Abstract: A coaxial starter motor assembly that includes a housing. An electrical motor is provided in the housing that has a rotatable armature shaft that is linked with a drive shaft. A pinion assembly is provided that is engageable at one end with the drive shaft and includes a pinion at the other end engageable with a flywheel of an engine. A solenoid assembly is provided for selectively energizing the electrical motor. The solenoid assembly is coaxial with the drive shaft. The solenoid assembly includes a plunger having a bore. The plunger is engageable with the pinion assembly to move the pinion assembly including the pinion into engagement with the flywheel. The plunger is also engageable with a moveable contact to move the moveable contact to electrically connect with a pair of fixed contacts. A return spring is provided that is positioned at least in part within the bore of the plunger of the solenoid assembly for moving the pinion assembly including the pinion away from engagement with the flywheel.
Abstract: To provide a flat motor device capable of suppressing a thermal effect on a peripheral environment. When currents are supplied to armature coils 34 confronting a pole unit 40, a wafer stage WST is driven along a moving surface 32a by electromagnetic force. With this operation, the armature coils 34, to which the respective currents are supplied, generate heat. The armature coils 34 are disposed in the interior of a base 32 along the moving surface. A first fluid passage 62, in which a first fluid flows in a laminar flow state, is disposed to the armature coils on the moving surface side thereof and a second fluid passage 64, in which a second fluid flows in a transition flow state, is disposed thereto on the side opposite to the moving surface, respectively.
Abstract: A cantilever stage for precision movement and positioning an article such as a reticle in an electron beam photolithography system is disclosed. The cantilever stage comprises a cantilevered support platform for supporting the article extending from a movable member. The cantilever stage is supported by at least one elongate guide extending through a channel defined by the movable member. The cantilever stage may be driven by one or more actuators mechanically coupled to the movable member to move and position the cantilever stage in a first direction along the elongate guide. The actuator may be any suitable actuator such as an electromagnetic drive motors. The movable portion defines an open region which includes the center of gravity of the cantilever stage and is configured to receive a counterbalance or reaction force balancing device. The cantilever stage may also be driven in a second direction, generally perpendicular to the first direction, by an actuator mechanically coupled to the elongate guide.
Abstract: A table moving within a plane parallel with respect to a guide plane of a base is located within an opening of a moveable frame moving along the guide plane so as to be guided in an X-direction by an X-direction guide. The table moves in a Y-direction within the moveable frame. The base member and the moveable frame, the moveable frame and a guide, and the base member and said table member are maintained in a state of non-contact by a hydrostatic pressure gas bearing. A planar motor is comprised of electromagnets provided at the base member and permanent magnets provided at the lower surface of said table member installed on the guide plane for the base. The moveable frame and the table are then levitated and moved in the XY directions by the planar motor.
Abstract: A DC voltage converter apparatus is provided to convert a fluctuating input DC voltage into an isolated and regulated output DC voltage by operation of a first switch device for charging a capacitor through one primary winding of a transformer and a second switch device for discharging the capacitor through a second primary winding of that transformer. A load is energized by an output voltage from a first secondary winding when the first switch is conducting and is energized by an output voltage from a second secondary winding when the second switch is conducting. The first and second switching devices are controlled in response to the voltage change across the capacitor.
Abstract: A power supply switching circuit for supplying a pair of power supply voltages different in level, such as programming voltage V.sub.pp and reference voltage V.sub.cc, selectively is provided. The circuit includes a plurality of P-channel and N-channel MOS transistors which are appropriately connected such that no leakage or reverse current is produced even if the voltage at the V.sub.pp terminal becomes lower than V.sub.cc.
Abstract: A power supply circuit including a voltage stabilizing circuit and a voltage changing circuit responsive to an external control signal. The power supply circuit operates in one of two voltage-level changing modes. One mode changes the voltage level from a first stabilized output voltage to a second stabilized output voltage and the other mode cuts off or restores a stabilized output voltage.
Abstract: An integrated current mirror circuit in which a compensation transistor is added in each stage of the mirror to compensate for the base-substrate leakage currents of the other transistors in the mirror circuit and to keep the circuit operative even at high temperatures and low current levels. Each compensation transistor is matched with the other transistors in its stage and has its collector-emitter circuit connected between a voltage source terminal and the common base connection of the other transistors. The base of each compensation transistor is unconnected to the remainder of the circuit but exhibits a base-substrate leakage current which is employed in the compensation scheme.