Abstract: At least a partial layer of an upper capacitor electrode is formed by metal carbide, preferably by a transition metal carbide. In one embodiment, the metal carbide layer is formed by depositing an alternating sequence of metal-containing layers and carbon-containing layers on top of one another and then subjecting them to a heat treatment, in such a manner that they mix with one another. The patterning of the layer sequence can be carried out before the carbide formation step.
Type:
Grant
Filed:
July 26, 2002
Date of Patent:
August 10, 2004
Assignee:
Infineon Technologies AG
Inventors:
Martin Gutsche, Peter Moll, Bernhard Sell, Annette Sänger, Harald Seidl