Patents Examined by Joshua L Prichett
  • Patent number: 7342718
    Abstract: A stage movable in the X and Y directions includes a base member, first and second moving members, and first and second rotational operation mechanisms. The first moving member is provided with a movement transmission mechanism that allows linear movement of the second moving member in a first direction and causes, when the first moving member moves in a second direction, the first and second moving members to move together in the second direction, and the second moving member is provided with a transmission portion that engages a linear movement member so that it moves upon movement of the linear movement member. The linear movement member transmits movement to the transmission portion to cause the second movement member to move in a first direction and guides the transmission portion upon linear movement of the first and second moving members in the second direction by the movement transmission mechanism.
    Type: Grant
    Filed: March 12, 2004
    Date of Patent: March 11, 2008
    Assignee: Nikon Corporation
    Inventor: Atsushi Takeuchi