Abstract: An object of the present invention is to provide a sensing system, a sensing method, and an analyzing device using OFDR in which a sensing range of strain/temperature is less likely to be limited by a frequency sweep width. In the sensing method using OFDR, the sensing system according to the present invention employs sequential update, per measurement by one frequency sweep of the probe light, for setting the reference spectrum to the spectrum of an immediately preceding measurement, by which a spectral shift between an n-th measurement and an (n?1)th measurement is obtained, and the spectral shifts individually obtained between the measurements are integrated.

Abstract: A method for measuring an item of geometric information of an interface of an optical element including interfaces, with a device configured to direct a measurement beam towards the optical element so as to pass through at least one of the interfaces and be reflected by the interface and generate a reflected beam, to selectively detect an interference signal between the reflected beam and a reference beam, the method including positioning a coherence area at an interface; measuring the interface so as to produce interference signals; and processing the signals including constructing a mathematical interface based on a sub-set of interference signals, determining, based on the mathematical interface and an expected shape of the interface, an item of geometric information of the interface.

Abstract: A tri-mask optical polarization diversity receiver with a single input terminal and three output terminals prevents polarization induced signal fade, and may be used in an optical interferometry system for coherent detection. The device is composed of optical collimators, non-polarizing beam splitters, linear polarizers and photodetectors. In addition, the structural design incorporates two mechanically identical modulets, as well as a beam displacement compensation mechanism for ease of alignment and assembly. Compared to fiber-based design, the free-space configuration gets rid of inevitable birefringence in fused fiber couplers which detrimentally alter the polarization state received by the polarizers. As a result, it facilitates effective and precise measurements of optical interference with optimized visibility.

Abstract: Systems, apparatuses, and methods are provided for measuring intensity using off-axis illumination. An example method can include illuminating a region of a surface of a substrate with a first radiation beam at a first incident angle and, in response, measuring a first set of photons diffracted from the region. The example method can further include illuminating the region with a second radiation beam at a second incident angle and, in response, measuring a second set of photons diffracted from the region. The example method can further include generating measurement data for the region based on the measured first set of photons and the measured second set of photons.

Abstract: A spectrometric measurement method of determining concentrations of components present in a medium of a given type exhibiting different compositions in different applications includes, for at least one new application, determining a new model for determining concentrations of target components based on measured spectra of the medium of the given type present in the new application, wherein the new model is determined based on assets for determining concentrations of reference components corresponding to the target components that have been determined for reference applications, wherein the reference components have been of interest.

Abstract: A system includes a light source, a transparent container, a detector, and a processor. The light source emits light. Liquid flows from one end of the transparent container to another end of the transparent container. The liquid comprises a first and a component. One or more droplets containing the second component are formed within the transparent container as the liquid flows from the one end to the another end of the transparent container. The detector measures light intensities from the transparent container being illuminated. The one or more droplets cast shadows on the detector. A light intensity associated with a portion of the liquid that includes the one or more droplets is different from a second light intensity associated with another portion of the liquid that does not include the one or more droplets. The processor processes the measured light intensities to determine phase entrainment metrics associated with the liquid.

Abstract: Disclosed is a test system which includes a light source device. The light source device includes a first light source configured to radiate a first light, a plurality of neutral-density (ND) filters including a first ND filter attached to the first light source and configured to adjust the first light, an aperture unit including a plurality of apertures configured to adjust the first light received from the first ND filter and a diffuser configured to diffuse the first light received from the aperture unit and to radiate the first light for testing an image sensor, wherein an illuminance of the first light is adjusted based on a transmittance of the first ND filter and an aperture ratio of each of the apertures.

Abstract: This calibration system includes: a moving body that moves within a predetermined region and generates a vibration signal; a vibration detection means, being provided within the predetermined region, for detecting a vibration signal generated in the predetermined region; a signal analysis means for analyzing the vibration signal detected by the vibration detection means, and calculating a position on the vibration detection means where the vibration detection means detects the vibration signal; and an association means for calibrating the vibration detection means at a predetermined timing by associating the position on the vibration detection means where the vibration detection means detects the vibration signal with a position in the predetermined region, based on a generation position and a generation time of the vibration signal generated by the moving body and the position on the vibration detection means where the vibration detection means detects the vibration signal and a detection time thereof.

Abstract: An optical instrument of very high resolution is provided that can be used for monitoring semiconductor processes. Very high resolution may be considered in this application space to be resolutions sufficient to permit resolving of individual molecular rovibrational emission lines. In one example an optical instrument is provided that includes: (1) an optical interface that receives an optical fiber, (2) a narrow band pass filter that filters out a portion of an optical signal received via the optical fiber, (3) optical components that are selectively combined to process at least a portion of the unfiltered optical signal, wherein the optical components include a sensor that receives the unfiltered optical signal, and (4) one or more processors that process electrical signals from the sensor. The optical instrument can be a spectrometer suitable for a process control instrument.

Abstract: A device for measuring caustic parameters of a laser beam includes a beam splitter for splitting the laser beam into at least three spatially separated partial beams, and a detection unit for detecting images of the partial beams. A beam path from an input of the device to the beam splitter defines a beam axis for the laser beam, along which the laser beam propagates until entering the beam splitter. The beam splitter includes an optical lens, and a partially reflective surface configured to split the laser beam into the at least three partial beams by partial reflection within the optical lens. The optical lens is positioned off-axis such that an optical axis of the optical lens extends off-axis to the beam axis, and/or the optical lens is tilted such that the optical axis of the optical lens forms an angle with the beam axis that deviates from 0°.

Abstract: A monitoring procedure for monitoring the quality of measurement spectra of a liquid medium continuously determined with a spectrometric sensor, which spectra in each case reproduce spectral values in a specified measurement wavelength range, is described with which: for each measurement spectrum, a quality parameter of the respective measurement spectrum is determined in each case based upon at least one characteristic value calculated in each case based upon the spectral values of the respective measurement spectrum, wherein each characteristic value for each measurement spectrum is determined in each case based upon the spectral values of the respective measurement spectrum in a range, specified for the respective characteristic value, of the measurement wavelength range, and, based upon the quality parameters, those measurement spectra which have spectral values that are impaired by a disturbance are identified as outliers.

Abstract: A measurement apparatus (10) for interferometrically measuring a shape of a surface (12) of a test object (14) in relation to a reference shape includes a diffractive optical element (30) generating a test wave (32) from measurement radiation (22), whereas a wavefront of the test wave is adapted to a target shape of the surface of the test object and the target shape is configured as a first non-spherical surface, and a reference element (38) with a reference surface (40) having the reference shape, the reference shape being configured as a further non-spherical surface and the reference element including a low thermal expansion material with a mean coefficient of thermal expansion having an absolute value of no more than 200×10?6 K?1 in the temperature range from 5 °C to 35 °C.

Abstract: The present invention includes: a cell holding body that holds a measurement cell housing a measurement sample and a dispersion medium; a cover attached to the cell holding body so as to cover the measurement cell; a rotation section that rotates the cell holding body and applies centrifugal force to the measurement cell; a light source that is provided on one side of a rotation passage region of the measurement cell and irradiates the cell with light; a photodetector that is provided on another side of the rotation passage region of the measurement cell and detects light transmitted through the cell; and a particle diameter distribution arithmetic section that acquires a light intensity signal from the photodetector and calculates a particle diameter distribution. The rotation passage region of the cover is located inside an optical path of light passing between the light source and the photodetector.

Abstract: A spectroscopic analysis apparatus comprises a multi-chamber cuvette for fluid or gas analysis, wherein the multi-chamber cuvette comprises at least two measurement chambers into which fluid or gas can be introduced for analysis, wherein the at least two measurement chambers are optically separated from one another, wherein an illumination device is provided to generate light and to couple the light into the at least one first and second measurement chamber, and wherein a detection device is provided to measure an intensity of the light radiated by the fluid or gas in the first measurement chamber for a first wavelength and to generate a first measurement result and to measure an intensity of the light radiated by the fluid or gas in the second measurement chamber for a second wavelength and to generate a second measurement result, wherein the first wavelength and the second wavelength are different.

Abstract: A thickness-distribution measurement device includes a light source; a light detector; and a control device. The light source irradiates a region of an object being conveyed with light, the region extending in a width direction. The light detector detects emitted light that has transmitted through the object. The control device obtains information on a distribution of a relative thickness of the object in the width direction based on a detection result in the light detector. The light detector includes an image sensor and a lens array. The image sensor includes a plurality of pixels arranged in the width direction, and detects an intensity of the emitted light for each pixel. The lens array includes a plurality of lenses having an equal magnification and arranged along the width direction, and collects the emitted light and forms an image of the emitted light on the image sensor.

Abstract: A method for three-dimensional (3D) image calibration for a spectral domain optical coherence tomography (OCT) system, the OCT system including a scanning arrangement for laterally scanning a sample light beam across a surface of a sample, an optical detection system for detecting light reflected back from the sample to obtain an optical image of the sample, and a reference light beam, the OCT system generating axially resolved optical information from the sample as the sample light beam is scanned laterally across the sample using optical path length differences (OPLD) between the reference light beam and the sample light beam, the method including: providing a calibration sample having a substrate having laterally arranged structural elements providing optical contrast, the structural elements having at least one of known dimensions or known position values on the substrate; scanning, using a first set of scanner parameters for the scanning arrangement, the sample light beam.

Abstract: A photometric process measurement arrangement and a photometric measurement method.

Abstract: A measurement jig for measuring the conditions in a device and a processing method are provided. A measurement jig having a substrate, a back-surface camera provided on a back-surface side of the substrate, and a controller configured to control the back-surface camera.

Abstract: A Raman spectroscopy device includes a first spectrometer, a second spectrometer, and a photodetector. First spectrometer disperses first Raman scattered light. Second spectrometer disperses second Raman scattered light having a shorter wavelength than first Raman scattered light. Photodetector receives first Raman scattered light and second Raman scattered light. Second spectrometer is formed from a greater number of spectral optical elements than first spectrometer.

Abstract: A system for monitoring a health condition of a component is provided. The system includes a sensor network comprising a transmitter and a plurality of receivers. Each receiver is configured to receive an electromagnetic signal from the transmitter. A communications interface module is configured to receive an output signal from the transmitter. A computing system includes one or more memory devices and one or more processors. The one or more memory devices is configured to store instructions that, when executed by the one or more processors, causes the one or more processors to execute operations.