Abstract: A bulk acoustic wave resonator includes a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed to cover at least a portion of the lower electrode; an upper electrode disposed to cover at least a portion of the piezoelectric layer; and a passivation layer disposed to cover at least a portion of the upper electrode, wherein the passivation layer includes a non-trimming-processed portion disposed outside an active region of the bulk acoustic wave resonator in which portions of the lower electrode, the piezoelectric layer, and the upper electrode overlap, and having a thickness that is thicker than a thickness of a portion of the passivation layer disposed in the active region.

Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The interleaved fingers include a first layer having a rectangular shape adjacent the diaphragm and a second layer over the first layer opposite the diaphragm, and wherein a width of the second layer varies along a length of each finger.

Abstract: A coaxial-waveguide-to-hollow-waveguide transition circuit (1) includes a hollow waveguide (10), a coaxial waveguide (20) having an end coupled to a wide wall (16) of the hollow waveguide (10), and a strip conductor (30) located inside the internal path (10h) of the hollow waveguide (10). The coaxial waveguide (20) includes a conducting core wire (22) extending into the internal path (10h) of the hollow waveguide (10). The strip conductor (30) is located so as to make a short-circuit connection between the conducting core wire (22) of the coaxial waveguide (20) and a termination surface (12) of the hollow waveguide (10).

Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces and a thickness ts, the back surface attached to the surface of the substrate except for portions of the piezoelectric plate forming a plurality of diaphragms that span respective cavities in the substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern comprising a plurality of interdigital transducers (IDTs) of a plurality of acoustic resonators, interleaved fingers of each IDT of the plurality of IDTs disposed on a respective diaphragm of the plurality of diaphragms. Zero or more dielectric layers are deposited over all of the IDTs and the diaphragms, wherein a total thickness of the zero or more dielectric layers is the same for all of the plurality of acoustic resonators.

Abstract: A multilayer board includes a laminated insulating body, signal conductors inside the laminated insulating body and extending in a transmission direction, and ground conductors sandwiching each of the signal conductors in a lamination direction via the insulating base material layers. The multilayer board includes a parallel extending portion in which the signal conductors extend parallel and that includes signal conductors arranged separately from each other in a direction orthogonal to the transmission direction in a planar view in the lamination direction, and a signal conductor overlapping with the signal conductor in a planar view in the lamination direction and arranged separately from the signal conductor in the lamination direction. The parallel extending portion includes first and second regions arranged separately in a direction orthogonal to the transmission direction in a planar view in the lamination direction.

Abstract: A focusing interdigital transducer (IDT) and corresponding single- and dual-port piezoelectric devices are disclosed. The focusing interdigital transducer, which generates Lamé acoustic waves, permits operation at significantly higher frequencies than those possible with traditional IDTs. The focusing IDT employs multiple arced fingers formed both above and below the piezoelectric layer to improve coupling efficiency by coupling through both the e31 and e33 piezoelectric coefficients to the piezoelectric layer. By optimizing both anchor design and location, acoustic wave losses are minimized, thereby improving the device's quality factor Q. Through proper bus design and selection of the number of IDT fingers, a device's impedance can be tuned for a given application. The focusing IDTs may be used in single-port filter devices and dual-port transformer devices. The single- and dual-port devices may operate at a single frequency, at two frequencies, or over a band of frequencies.

Abstract: A layered body includes a ceramic substrate formed of a polycrystalline ceramic and having a supporting main surface and a piezoelectric substrate formed of a piezoelectric material and having a bonding main surface that bonds to the supporting main surface through Van der Waals force. The ceramic substrate includes a supporting main surface amorphous layer formed so as to include the supporting main surface. The piezoelectric substrate includes a bonding main surface amorphous layer formed so as to include the bonding main surface. The supporting main surface amorphous layer has a smaller thickness than the bonding main surface amorphous layer.

Abstract: A radio frequency coupler includes a waveguide having an outer conductor and an inner conductor in a coaxial tube shape. The waveguide extends linearly from a power supply side, is bent in an L shape at a bend section, and extends linearly toward an acceleration cavity. A refrigerant passage part passes through the outer conductor and the inner conductor at the bend section from the outside of the waveguide toward the acceleration cavity and is connected to the interior of the inner conductor. The refrigerant passage part has a passage tube through which refrigerant passes between the inner part of the tip on the acceleration cavity side of the inner conductor, and the outer part of the waveguide, and the portion of the passage tube that is exposed to a radio frequency transmission space formed between the outer conductor and the inner conductor being formed of an insulator.

Abstract: A stripline that is usable in a quantum application (q-stripline) includes a first polyimide film and a second polyimide film. The q-stripline further includes a first center conductor and a second center conductor formed between the first polyimide film and the second polyimide film. The q-stripline has a first pin configured through the second polyimide film to make electrical and thermal contact with the first center conductor.

Abstract: A device is provided that includes a first waveguide configured to guide propagation of RF waves inside the first waveguide. A first side of the first waveguide is configured to emit an evanescent field associated with the propagation of the RF waves inside the first waveguide. The device also includes a second waveguide having a second side positioned within a predetermined distance to the first side of the first waveguide. The second waveguide is configured to guide propagation, inside the second waveguide, of induced RF waves associated with the evanescent field from the first waveguide. The device also includes a first probe coupled to the first waveguide and configured to emit the RF waves for propagation inside the first waveguide. The device also includes a second probe coupled to the second waveguide and configured to receive induced RF waves propagating inside the second waveguide.

Abstract: A microstrip that is usable in a quantum application (q-microstrip) includes a ground plane, a polyimide film disposed over the ground plane at a first surface of the polyimide film, and a conductor formed on a second side of the polyimide film such that the first surface is substantially opposite to the second surface. A material of the conductor provides greater than a threshold thermal conductivity (TH) with a structure of a dilution fridge stage (stage).

Abstract: The present disclosure relates to a tunable waveguide filter input/output coupling arrangement comprising a waveguide part, a coupling iris part and a tunable filter part. The waveguide part runs along a longitudinal extension and has a waveguide width extending perpendicular to the longitudinal extension, and is electrically connected to the tunable filter part by means of the coupling iris part which comprises an opening between the waveguide part and the tunable filter part. The opening is positioned at a certain position along the longitudinal extension. The waveguide part comprises a stub part that has a certain stub length along the longitudinal extension, between an electrical short-circuit end plate and an edge of the opening that is closest to the end plate, where the stub part also has a stub width extending perpendicular to the longitudinal extension.

Abstract: A wideband piezoelectric filter with a ladder-type is provided, which is composed of a plurality of first resonators connected in series, a plurality of second resonators connected in parallel, an impedance matching device disposed near the input terminal or the output terminal of the filter, and at least one special parallel ground path led out from serial nodes. The special parallel ground path at least comprises one inductor having a larger inductance value, and a resonator having the same resonant frequency as a serial branch or a capacitor, wherein the larger inductor is connected to the resonator or capacitor in series in the parallel path. The ladder filter according to the invention can have a bandwidth which is more than twice that of the conventional ladder filter, and also has excellent out-of-band rejection characteristics.

Abstract: Provided is a multilayered transmission line plate including one pair of ground layers, a differential wiring layer disposed between one ground layer and the other ground layer of the one pair of ground layers, a first insulating portion disposed between the differential wiring layer and the one ground layer, and a second insulating portion disposed between the differential wiring layer and the other ground layer, wherein the first insulating portion has a resin layer, the first insulating portion or the second insulating portion has a fiber base material layer including a fiber base material, and a thickness of the first insulating portion is equal to or thinner than a thickness of the second insulating portion.

Abstract: A filter includes a plurality of series portions each including one or more series resonators, and a plurality of shunt portions each including one or more shunt resonators. At least one of the plurality of shunt portions includes two shunt resonators connected to each other in anti-series, and antiresonance frequencies of the two shunt resonators are arranged externally of a passband.

Abstract: A bulk-acoustic wave resonator includes a substrate, a cavity formed in the substrate, a first electrode, a piezoelectric layer, and a second electrode stacked in order on the substrate, a resonator defined by the first electrode, the piezoelectric layer, and the second electrode overlapping in a vertical direction in an upper portion of the cavity, an additional layer disposed on one surface of the first electrode arranged in a wiring region on an external side of the resonator, and a wiring electrode connected to the first electrode arranged in the wiring region. The first electrode forms a contact interfacial surface with the additional layer and the wiring electrode.

Abstract: An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.

Abstract: Acoustic wave devices and interdigital transducer (IDT) arrangements for surface acoustic wave (SAW) devices are disclosed. Representative SAW devices are described herein that provide sharp transitions between passband frequencies and frequencies that are outside of desired passbands. A SAW device may include several IDTs arranged between reflective structures on a piezoelectric material and one or more additional IDTs or electrode pairs that are configured to modify the influence of parasitic capacitance, or other internal device capacitance, thereby improving steepness on the upper side of a passband as well as improving rejection for frequencies outside of the passband. The one or more additional IDTs or electrode pairs may be configured as at least one of a capacitor, an IDT capacitor, an IDT with a floating electrode, or combinations thereof.

Abstract: A multiplexer includes a common terminal, a first band pass filter that is connected to the common terminal and has a first pass band, and a second band pass filter that is connected to the common terminal and has a second pass band located at higher frequencies than the first pass band. The first band pass filter includes an acoustic wave device that includes a support substrate, a piezoelectric body stacked on the support substrate, and an IDT electrode provided on the piezoelectric body. The piezoelectric body is made of lithium niobate. The acoustic wave device utilizes Rayleigh waves.

Abstract: A beamforming system, comprising a plurality of subsets of tunable resonator elements arranged on a substrate. Each subset of tunable resonator elements comprises at least two resonator elements that have a common resonance property modifiable by a common physical stimulus. A first control input may provide a first physical stimulus to modify the resonance property of all the tunable resonator elements in a first subset of tunable resonator elements. A second control input may provide a second physical stimulus to modify the resonance property of all the tunable resonator elements in a second subset of tunable resonator elements. A controller adjusts the first and second physical stimulus provided via the control inputs between a plurality of physical stimulus values. Each different physical stimulus value corresponds to one of a plurality of a unique resonance patterns and associated unique radiation patterns.