparent plates and the cavity without being hindered by the heating foil.

Abstract: A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.

Abstract: The present invention relates to mass spectrometry and infrared spectrometry and in particular, to a method of providing highly resolved infrared spectra of mass-selected, complex (e.g., biopolymer, polypeptide, organic chemical, an organometallic compound, a carbohydrate, a polynucleotide or oligonucleotide compound) ions to be obtained in a general fashion.

Abstract: An electron beam apparatus for capturing images by deflecting a primary electron beam by a deflector to irradiate each of sub-visual fields which are formed by dividing an evaluation area on a sample surface, and detecting secondary electrons containing information on the sample surface in each of the sub-visual fields by a detecting device. The detecting device includes a plurality of unit detectors each including an area sensor, a bundle of optical fibers having one end coupled to a detection plane of the area sensor, and an FOP coated on the other end of the bundle of optical fibers and formed with a scintillator, on which a secondary electron beam emitted from the respective sub-visual field is focused. An electromagnetic deflector deflects the secondary electron beam each time the electron beam is irradiated to the next sub-visual field to move the secondary electron beams over the surfaces of the FOPs.

Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.

Abstract: Apparatus for generating ultraviolet light and methods of operating an ultraviolet light source. The apparatus may include a microwave chamber (16) enclosing an interior space, a light source (10) with a lamp head (28) coupled to the microwave chamber (16), an ultraviolet (UV) transmissive member (88) positioned above the lamp face (32) and below the interior space to define a plenum (116) therebetween, and an exhaust system (100) coupled in fluid communication with the plenum. The lamp head (28) has a lamp face (32) through which ultraviolet light (34) and cooling air (30) are emitted. The UV transmissive member (88) is configured to transmit the ultraviolet light (34) into the interior space and to divert the cooling air (30) from the interior space. The exhaust system (100) configured to exhaust the cooling air (30) from the plenum (116).

Abstract: Embodiments of the present invention relate generally to on-aircraft potable water disinfection with UV LED light sources that are positioned in-line with the water delivery system. Further embodiments relate to using the scavenged heat generated by the LEDs to deliver heat back to the water supply tube for temperature stabilization and to prevent water freezing.

Abstract: A radiation generator includes: a radiation tube configured to generate radiation by emitting electrons from a cathode through a grid to a target; a grid-voltage generating unit configured to apply an extraction voltage to the grid in response to an external request for radiation output; a cut-off voltage generating unit configured to generate a cut-off voltage applied to the grid so as to lower the potential of the grid relative to the potential of the cathode when there is no external request for the radiation output; and a detection unit configured to detect a decrease in the cut-off voltage, wherein the target is not irradiated by the electrons when the decrease in the cut-off voltage is detected.