Patents Examined by Jennifer Calcagni
  • Patent number: 6261635
    Abstract: A method for forming a generally uniform liquid layer on a surface of an upper surface microelectronic substrate. The apparatus can include a support that engages less than the entire lower surface of the microelectronic substrate and rotates the microelectronic substrate at a selected rate. A barrier can extend over the upper surface of the microelectronic substrate and can rotate at about the same rate as the substrate to separate a rotating air mass adjacent to the upper surface and within the barrier from a stationary air mass external to the barrier. The rotating air mass can reduce the likelihood for liquid/air interface disturbances that create non-uniformities in the liquid layer. Accordingly, the method can increase the range of thicknesses to which the liquid layer can be formed and can reduce the topographical non-uniformities of the liquid layer.
    Type: Grant
    Filed: August 27, 1999
    Date of Patent: July 17, 2001
    Assignee: Micron Technology, Inc.
    Inventor: Paul D. Shirley
  • Patent number: 6258404
    Abstract: The invention concerns a method and a device for depositing at least one thin film of a liquid agent on a wireframe element such as an optical fiber designed to form a very fine coating on said wireframe element consisting in spraying the liquid agent on the wireframe element with spraying means, the wireframe element and the spraying means being in relative movement with respect to each other. Preferably, the liquid agent used is obtained from novel acrylphosphorus or metacrylphosphorus compounds. The method is most particularly adapted for coating optical fibers and enables to substantially improve the stress corrosion factor “n” of the fibers and to maintain said factor “n” after aging.
    Type: Grant
    Filed: April 24, 2000
    Date of Patent: July 10, 2001
    Assignee: France Telecom
    Inventors: Annie Morgand, Jean-Louis Desaunay, Yves Ruello
  • Patent number: 6258710
    Abstract: A method of providing sub-half-micron copper interconnections with improved electromigration and corrosion resistance. The method includes double damascene using electroplated copper, where the seed layer is deposited by chemical vapor deposition, or by physical vapor deposition in a layer less than about 800 angstroms.
    Type: Grant
    Filed: December 10, 1999
    Date of Patent: July 10, 2001
    Assignee: International Business Machines Corporation
    Inventors: Hazara S. Rathore, Hormazdyar M. Dalal, Paul S. McLaughlin, Du B. Nguyen, Richard G. Smith, Alexander J. Swinton, Richard A. Wachnik
  • Patent number: 6258405
    Abstract: In a color filter manufacturing method according to the present invention, a color filter is manufactured by coloring the respective pixels with a plurality of discharged inks arranged in the scanning direction while an ink-jet head having a plurality of ink discharging nozzles in a direction substantially perpendicular to the scanning direction is scanned over a substrate. A coloring operation is performed while the ink discharging pattern is changed for each of the arrayed pixels or each pixel group.
    Type: Grant
    Filed: February 14, 1997
    Date of Patent: July 10, 2001
    Assignee: Canon Kabushiki Kaisha
    Inventors: Nobuhito Yamaguchi, Hideto Yokoi, Satoshi Wada, Hiroshi Fujiike
  • Patent number: 6254930
    Abstract: Coating for the tube sheets and heat exchanger coolant tubes extending from them, especially steam condensers, based on hardening plastic mixtures, obtainable by cleaning the surfaces provided for coating using an abrasive; closing the tube inlets and outlets (or tube inlets only) with removable plugs; applying at least one layer of a hardening plastic coating on the tube sheet; allowing the coating to harden so that additional mechanical processing can ensue, and processing the surface; removing the plugs from the tube inlets and outlets (or tube inlets only) as well as applying at least one layer of a hardening plastic coating at least in the inlet area of the coolant tube, and allowing it to harden, coating of the coolant tubes by timed applications being done reactively to the tube sheet coating and the coolant tube coating exhibiting in comparison to the tube sheet coating a greater elasticity having an elongation at tear at least 2% greater in accordance with ASTM D522 with respect to the elongation at
    Type: Grant
    Filed: June 22, 1998
    Date of Patent: July 3, 2001
    Inventor: Richard Kreiselmaier
  • Patent number: 6254936
    Abstract: Systems and methods are described for environmental exchange control for a polymer on a wafer surface. An apparatus for controlling an exchange between an environment and a polymer on a surface of a wafer located in the environment includes: a chamber adapted to hold the wafer, define the environment, and maintain the polymer in an adjacent relationship with the environment; and a heater coupled to the chamber. A method for improving performance of a spin-on material includes: forming the spin-on material on a surface of a wafer; then locating the spin-on material in an environment so that said environment is adjacent said spin-on material; and then controlling an exchange between the spin-on material and said environment. The systems and methods provide advantages because inappropriate deprotection is mitigated by careful control of the environmental temperature and environmental species partial pressures (e.g. relative humidity).
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: July 3, 2001
    Assignee: Silicon Valley Group, Inc.
    Inventors: Emir Gurer, Ed C. Lee, Tom Zhong, Kevin Golden, John W. Lewellen, Reese Reynolds, Scott C. Wackerman
  • Patent number: 6254931
    Abstract: Method and apparatus for forming thin films by the application of a film forming liquid to a substrate at rest or rotating a speed up to 500 rpm and then rotating the film forming liquid on the substrate at a speed and for a time sufficient to form the thin film. Such films can be used for analysis by spectrophotometric methods. Apparatus for forming such thin films is also disclosed.
    Type: Grant
    Filed: October 27, 1997
    Date of Patent: July 3, 2001
    Inventors: Robert Herpst, Kenneth B. Cuthbert
  • Patent number: 6251487
    Abstract: A resist film having a thickness of 5500 Å or less is coated on the wafer having a large diameter of 8 inches or more by the spin coat process. A resist is dripped while allowing the wafer to be rotated at a rotation speed of 500 rpm to 1200 rpm and the dripping of the resist is suspended at the time of spreading the resist on the whole surface of the wafer. The rotation speed is raised to the predetermined rotation speed which regulates the thickness of the resist film and is determined from the correlation of the predetermined rotation speed and the thickness of the resist film. The wafer is rotated for 1 second to 5 seconds at the predetermined rotation speed. Then, the wafer is rotated for 15 seconds or more at the rotation speed which is lower than the predetermined rotation speed.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: June 26, 2001
    Assignee: NEC Corporation
    Inventor: Shinya Yonaha
  • Patent number: 6251476
    Abstract: A method for applying fibrous cellulose insulation to a wall, ceiling, or floor which includes in at least certain embodiments mixing cellulose fibers with an adhesive without water producing a mixture, and applying (e.g. by blowing or spraying) the mixture to a surface. The method further includes spraying the mixture with a spray nozzle onto the wall by introducing cellulose fibers under pressure through a first hose into the spray nozzle, introducing the adhesive in aqueous solution under pressure through a second hose into the spray nozzle, and spraying from the spray nozzle the mixture onto the wall. In one aspect acid-containing fibers are sprayed with a PVOH adhesive (cooked with or without an acidic medium) to create the mixture.
    Type: Grant
    Filed: March 27, 2000
    Date of Patent: June 26, 2001
    Assignee: International Cellulose Corp.
    Inventors: Harold F. Boyer, Steven A. Kempe
  • Patent number: 6248407
    Abstract: In a method of application of a coating medium by use of a spray device onto a moving surface, which in the direct application method is the surface of a material web, specifically a paper or cardboard web, an atmosphere of back-moistening and/or moistening medium for the atomized coating medium is maintained in the area of the spray device.
    Type: Grant
    Filed: April 28, 1999
    Date of Patent: June 19, 2001
    Assignee: Voith Sulzer Papiertechnik GmbH
    Inventor: Harald Hess
  • Patent number: 6242044
    Abstract: Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.
    Type: Grant
    Filed: May 11, 1999
    Date of Patent: June 5, 2001
    Assignee: Fairchild Technologies USA, Inc.
    Inventor: Andreas Ebert
  • Patent number: 6238743
    Abstract: A method of removing a ceramic coating, such as a thermal barrier coating (TBC) of yttria-stabilized zirconia (YSZ), from the surface of a component, such as a gas turbine engine component. The method generally entails subjecting the ceramic coating to an aqueous solution of ammonium bifluoride, optionally containing a wetting agent, such as by immersing the component in the solution while maintained at an elevated temperature. Using the method of the invention, a ceramic coating can be completely removed from the component and any cooling holes, with essentially no degradation of the bond coat.
    Type: Grant
    Filed: January 20, 2000
    Date of Patent: May 29, 2001
    Assignee: General Electric Company
    Inventor: William C. Brooks
  • Patent number: 6238747
    Abstract: A mechanism for effectively dispensing liquid onto a surface of an IC (Integrated Circuit) wafer with minimized back-splash. A nozzle includes a liquid chamber that fills up with the liquid to be dispensed onto the surface of the IC wafer, and the nozzle includes a plurality of nozzle passages. A nozzle passage carries and directs the liquid from the liquid chamber toward the surface of the IC wafer to provide a respective liquid stream from a respective location on the nozzle to a respective spot on the surface of the IC wafer as the IC wafer is spinning. A nozzle passage is disposed within the nozzle at a respective angle with respect to the surface of the IC wafer such that the respective liquid stream from the nozzle passage is directed toward a velocity vector at the respective spot on the surface of the IC wafer where the respective liquid stream hits the surface of the IC wafer. For example, the respective angle of the nozzle passage with respect to the surface of the IC wafer may be 45°.
    Type: Grant
    Filed: September 7, 1999
    Date of Patent: May 29, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Vincent L. Marinaro, Eric R. Kent
  • Patent number: 6238735
    Abstract: A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.
    Type: Grant
    Filed: September 8, 1999
    Date of Patent: May 29, 2001
    Assignee: Silicon Valley Group, Inc.
    Inventors: Robert P. Mandal, James C. Grambow, Ted C. Dettes, Donald R. Sauer, Emir Gurer, Edmond R. Ward
  • Patent number: 6235350
    Abstract: The application of (for example, elongated strip-shaped) spots of adhesive paste to successive objects (such as paper or cardboard blanks which are to be converted into soft or hinged-lid packs for arrays of cigarettes) which are advanced stepwise below the nozzle or nozzles of one or more pasters at an adhesive-applying station is regulated by a control unit which receives signals denoting the speed of the conveyor for the objects and the position of the object at the adhesive-applying station. The control unit regulates the operation of the valve for each nozzle of the paster by taking into consideration the inertia of electrical and mechanical constituents of the paster. This ensures the application of spots having an optimum shape and an optimum position relative to the respective objects and containing predetermined quantities of adhesive.
    Type: Grant
    Filed: June 1, 1999
    Date of Patent: May 22, 2001
    Assignee: Topack Verpackungstechnik AG
    Inventors: Jens Collin, Martin Hoy
  • Patent number: 6235343
    Abstract: The invention relates to a process for depositing a layer based on a fluorine-containing metal oxide, especially a layer of fluorine-doped tin oxide F:SnO2, on a glass substrate by a chemical vapor deposition technique using at least two precursors, including at least one metal precursor and at least one fluorine precursor. According to the invention, the fluorine precursor consists essentially of nitrogen trifluoride NF3.
    Type: Grant
    Filed: June 18, 1999
    Date of Patent: May 22, 2001
    Assignee: Saint-Gobain Vitrage
    Inventors: Laurent Joret, Isabelle Berthelot
  • Patent number: 6233972
    Abstract: A method of providing a protective layer for a glass sheet. The protective layer provided by depositing a solution of a polymer and water on a glass sheet at a temperature high enough to provide a layer that is insoluble in water below a temperature of about 20° C. The layer is soluble in water at a temperature above about 60° C., so that the protective layer can be removed by rinsing in hot water.
    Type: Grant
    Filed: August 24, 1999
    Date of Patent: May 22, 2001
    Assignee: Corning Incorporated
    Inventors: Michelle R. Foster, David L. Tennent
  • Patent number: 6231928
    Abstract: A resin-impregnated endless belt for a long nip press or calender of the shoe type, or for other papermaking and paper-processing applications, has an open base fabric in the form of an endless loop with an inner surface, an outer surface, a machine direction and a cross-machine direction. A coating of a polymeric resin is on the inner surface of the base fabric. The polymeric resin impregnates and renders the base fabric impermeable to liquids, and forms a layer on the inner surface thereof. The coating is smooth and provides the belt with a uniform thickness. The belt is manufactured by mounting the base fabric about a first roll and a second roll, which are separated to place the base fabric under tension in the machine direction. A conveyor belt is placed within the base fabric at a preselected distance from the inner surface thereof.
    Type: Grant
    Filed: August 30, 1999
    Date of Patent: May 15, 2001
    Assignee: Albany International Corp.
    Inventor: Desmond McGahern
  • Patent number: 6221435
    Abstract: Processes are disclosed for the use of subcritical compressed fluids, such as carbon dioxide or ethane, to reduce viscosity and to enhance atomization when spray applying coating compositions containing low molecular weight polymers to substrates, by using spray conditions that produce choked flow in the liquid mixture being sprayed, wherein the subcritical compressed fluid is a gas at standard conditions of 0° C. temperature and one atmosphere pressure and is miscible with the coating composition.
    Type: Grant
    Filed: November 18, 1998
    Date of Patent: April 24, 2001
    Assignee: Union Carbide Chemicals & Plastics Technology Corporation
    Inventor: Kenneth Andrew Nielsen
  • Patent number: 6217946
    Abstract: The disclosed invention consists of a means for conveying a gypsum or gypsum/cellulose fiber board to a rotary cylinder brush station where pMDI resin is delivered onto the rotary cylinder brush just as the board passes under the brush. A resin distribution system is used to coat the rotary cylinder brush applicator with pMDI. Optionally, a second rotary cylinder brush station is included, if desired, to smooth out and spread the pMDI resin over the surface of the gypsum board substrate to achieve complete coverage.
    Type: Grant
    Filed: July 23, 1999
    Date of Patent: April 17, 2001
    Assignee: United States Gypsum Company
    Inventors: Michael L. Bolind, Michael J. Porter, Mark B. Scalf