Abstract: A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.
Type:
Grant
Filed:
January 22, 2015
Date of Patent:
June 27, 2017
Assignee:
UT-Battelle, LLC
Inventors:
Danny J. King, Susan Babinec, Patrick L. Hagans, Lonnie C. Maxey, Edward A. Payzant, Claus Daniel, Adrian S. Sabau, Ralph B. Dinwiddie, Beth L. Armstrong, Jane Y. Howe, David L. Wood, III, Nicole S. Nembhard