Patents Examined by John Bodnar
  • Patent number: 10310341
    Abstract: Disclosed is a display device and a method of manufacturing the same, wherein an end portion of a pad provided on a first substrate is spaced apart and separated from an upper surface of the first substrate, and a connection electrode electrically connected with the pad is in contact with a lateral surface of the pad and a lower surface of the pad.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: June 4, 2019
    Assignee: LG DISPLAY CO., LTD.
    Inventors: WonJun Choi, SungLim Nam, Misun Park, Jaewoong Choi, Younghyun Kong
  • Patent number: 10304948
    Abstract: To provide a semiconductor device in which an edge termination structure can be made smaller easily. A semiconductor device is provided, the semiconductor device including an active region and an edge termination structure formed on a front surface side of a semiconductor substrate, wherein an edge termination structure has a guard ring provided surrounding an active region on a front surface side of a semiconductor substrate, a first field plate provided on a front surface side of a guard ring, an electrode unit provided on a front surface side of a first field plate, a second field plate provided between a first field plate and a electrode unit, and a conductive connecting unit which mutually electrically connects a first field plate, an electrode unit, a second field plate, and a guard ring.
    Type: Grant
    Filed: December 26, 2016
    Date of Patent: May 28, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yoshiharu Kato, Hidenori Takahashi
  • Patent number: 10304938
    Abstract: Various methods and semiconductor structures for fabricating an FET device having Nickel atoms implanted in a silicide metal film on a source-drain contact region of the FET device thereby reducing resistance of the source-drain contact region of the FET device. An example fabrication method includes maskless blanket implantation of Nickel atoms across a semiconductor wafer. Nickel atoms can be implanted into silicide metal film of a source-drain contact region of nFET devices, pFET devices, or both, on a semiconductor wafer. Nickel atoms can be implanted into silicide metal film on a source-drain contact region of nFET devices and pFET devices. The silicide metal film on the source-drain contact region of the nFET device being a different material than the silicide metal film on the source-drain contact region of the pFET device.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: May 28, 2019
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Hemanth Jagannathan, Christian Lavoie
  • Patent number: 10290635
    Abstract: Various examples of a buried interconnect line are disclosed herein. In an example, a device includes a fin disposed on a substrate. The fin includes an active device. A plurality of isolation features are disposed on the substrate and below the active device. An interconnect is disposed on the substrate and between the plurality of isolation features such that the interconnect is below a topmost surface of the plurality of isolation features. The interconnect is electrically coupled to the active device. In some such examples, a gate stack of the active device is disposed over a channel region of the active device and is electrically coupled to the interconnect. In some such examples, a source/drain contact is electrically coupled to a source/drain region of the active device, and the source/drain contact is electrically coupled to the interconnect.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: May 14, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Shi Ning Ju, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 10283586
    Abstract: Back end of the line (BEOL) capacitors and methods of manufacture are provided. The method includes forming wiring lines on a substrate, with spacing between adjacent wiring lines. The method further includes forming an air gap within spacing between the adjacent wiring lines by deposition of a capping material. The method further includes opening the air gap between selected adjacent wiring lines. The method further includes depositing conductive material within the opened air gap.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: May 7, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Christopher J. Penny, Theodorus E. Standaert, Junli Wang
  • Patent number: 10283520
    Abstract: An elevationally-extending string of memory cells comprises an upper stack elevationally over a lower stack. The upper and lower stacks individually comprise vertically-alternating tiers comprising control gate material of individual charge storage field effect transistors vertically alternating with insulating material. An upper stack channel pillar extends through multiple of the vertically-alternating tiers in the upper stack and a lower stack channel pillar extends through multiple of the vertically-alternating tiers in the lower stack. Tunnel insulator, charge storage material, and control gate blocking insulator is laterally between the respective upper and lower stack channel pillars and the control gate material. A conductive interconnect comprising conductively-doped semiconductor material is elevationally between and electrically couples the upper and lower stack channel pillars together. The conductively-doped semiconductor material comprises a first conductivity-producing dopant.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: May 7, 2019
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, David Daycock, Yushi Hu, Christopher Larsen, Dimitrios Pavlopoulos
  • Patent number: 10262905
    Abstract: A method for semiconductor fabrication includes providing channel regions on a substrate including at least one Silicon Germanium (SiGe) channel region, the substrate including a plurality of regions including a first region and a second region. Gate structures are formed for a first n-type field effect transistor (NFET) and a first p-type field effect transistor (PFET) in the first region and a second NFET and a second PFET in the second region, the gate structure for the first PFET being formed on the SiGe channel region. The gate structure for the first NFET includes a gate material having a first work function and the gate structures for the first PFET, second NFET and second PFET include a gate material having a second work function such that multi-threshold voltage devices are provided.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: April 16, 2019
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Qing Liu, Nicolas Loubet, Scott Luning
  • Patent number: 10217760
    Abstract: In an embodiment, the semiconductor device may include interlayer insulating layers, conductive patterns, a channel layer, cell blocking insulating layers, dummy blocking insulating layers, and a data storage layer. The interlayer insulating layers and conductive patterns may be alternately stacked. The channel layer may pass through the interlayer insulating layers and the conductive patterns. The cell blocking insulating layers may be respectively arranged between the channel layer and the conductive patterns. The dummy blocking insulating layers may be respectively arranged between the channel layer and the interlayer insulating layers, and may protrude further toward a side wall of the channel layer than the cell blocking insulating layers. The data storage layer may surround the side wall of the channel layer, and may be formed on a concavo-convex structure defined by the cell blocking insulating layers and the dummy blocking insulating layers.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: February 26, 2019
    Assignee: SK hynix Inc.
    Inventor: Wan Sup Shin
  • Patent number: 10211338
    Abstract: Integrated circuits including tunnel transistors and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated device includes forming a lower source/drain region in and/or over a semiconductor substrate. The method forms a channel region overlying the lower source/drain region. The method also forms an upper source/drain region overlying the channel region. The method includes forming a gate structure beside the channel region.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: February 19, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Kiok Boone Elgin Quek
  • Patent number: 10211212
    Abstract: A semiconductor device includes a substrate having a first active region; first and second gate electrodes disposed on the first active region; first, second and third impurity regions disposed in the first active region; first, second and third active contacts disposed on and connected to the first, second and third impurity regions; a first power line electrically connected to the first impurity region through the first active contact; and a first bit line electrically connected to the second and third impurity regions through the second and third active contacts. The first gate electrode and the first and second impurity regions form a first transistor of a first memory cell. The second gate electrode and the second and third impurity regions form a second transistor of a second memory cell. The second impurity region is a drain of the first and second transistors of the first and second memory cells.
    Type: Grant
    Filed: September 12, 2017
    Date of Patent: February 19, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Inhak Lee
  • Patent number: 10211150
    Abstract: A memory structure is provided. The memory structure comprises M array regions and N contact regions. M is an integer ?2. N is an integer ?M. Each array region is coupled to at least one contact region. Each contact region comprises a stair structure and a plurality of contacts. The stair structure comprises alternately stacked conductive layers and insulating layers. Each contact is connected to one conductive layer of the stair structure. Two array regions which are adjacent to each other are spatially separated by two contact regions, which are coupled to the two array regions, respectively.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: February 19, 2019
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Shih-Hung Chen
  • Patent number: 10199564
    Abstract: This method for manufacturing a lead-free niobate-system ferroelectric thin film device includes: a lower electrode film formation step of forming a lower electrode film on a substrate; a ferroelectric thin film formation step of forming a niobate-system ferroelectric thin film on the lower electrode film; an etch mask pattern formation step of forming an etch mask in a desired pattern on the niobate-system ferroelectric thin film; and a ferroelectric thin film etching step of shaping the niobate-system ferroelectric thin film into a desired fine pattern by wet etching using an etchant comprising: a predetermined chelating agent including at least one selected from EDTMP, NTMP, CyDTA, HEDP, GBMP, DTPMP, and citric acid; an aqueous alkaline solution containing an aqueous ammonia solution; and an aqueous hydrogen peroxide solution.
    Type: Grant
    Filed: January 19, 2016
    Date of Patent: February 5, 2019
    Assignees: SUMITOMO CHEMICAL COMPANY, LIMITED, KANTO KAGAKU KABUSHIKI KAISHA
    Inventors: Fumimasa Horikiri, Kenji Shibata, Kazutoshi Watanabe, Kazufumi Suenaga, Masaki Noguchi, Kenji Kuroiwa
  • Patent number: 10192966
    Abstract: A semiconductor device can include a first active pattern on a substrate, the first active pattern including a plurality of first active regions that protrude from the substrate. A second active pattern can be on the substrate including a plurality of second active regions that protrude from the substrate. A first gate electrode can include an upper portion that extends over the first active pattern at a first height and include a recessed portion that extends over the first active pattern at a second height that is lower than the first height of the first gate electrode. A second gate electrode can include an upper portion that extends over the second active pattern at a first height and include a recessed portion that extends over the second active pattern at a second height that is lower than the first height of the second gate electrode.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: January 29, 2019
    Assignee: Samsung Electronics Co., Inc.
    Inventors: Hyunho Jung, Jeongyun Lee, Taesoon Kwon, Kyungseok Min, Geumjung Seong, Bora Lim, A-Reum Ji, Seungsoo Hong
  • Patent number: 10192980
    Abstract: The disclosure is directed to a high-electron mobility transistor that includes a SiC substrate layer, a GaN buffer layer arranged on the SiC substrate layer, and a p-type material layer having a length parallel to a surface of the SiC substrate layer over which the GaN buffer layer is provided. The p-type material layer is provided in one of the following: the SiC substrate layer and a first layer arranged on the SiC substrate layer. A method of making the high-electron mobility transistor is also disclosed.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: January 29, 2019
    Assignee: Cree, Inc.
    Inventors: Saptharishi Sriram, Alexander Suvorov, Christer Hallin
  • Patent number: 10186689
    Abstract: Embodiments of the invention provide an organic light-emitting display (OLED) panel and a manufacturing method for the OLED panel, which comprises providing a substrate comprising a first electrode layer which comprises a plurality of first electrodes spaced apart from each other, forming an insulating layer on the substrate, etching off the insulating layer over the first electrodes by a photolithography process to form a pattern of sub-pixel depositing areas and forming organic light-emitting layers for desired colors within the sub-pixel depositing areas, and forming a second electrode layer on the insulating layer and the organic light-emitting layers. Embodiments of the invention can exactly prepare the organic light-emitting layers to improve yield.
    Type: Grant
    Filed: August 21, 2012
    Date of Patent: January 22, 2019
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Yanzhao Li, Gang Wang, Li Sun
  • Patent number: 10177104
    Abstract: Some embodiments relate to a semiconductor device package, which includes a substrate with a contact pad. A non-solder ball is coupled to the contact pad at a contact pad interface surface. A layer of solder is disposed over an outer surface of the non-solder ball, and has an inner surface and an outer surface which are generally concentric with the outer surface of the non-solder ball. An intermediate layer separates the non-solder ball and the layer of solder. The intermediate layer is distinct in composition from both the non-solder ball and the layer of solder. Sidewalls of the layer of solder are curved or sphere-like and terminate at a planar surface, which is disposed at a maximum height of the layer of solder as measured from the contact pad interface surface.
    Type: Grant
    Filed: June 23, 2017
    Date of Patent: January 8, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Hua Yu, Chung-Shi Liu, Ming-Da Cheng, Mirng-Ji Lii, Meng-Tse Chen, Wei-Hung Lin
  • Patent number: 10170540
    Abstract: Back end of the line (BEOL) capacitors and methods of manufacture are provided. The method includes forming wiring lines on a substrate, with spacing between adjacent wiring lines. The method further includes forming an air gap within spacing between the adjacent wiring lines by deposition of a capping material. The method further includes opening the air gap between selected adjacent wiring lines. The method further includes depositing conductive material within the opened air gap.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: January 1, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Christopher J. Penny, Theodorus E. Standaert, Junli Wang
  • Patent number: 10164054
    Abstract: A compound semiconductor field effect transistor (FET) may include a channel layer. The semiconductor FET may also include an oxide layer, partially surrounded by a passivation layer, on the channel layer. The semiconductor FET may also include a first dielectric layer on the oxide layer. The semiconductor FET may also include a second dielectric layer on the first dielectric layer. The semiconductor FET may further include a gate, comprising a base gate through the oxide layer and the first dielectric layer, and a head gate in the second dielectric layer and electrically coupled to the base gate.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: December 25, 2018
    Assignee: Qualcomm Incorporated
    Inventors: Bin Yang, Gengming Tao, Xia Li, Periannan Chidambaram
  • Patent number: 10158011
    Abstract: A trench gate type MOS gate structure is provided in an active region on a substrate front surface side, and a floating p-type region is provided in a mesa region between trenches. A groove is provided distanced from the trench in a surface layer on the substrate front surface side of the floating p-type region. A second gate electrode is provided across an insulation layer in the interior portion of the groove. The second gate electrode covers the surface on the substrate front surface side of the floating p-type region. Thus, the second gate electrode is embedded in a surface layer on the substrate front surface side of the floating p-type region between the floating p-type region and an interlayer dielectric, whereby the substrate front surface is flattened. Controllability of turn-on di/dt is high, mirror capacitance is low, and an element structure having an intricate pattern can be formed.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: December 18, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yuichi Onozawa, Takahiro Tamura
  • Patent number: 10147738
    Abstract: According to one embodiment, a first semiconductor body extends in a stacking direction of a stacked body through a first stacked unit and contacts a foundation layer. A plurality of contact vias extend in the stacking direction through an insulating layer and contact a plurality of terrace portions. A second semiconductor body extends in the stacking direction through a second stacked unit. An insulating film is provided between the foundation layer and a lower end portion of the second semiconductor body.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: December 4, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Tatsuya Fukumura