Abstract: A piezoelectric composite micromachined ultrasound transducer including single and multilayer 1-D and 2-D arrays having through-wafer-vias (TWVs) that significantly decreased electrical impedance per element, and hence the improved electrical impedance matching to T/R electronics and improved signal to noise ratio is disclosed. The TWVs facilitate integrated interconnection in single element transducers (positive and negative contact on the same side) and array transducers (contact pads array for integration with T/R switches and/or pre-amplifier circuits).

Abstract: A first conductive polymer film, a plate-shaped first porous member, a second conductive polymer film, and a plate-shaped second porous member are stacked on one another, and the adjacent members are connected with each other on first end portions so as to form a zigzag pattern. The first and second porous members each have an ionic solution injected thereinto so as to function as an electrolyte retention layer, so that operations can be carried out with tensions being always maintained upon both of the expansion and the contraction, and rigidity and a driving force can be exerted in both of the contracting and expanding directions.

Abstract: An energy harvesting apparatus for deployment on a vehicle having a frame includes a spring assembly coupled to the frame and configured for compressions and extensions during vehicle travel. A piezoelectric device is mounted on the spring assembly for generating electrical energy in response to the strain imposed thereon. A rectifier is coupled to the piezoelectric device for converting AC electrical energy to DC.

Abstract: In one aspect, the invention relates to a headset that includes an element that generates energy in response to forces. The headset includes at least one vibratable piezoelectric element; a first circuit element in electrical communication with the at least one vibratable piezoelectric element; and a signal processing element, the signal processing element disposed within the headset and at least partially energized by mechanical changes in the vibratable piezoelectric element.

Abstract: Piezoelectric vibrating pieces are disclosed. An exemplary piece includes a base and at least a pair of vibrating arms connected to the base. The vibrating arms extend from one end of the base in a first direction. A vibrating root portion is situated between the vibrating arms. A pair of supporting arms extend, outboard of the vibrating arms, in the first direction from the one end of the base. Respective supporting root portions are situated between each vibrating arm and its outboard supporting arm, at the same position (denoted, e.g., K1, K2) in the first direction of the vibrating root portion.

Abstract: A piezoelectric actuator unit includes a piezoactuator and a casting compound enclosing the piezoactuator. The casting compound is disposed in a sleeve that includes a hydrophobic material.

Abstract: There is provided an inertial drive actuator in which, a small-sizing is easy, including a first displacement generating mechanism of which, one end is adjacent to a fixed member, and a first displacement is generated in the other end thereof, a second displacement generating mechanism of which, one end is adjacent to the fixed member, and which generates a second displacement in the other end thereof, a driving mechanism which applies a voltage for displacing the first displacement generating mechanism and the second displacement generating mechanism, a vibration substrate which is connected to the other end of the first displacement generating mechanism and the other end of the second displacement generating mechanism, and which is displaceable in a plane in which, there exist a direction of the first displacement and a direction of the second displacement, a mobile object which is disposed to be facing the vibration substrate, and which moves with respect to the vibration substrate by an inertia with respe

Abstract: By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element. A piezoelectric actuator includes the piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof. The piezoelectric actuator also includes a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element, a driver power supply for applying a voltage to generate strain in the piezoelectric element, resistors provided on the electrodes through intermediation of insulators, and a displacement detection device connected with the resistors. The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.

Abstract: A spherical rotary piezoelectric motor comprises a spherical rotor, a hemispherical stator, and a plurality of piezoelectric actuators. The hemispherical stator comprises an inner surface and an outer surface, wherein the inner surface forms a hemispherical hollow portion which substantially corresponds to the spherical rotor so as to contain a portion of the spherical rotor. The plurality of piezoelectric actuators is arranged on the inner surface (or the outer surface) of the hemispherical stator respectively so as to drive the hemispherical stator. The hemispherical stator generates traveling waves with a resultant elliptical motion, so the spherical rotor can be rotated accordingly with at least one degree of freedom.

Abstract: Piezoelectric frames are disclosed that include a tuning-fork type piezoelectric vibrating piece. The vibrating piece has at least a pair of vibrating arms that extend in a longitudinal direction (e.g., Y-direction) from a first end edge of a piezoelectric base, and at least one excitation electrode on the pair of vibrating arms. Respective supporting arms extend in the longitudinal direction, outboard of each vibrating arm. The vibrating piece is surrounded by and attached to a frame portion also made of piezoelectric material. A pair of connecting portions connects the supporting arms to the frame portion. The connecting portions extend from respective supporting arms to the frame portion in a direction that intersects the longitudinal direction. The connecting portions are connected to the frame portion at designated locations that are more than 50% of the designated length of the vibrating piece from the second end edge of the base.

Abstract: An exemplary piezoelectric vibrating device has a lid plate, a chip plate including a tuning-fork type vibrating piece surrounded by an outer frame, and a package base arranged where the chip plate is sandwiched between the lid plate and package base, and the three layers are bonded together. The tuning-fork type piezoelectric vibrating piece is connected to the outer frame by supporting arms. A base-movement buffer having a predetermined height in the X-direction extends from the inner edge surface of the outer frame toward a side edge of the base. The base-movement buffer has a height in the X-direction that is proportional to the length from the base-movement buffer to a point at which the tuning-fork type piezoelectric vibrating piece is coupled to the outer frame.

Abstract: In a piezoelectric multilayer actuator (1) having micromechanical relief zones (30) and an insulation layer (40) as well as in a method for producing said actuator, as a result of the micromechanical relief zones (30), poling cracks are concentrated in these relief regions (30). This makes it possible to provide the sections I, II, III of the multilayer actuator (1) with an insulation layer (40) which only has an extension behavior similar to the multilayer actuator (1) without poling cracks.

Abstract: A piezoelectric sensor having a plurality of electrodes deposited on a single surface of the dielectric medium is generally provided. The plurality of electrodes can define a plurality of square-shaped electrodes forming a grid on the first surface of the dielectric medium while the second electrode defines a continuous electrode. An electrode border surrounding the plurality of electrodes can be deposited on the first surface of the dielectric medium. Alternatively, the plurality of electrodes can define column-shaped electrodes, while the second electrode defines a plurality of row-shaped electrodes separated by etchings. The direction of orientation of each column-shaped electrode and the direction of orientation of each row-shaped electrode can be substantially perpendicular. A method of making a piezoelectric sensor is also provided.

Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

Abstract: A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.

Abstract: The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.

Abstract: Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end.

Abstract: Tuning-fork-type crystal vibrating pieces are disclosed that have a base and a pair of vibrating arms extending from one side of the base in a designated longitudinal direction. A root portion is situated between the vibrating arms, and includes a first taper surface. Extending outboard of the vibrating arms from respective sides of the base are respective supporting arms that extend in the designated direction. Between each supporting arm and the respective vibrating arm is a respective supporting-arm root portion. Each supporting-arm root portion has a second taper surface in the thickness direction of the base.

Abstract: Shear-horizontal surface acoustic wave sensors with micro-cavities in the delay paths were studied using finite element methods. The microcavity devices are SAW delay path devices that have the delay path etched with square patterns at various wavelength dimensions and varying depths to increase the dispersion and bulk to surface wave conversion. Additionally the microcavities are filed with polystyrene to act as an inhomogeneous waveguide for further entrapment of wave energy near the device surface. The effects of micro-cavities and grooves on SAW propagation show significantly greater energy transmission than the other structures presented traditional sensors.

Abstract: An actuator includes a first electrode disposed on the top surface of a ceramic substrate (for example, zirconium oxide), a piezoelectric/electrostrictive substance disposed on the first electrode, and a second electrode disposed on the piezoelectric/electrostrictive substance, wherein the input of an electric power alters the volume of the piezoelectric/electrostrictive substance. The piezoelectric/electrostrictive substance contains a plurality of crystal grains that have a wavy structure composed of wavy grain boundaries including concave portions and convex portions. The crystal grains contain ABO3 as the main component. The A site is Pb, and the B site contains such an amount of M that M becomes excessive after the piezoelectric/electrostrictive substance is formed (wherein M is at least one element selected from Mg, Ni, and Zn). The crystal grains of the piezoelectric/electrostrictive substance are oriented in the electric field direction, independently of the orientation of the substrate.