Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract: In a method for scanning microscopy an illuminating light beam that contains at least first light of a first wavelength and second light of a second wavelength, is coded. The coded illuminating light beam is directed onto a specimen and detection light proceeding from the specimen is decoded.

Abstract: An imaging method and system are presented for detecting the topography of a sample surface. Illuminating light is directed to the sample by sequentially passing the illuminating light through a grating and an objective lens arrangement The grating has a pattern formed by spaced-apart transparent regions spaced by non-transparent regions, and is specifically oriented with respect to the optical axis of the objective lens arrangement. Light, specularly reflected from the sample, is collected by the same objective lens arrangement and is directed to an imaging detector through the same grating, thereby enabling creation of an image of the illuminated sample indicative of the topography of the sample surface.

Abstract: Disclosed is methodology for determination of parameters which characterize parameters such as thickness, color or quality of films deposited onto objects of arbitrary shapes, utilizing spectroscopic ellipsometry applied to standard shaped objects.

Abstract: A method of adjusting thermal dependence of an optical fiber involves hydrogenating the fiber to render it photosensitive, and then exposing it to UV radiation for such time period as to achieve the desired adjustment in the thermal dependence. In an all-fiber Mach-Zehnder interferometer, the method involves using a photosensitive fiber as one of the arms of the interferometer and exposing this photosensitive fiber to UV radiation so as to adjust the thermal dependence of the interferometer. The resulting interferometer is also part of the invention.