Abstract: An optical coherence tomography apparatus constructs a tomographic image of a measurement object on the basis of a spectral characteristic obtained by spectrally dividing interference light, which combines signal light composed of the measurement light reflected by the measurement object and reference light, using an optical demultiplexer.

Abstract: A displacement detection apparatus includes a light source for emitting light and an extinction ratio conversion element which raises an extinction ratio of the light to 20 dB or more. A condenser lens condenses the light having the increased extinction ratio and a polarization maintaining type optical fiber transmits the condensed light which is subsequently transferred to a diffraction grating that is attached to an object to be measured. The displacement detection apparatus adjusts a polarization axis of the light having increased extinction ratio.

Abstract: Polarization sensitive common path OCT/OCR devices are presented. Optical radiation from a source is converted into two cross-polarized replicas propagating therethrough with a predetermined optical path length difference. The two cross-polarized replicas are then delivered to an associated sample by a delivering device, which is, preferably, an optical fiber probe. A combination optical radiation is produced in at least one secondary interferometer by combining a corresponding portion of an optical radiation returning from the associated sample with a reference optical radiation reflected from a tip of an optical fiber of the optical fiber probe. Subject to a preset optical path length difference of the arms of the at least one secondary interferometer, a cross-polarized component, and/or a parallel-polarized component of the combined optical radiation, are selected. The topology of the devices allows for time domain, as well as for frequency domain registration.

Abstract: The present invention relates to a large area undistorted imaging apparatus for light speckles and a method thereof. The large area undistorted imaging apparatus for light speckles comprises a light-emitting device, a light-limiting module, and a sensor. The light-limiting module is adapted in front of the sensor, and includes a plurality of light-limiting members. The light-limiting members are arranged in a one- or two-dimensional array. When the light-emitting device emits light to an object surface, one or more rays of scattered light are produced. By means of the light-limiting module, said one or more rays of scattered light are limited, and a plurality of rays of diffraction light is produced. The plurality of rays of diffraction light within a certain angular field of view produced by a light-limiting member interferes with each other and produces a plurality of undistorted light speckles, and forms an array of light-speckle images on the sensor.

Abstract: A system and method for determining parameters such as critical dimension of a patterned structure and best focus condition of a lithographic apparatus, based on measurement of the intensity of a non-zero order of light diffracted from an experimental structure. The experimental structure includes a first array of lines and partially filled spaces having a period longer than the wavelength of the diffracted light. The experimental structure also includes a second array of lines and spaces, where the second array of lines and spaces comprise the partially filled spaces.

Abstract: The invention provides an interferometric system and method for quadrature detection of optical characteristics of a sample. The system includes a Mach-Zehnder interferometer providing a variable optical delay between light collected from the sample and reference light. The Mach-Zehnder interferometer has an output M×N coupler with N?3 output ports. Two differential detectors, each having two input ports coupled to a different two of the N output ports of the M×N coupler, produce first and second electrical signals having an interferometric phase shift. A processor is provided for computing real and imaginary parts of a complex refractive index of the sample from the first and second electrical signals by using complex deconvolution.

Abstract: Methods and systems for measurements of a substrate are provided. One system includes a non-optical subsystem configured to perform first measurements on a substrate. The system also includes an optical subsystem coupled to the non-optical subsystem. The optical subsystem is configured to perform second measurements on the substrate. In addition, the system includes a processor coupled to the subsystems. The processor is configured to calibrate one of the subsystems using the measurements performed by the other subsystem. One method includes performing first measurements on a substrate using a non-optical subsystem and performing second measurements on the substrate using an optical subsystem that is coupled to the non-optical subsystem. The method also includes calibrating one of the subsystems using the measurements performed by the other subsystem.

Abstract: A direct detection method and apparatus for a fiber optic acoustic sensor array systems using an in-line Michelson sensor TDM array and an interferometric section having two acousto-optic modulators that produce optical pulses that are frequency shifted with respect to each other. Direct detection is accomplished according to the equation: I(t)=A+B cos [?1??2+2?(f1?f2)t], with the phase shift difference ?1??2 between two paths containing the acoustic phase information and the frequency f1?f2 being the difference between the RF frequencies for the two acousto-optic modulators.

Abstract: A method apparatus for sensing gases using a semiconductor diode laser spectrometer, the method comprising: introducing a sample gas into a non-resonant optical cell (17); applying a step function electrical pulse (19) to a semiconductor diode laser (20) to cause the laser (20) to output a continuous wavelength chirp for injecting (16a) into the optical cell (17); injecting (16a) the wavelength chirp into the optical cell (17); using the wavelength variation provided by the wavelength chirp as a wavelength scan, and detecting (23) light emitted from the cell (17), wherein a chirp rate is selected to substantially prevent light interference occurring in the optical cell (17).