Abstract: An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

Abstract: A method of inspecting a connection joint including a first side coupled to an opposite second side along a bond, extending along an edge. The method includes generating at least one first sound wave at a first location on the first side, wherein the first location is at a first distance from the edge. The method also includes receiving the at least one first sound wave at a plurality of sensors coupled to the second side and determining that the bond is present at the first location. The method further includes generating at least one second sound wave at a second location on the first side, wherein the second location is offset a predetermined distance from the first location. The method also includes receiving the at least one second sound wave at the plurality of sensors and determining a width of the bond.

Abstract: An angular velocity sensor includes a mass body; a first frame provided outside of the mass body; a first flexible part connecting the mass body and the first frame to each other; a second flexible part connecting the mass body and the first frame to each other; a second frame provided outside of the first frame; a third flexible part connecting the first frame and the second frame to each other; and a fourth flexible part connecting the first frame and the second frame to each other, wherein the mass body is fixed to the first frame by the second flexible part so as to be rotation-displaceable and translation-displaceable, and the first frame is connected to the second frame by the fourth flexible part so as to be rotation-displaceable.

Abstract: The invention relates to a controller (200) for controlling a rotation rate sensor, having a first control circuit (202) and a second control circuit (204). The first control circuit has a first control unit (210) for controlling an oscillation of the rotation rate sensor along a first direction, a first digital-to-analog converter (240) for converting a first digital control signal (215) output by the first control unit (210) into a first analog signal (245) with which the oscillation of the rotation rate sensor along the first direction is controlled, and a first analog-to-digital converter (250) for converting a first analog measurement signal (235) which describes the oscillation of the rotation rate sensor along the first direction into a first digital read-out signal (255) which is supplied to the first control unit (210).

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

Abstract: A rotation rate sensor includes a substrate having a main extension plane and multiple seismic masses, in which for each seismic mass the following applies: the seismic mass is drivable at a drive oscillation, which occurs along a drive direction situated parallel to the main extension plane, the seismic mass is deflectable along two different deflection directions, each direction being perpendicular to the drive direction, the rotation rate sensor being configured to generate detection signals as a function of detected deflections of the seismic masses, one detection signal of the detection signals being associated with each deflection direction of the seismic masses, the rotation rate sensor being configured so that a linear, rotational and centrifugal acceleration of the rotation rate sensor are compensated with respect to at least one rotation axis of the rotation rate sensor through compensation in each case of two corresponding detection signals of the detection signals.

Abstract: A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air.

Abstract: A closed-loop microelectromechanical gyroscope with a self-test function. At least one test input signal is generated from a signal of the vibrational primary motion and input during operation of the microelectromechanical gyroscope to the sense circuit.

Abstract: A system dynamically balances a rotating body. The system includes a support that holds the body as it rotates. At least one sensor generates signals indicative of a balance of the body as it rotates and a controller identifies a position on the body where material can be placed to balance the body. The controller operates at least one actuator to move a plurality of ejectors opposite the identified position where the controller operates at least one ejector in the plurality of ejectors to eject material onto the identified position. The system can operate iteratively until the body is balanced within a predetermined range.

Abstract: A micro-electromechanical apparatus includes a rotary element, at least one restraint and at least two folded springs. The rotary element is capable of rotating with respect to an axis. The folded springs are symmetrically disposed about the axis. Each folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint. The moving end is not located on the axis, and the fixed end is not located on the axis. A moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis. A spring length is defined as a distance between the moving end and the fixed end. The spring length is varied according to the rotation of the rotary element.

Abstract: An electronic device includes an accommodation space formed between a first base material and a second base material so as to seal a space therebetween, and a functional element in the accommodation space. The accommodation space is formed in an inner region of a bonding portion between the first base material and the second base material. The electronic device includes wirings extending from the inner region through the bonding portion to the outside of the accommodation space. The bonding portion includes a first bonding region and a second bonding region. The wiring includes a first wiring portion having a first direction toward the outside through the first bonding region from the inner region and a second wiring portion having a second direction toward the outside through the second bonding region from the inner region. The first and the second directions are different.

Abstract: The present invention relates to measuring unit for measuring forces generated by unbalance of rotor mounted on measuring shaft, particularly of vehicle wheel mounted on measuring shaft of wheel balancing machine, the measuring unit comprising stationary frame, first bearing for receiving measuring shaft rotatably about its shaft axis (Z), second bearing pivotally supporting first bearing about pivot axis (Y) which intersects shaft axis (Z) and being supported on stationary frame, first force sensor for measuring forces generated by unbalance of rotating rotor and acting on measuring shaft about pivot axis (Y), and second force sensor for measuring forces generated by unbalance of rotating rotor and acting on measuring shaft and on second bearing in direction intersecting shaft axis (Z), wherein second bearing and stationary frame are integrally formed of single element as support plate.

Abstract: According to one example, a system includes a flexural beam having a first face and a second face opposite the first face and a first coil of optical fiber coupled to the first face, where the first coil of optical fiber is encapsulated by a cured encapsulation composition, wherein the encapsulation composition has a viscosity from 30 to 300 millipascal-second at 25° C.

Abstract: A method and geophysical acceleration sensor (100) for measuring seismic data and also for protecting the sensor from shock. The sensor includes a housing (102); a flexible beam (104) having a first end fixedly attached to the housing; a piezoelectric layer (108) attached to the flexible beam; a seismic mass (112) attached to the flexible beam; and a first movement limiter (130) connected to the housing and configured to limit a movement of the flexible beam. A distance between a tip of the first movement limiter and the flexible beam is adjustable.

Abstract: A physical quantity sensor includes: an oscillating body having a support section and a movable section which is connected to the support section through connection portions, in which the movable section has a first movable portion and a second movable portion; a first fixed electrode which is disposed to face the first movable portion; a second fixed electrode which is disposed to face the second movable portion; and a dummy electrode which is disposed to face the second movable portion so as not to overlap the second fixed electrode and has the same potential as potential of the oscillating body, in which the first fixed electrode is disposed such that a portion thereof overlaps the support section when viewed in a plan view.

Abstract: An oscillator has a first axis and a second axis as two axes perpendicular to each other and a third axis perpendicular to a plane containing the first axis and the second axis and includes a mass part including a support and a first displacement portion and a second displacement portion that are connected rotatably around the first axis to the support via beams and extend along the direction of the second axis. The first displacement portion is provided on one side of the mass part and the second displacement portion is provided on the other side of the mass part, and free ends of the first displacement portion and the second displacement portion face each other and are connected to each other via a connection portion.

Abstract: A method and an apparatus for guided-wave tomographic measurement or monitoring of wall thicknesses of the walls of pipes and similar structures are disclosed. The method is characterized in that use is made of transducers (205) preferably positioned in at least two groups of a plurality of transducers (305?-305?) arranged in a spaced apart pattern on the external surface of the structures, the transducers individually transmit ultrasound signal into the pipe wall 204, in that each ultrasound signal propagates within the pipe wall 204 from the transmitting transducer and is received at one or several receiving transducers, and the received ultrasound signal is converted to an electrical signal by the receiving transducers and recorded by the transceiver (20). Measurements are performed by using a further plurality of transducers (406, 506) that are placed apart from the two groups of a plurality of transducers (305?-305?).

Abstract: A system for measuring the position of a rod element as, for example, a hydraulically or pneumatically operated piston rod. Unlike the prior art, the system according to the present invention employs a measuring principle that does not require preparatory treatment of the rod element as is required in the known solutions. The system employs direct time of flight measurements with the aid of acoustic surface waves that are introduced into the rod element. The instrument is retrofittable on existing cylinders without any modification/reconstruction thereof. An EMAT principle is employed to introduce the surface waves into the measurement in a non-contact manner.

Abstract: A thermally insensitive open-loop hung mass accelerometer utilizes a transverse geometry to attach the body/flexures/proof mass so that thermal expansion effects due to thermal gradients across the accelerometer or bulk temperatures changes of one flexure relative to the other cause minimal or no axial displacement of the proof mass. In this geometry, multiple flexures may be stacked to achieve the required stiffness, thus reducing manufacturing costs and any tolerancing issues, without affecting thermal sensitivity. The accelerometer is suitably designed to exhibit a radial symmetry. The accelerometer is suitably designed to use low CTE materials for at least the proof mass and body and a low thermal expansion differential Eddy current sensor head.

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10).