Patents Examined by Kallambella Bijayakumar
  • Aqueous dispersion, process for its production and use
    Patent number: 7169322
    Abstract: Aqueous dispersion containing a silicon-aluminum mixed oxide powder, the powder containing 0.1 to 99.9 wt. % Al2O3 and Si—O—Al-bonds. The dispersion can be produced using dispersing and/or grinding devices which a achieve an energy input of at least 200 KJ/m3. The dispersion can be used for the chemical-mechanical polishing of semiconductor substrates.
    Type: Grant
    Filed: February 21, 2002
    Date of Patent: January 30, 2007
    Assignee: Degussa AG
    Inventors: Frank Menzel, Wolfgang Lortz, Helmut Mangold