Abstract: A composite base of the present invention includes a sintered base and a base surface flattening layer disposed on the sintered base, and the base surface flattening layer has a surface RMS roughness of not more than 1.0 nm. A composite substrate of the present invention includes the composite base and a semiconductor crystal layer disposed on a side of the composite base where the base surface flattening layer is located, and a difference between a thermal expansion coefficient of the sintered base and a thermal expansion coefficient of the semiconductor crystal layer is not more than 4.5×10?6K?1. Thereby, a composite substrate in which a semiconductor crystal layer is attached to a sintered base, and a composite base suitably used for that composite substrate are provided.
Type:
Grant
Filed:
May 13, 2011
Date of Patent:
November 10, 2015
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventors:
Yuki Seki, Issei Satoh, Koji Uematsu, Yoshiyuki Yamamoto