Abstract: In case that some trouble occurs in exhaust pump or in pipe, internal pressure of groove comes closer to atmospheric pressure owing to leak-in of air, because the groove adjoins groove opened to atmospheric air. However, the internal pressures of grooves are maintained at negative value. Thus, difference in pressure between the top and bottom surfaces of moving block is generated. Further, the gap between the moving block and the intermediate block decreases. Consequently, the deterioration in the degree of vacuum in the process chamber can be retarded. During retarded time, measures to protect an object to be processed, such as operation of tightly sealing the object can be taken. Further, in case that the system recovers, time required to operate turbo-molecular pump for sucking the inside of the process chamber is reduced to a short time. Therefore, the processing can be quickly resumed.

Abstract: A control system for a linear motor adapted to accurately supply a moving window of power to the stator coils. A plurality of individually switched stator coils run the length of a linear motor to move a rotor down the long axis of the stator. Accurate inductive-based position sensors continuously provide position data for the moving rotor. A processing unit calculates a proper time delay from a source voltage peak in order to apply power to the next stator coil in the moving direction of the rotor such that no DC offshoot/undershoot occurs. The linear motor control system optionally includes a failure prevention switching scheme in which pairs of individual stator coils on opposite sides of a double-sided stator are switched together.

Abstract: A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage.

Abstract: In an electric motor in which a magnet holder is provided in an inner periphery of a yoke, and a terminal insertion hole is provided in a feed connector provided in a brush holder. A terminal connected to a brush is inserted to the terminal insertion hole, and the yoke and the brush holder are connected. An engagement portion is provided in the terminal, a convex portion is provided in an end surface of the magnet holder, and the convex portion of the magnet holder is allowed to be engaged with the engagement portion of the terminal under a state in which the yoke and the brush holder are connected.

Abstract: In an electric motor having a brush holding portion for holding a brush and a pigtail holding means for holding a pigtail connected to the brush, on a holder surface of a brush holder, the pigtail holding means holds the pigtail in both a lateral direction along the holder surface and a longitudinal direction crossing to the holder surface.

Abstract: An oscillatory linear actuator including a plurality of movable elements configured to move in a linear direction, a stationary component configured to drive the plurality of movable elements to move in the linear direction, and a plurality of connecting devices elastically connecting the plurality of movable elements with each other and positioned on at least one end portion of the plurality of movable elements in the linear direction, each of the plurality of connecting devices being extending away from the plurality of movable elements in opposite directions.

Abstract: A linear motor includes a stator including a stator core for forming plural magnetic poles and a magnetic wire mounted on the stator core, and a mover provided at the interior of the stator and including a mover core and a magnet mounted on the outer side of the mover core. The linear motor has the magnet have a reduced mass, thus having a small size, a low overall cost, and a high operating efficiency.

Abstract: A small and high rigid linear motor (1), wherein a tabular heat pipe (7) is disposed between a plurality of coil rows forming an armature coil (6) along the longitudinal direction of an armature (5) with a part of the heat absorbing part of the heat pipe (7) fixed to the armature coil (6) and the heat radiating part thereof inserted into a refrigerant passage (11), a block-shaped locking member (8) for fixing the heat pipe (7) to a frame (10) is installed between the portion of the heat pipe (7) for fixing the armature coil thereto and the portion thereof inserted into the refrigerant passage (11), and a hollow recessed part (10a) forming the refrigerant passage (11) and allowing die insertion of the heat radiating part of the heat pipe (7) therein and a locking step part (10c) allowing the locking of the frame (10) to the locking member (8) installed on the heat pipe are provided in the frame (10), whereby the heat of the armature coil can be efficiently transferred to the frame, and the thrust of a rotor ca

Abstract: An electric machine including a first member and a second member. The second member is movable in relation to the first member. The first member has at least one coil and the first and the second members both include a plurality of segments, where each segment of the first member comprises a plurality of sections have a first magnetic conducting material. Each segment of the second member includes a plurality of sections having a second magnetic conducting material, and in which the first and the second member includes a closed magnetic circuit.

Abstract: A motor includes a stator and a rotor having drive permanent magnets and a rotary shaft. The stator supports a core with coils wound thereon and includes a base plate. The base plate is formed with a resin, and is composed of a core supporting section that supports the core, a shaft supporting section that rotatably supports the rotary shaft, and attachment sections for attaching the motor to an apparatus. The core supporting section, the shaft supporting section and the attachment sections of the base plate are formed in one piece.

Abstract: An active balance system is provided for counterbalancing vibrations of an axially reciprocating machine. The balance system includes a support member, a flexure assembly, a counterbalance mass, and a linear motor or an actuator. The support member is configured for attachment to the machine. The flexure assembly includes at least one flat spring having connections along a central portion and an outer peripheral portion. One of the central portion and the outer peripheral portion is fixedly mounted to the support member. The counterbalance mass is fixedly carried by the flexure assembly along another of the central portion and the outer peripheral portion. The linear motor has one of a stator and a mover fixedly mounted to the support member and another of the stator and the mover fixedly mounted to the counterbalance mass. The linear motor is operative to axially reciprocate the counterbalance mass.

Abstract: A small electric appliance drive mechanism includes a first drive component, a second drive component, and a coil configured to produce a magnetic field extending from the first drive component and acting on the second drive component. The first drive component and the second drive component are movably arranged in the small electric appliance and adapted to oscillate in phase opposition to one another.

Abstract: A method for driving a thrust body with a bidirectional linear solenoid drive having at least in each case one first actuator and one second actuator includes the steps of providing the at least one first actuator with at least one coil and a yoke and applying force alternately to the thrust body by interacting the first actuator with at least one armature ring. The armature ring is rotated with the second actuator to thereby axially shift the thrust body by the rotation of the armature ring. The thrust body is, then, shifted axially and is subsequently fixed in position with the thrust body being shifted in steps in this way until it has reached its respective final position. Also provided is a configuration for carrying out the method.

Abstract: A closed box structure of a horizontal linear motor machine tool, comprising a frame, serving as a machine platform, carrying an X-movable part, a Y-movable part, and a Z-movable part, with said Y-movable part mounted on said X-movable part, said Z-movable part mounted on said Y-movable part, and said Z-movable part having a main axis head; characterized in that said frame, said X-movable part and said Y-movable part are shaped like open squares, said X-movable part, said Y-movable part and said Z-movable part each carry a set of two symmetrically adapted linear motors for being driven, wherein for each of said sets of linear motors magnetic forces are balanced against each other, so that deformations due to magnetic forces are avoided.

Abstract: The linear synchronous motor consists of a specific primary and secondary part. The secondary portion is a ferromagnetic back plate. An array of permanent magnets are attached to the back plate so that a fixed or variable pole pitch occurs in a precise manner between at least two magnets of alternating polarity which improves existing methods for attaching, guiding, protecting and enhancing the overall flux array produced and emitted by the permanent magnets. A one-piece electrically synchronous linear secondary stator member accompanies a primary member, the synchronous linear permanent magnet motor. The stator electrical frequency is customizeable to allow for a wide variety of braking applications.

Abstract: An electric linear motor includes a rotor as primary; and a secondary which is spaced from the rotor to define an air gap therebetween for interaction between the rotor and the secondary. The secondary has a carrier with electrically and/or magnetic driving elements, a cover for protection of the carrier against contamination or damage, and a support unit which supports the cover for movement relative to the carrier. Thus, contaminated regions of the cover can be removed from the surface of the secondary and cleaned by a wiper element.

Abstract: The present invention relates generally to reciprocating electromagnetic devices, and more particularly to a construction of a reciprocating electromagnetic device for reducing secondary losses in magnetically-permeable elements, but without compromising manufacturability as required in prior art. The device provides for shaped pole faces to reduce local magnetic flux density and/or interruptions of electrically-conductive paths in the planes of the laminated layers of the stationary element of the device.

Abstract: The present invention relates systems and methods for compensating for errors associated with a linear motion system. The systems and methods determines one or more errors associated with the linear motion system and adjusts or corrects an input drive signal associated with the linear motion system to compensate for the one or more errors. The one or more errors of the linear motion system can include cogging errors and ripple errors. The one or more errors can be measured using a measurement system or the one or more errors can be associated with selectable coefficients or parameters, such as standard errors, or device type errors stored in a library.

Abstract: An XY coordinate measuring stage includes a drive unit for a coordinate axis. The drive unit has a friction rod and a motor, the motor including a motor shaft in contact with a side of the friction rod. An applied pressure roller contacts an opposite side of the friction rod. At least one applied pressure spring urges the applied pressure roller, the friction rod, and the motor shaft against one another with an applied pressure force so that the motor shaft frictionally engages the friction rod, converting a rotational motion of the motor into a linear motion of the friction rod. A compensation device associated with the motor shaft generates a compensation force onto the motor shaft oppositely to the applied pressure force so as to at least partially compensate for the applied pressure force.

Abstract: A linear electrical machine may function as an alternator or a motor. Three annular magnets may be provided that move relative to a core. The magnets may all have a different magnetic orientation. Two magnets may have a north pole oriented in a direction parallel to an axis along which the magnets move relative to the core. Another magnet may have a north pole oriented in a direction perpendicular to the axis.