Abstract: An adjustment method for a shape measuring device that radiates light from a light source to a master for adjustment and a reference surface respectively as measurement light and reference light and measures a shape of a surface to be measured of a measurement target using multiplexed light of the measurement light and the reference light respectively reflected by the master for adjustment and the reference surface, the adjustment method including; measuring the master for adjustment in an adjusted state in which a focus position matches an interference position and calculating and storing a matching degree parameter indicating a matching degree between the focus position and the interference position as an adjustment matching degree parameter; when the measurement target is measured, measuring the master for adjustment, calculating the matching degree parameter and comparing the matching degree parameter with the adjustment matching degree parameter, to confirm the matching degree.

Abstract: An imaging spectroscopic ellipsometry apparatus and method configured to measure thin films with high spatial resolution. The apparatus includes a rotating compensator that enables to simultaneously collect both spectrometric ellipsometric data and ellipsometric imaging with the use of the same measurement beam of light. Collecting both data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

Abstract: A sample mapping system includes a sample chuck including absolute reference marks, an imaging metrology tool to capture sets of alignment images at locations associated with sample marks on a sample on the sample chuck, and a controller. A particular set of alignment images at a particular location may include at least one alignment image associated with a particular sample mark and at least one alignment image associated with a particular portion of the absolute reference marks within a field of view of the imaging metrology tool visible through the sample. The controller may determine absolute coordinates of the sample marks based on the sets of alignment images. Determining the absolute coordinates of the particular sample mark may include determining the absolute coordinates of the particular sample mark based on a position of the particular sample mark relative to the particular portion of the absolute reference marks.

Abstract: Provided are a light scattering measurement device and a light scattering measurement method that specify a material of a particle included in a dispersion liquid including at least one type of particles.

Abstract: Favorable measurement workability is obtained by further enhancing a degree of freedom in handling a probe while enhancing measurement accuracy. A probe for a three-dimensional scanner includes a first marker block and a second marker block that are arrayed side by side in a first direction with a scanner unit positioned at a center, and a third marker block and a fourth marker block that are arrayed side by side in a second direction with the scanner unit positioned at the center. The marker blocks have self-luminous markers facing a plurality of directions, respectively. The fourth marker block is arranged to be separated from a plane defined by the first marker block, the second marker block, and the third marker block.

Abstract: Flowcells and Raman analysis systems provide improved signal collection dynamics through increased solid-angle geometries and improved numerical aperture for near-diffraction-limited performance. A combined excitation/collection beam passes through a first optical material, a sample conduit and a second optical material. A concave reflective aspheric surface focuses and re-collimates the combined beam to and from a region of the sample within the conduit. The optical materials may comprise separate windows or may integrally form sidewalls the conduit. The reflective surface may be spaced apart from the second window or may be integrally formed with the second optical material. The focused region in the sample may approximate a point or a line, and at least a portion of the interior wall of the conduit may be reflective, causing the combined beam to pass through the sample region more than once to enhance collection efficiency.

Abstract: A package quality inspection station (100) is provided. The station (100) comprises a first conveyor belt (102) and a second conveyor belt (108) arranged to abut a bottom portion (104) of a package (106). The second conveyor belt (108) is placed at distance (D) from the first conveyor belt (102) such that a gap (110) is formed. A belt brake (112) comprising a first and a second lateral belt arrangement (114, 116) arranged to hold the package (106) is provided to bridge the gap (110) and to hold the package (106) such that a top portion (160) and the bottom portion (104) are made visible when conveyed over the gap (110). A top camera (132) is configured to capture top image data (134) depicting the top portion (160), and a bottom camera (136) configured to capture bottom image data (138) depicting the bottom portion (104).

Abstract: A hyperspectral imaging device and method disclosed herein overcomes technical problems associated with the prior art by replacing the intensity measurement performed by the single high-resolution 2D sensor of state-of-the-art methodologies, with the measurement of intensity (fluctuation) correlations retrieved by two high-resolution 2D sensors: one—the imaging/spatial sensor dedicated to polychromatic image acquisition, the other—the spectral sensor dedicated to pure spectral measurement. In the hyperspectral correlation imaging disclosed herein, the spectral information is encoded into the intensity correlation without requiring any spectral scanning. Even though multiple exposures (frames) are generally required to reconstruct light statistics and perform correlation measurements, the exposure times are several orders of magnitude shorter than those required in the scanning approach.

Abstract: A plasma monitoring system includes a chamber with an interior space, the chamber being configured to perform a semiconductor process on a semiconductor substrate using plasma in the interior space, and the chamber including an optical window, a substrate stage within the chamber to support the semiconductor substrate, a light collecting device on the substrate stage, the light collecting device including a body and light collectors, the body having through holes therethrough, and the light collectors being configured to collect light respectively incident on the through holes from the plasma and to transfer the collected lights onto the optical window, and a light analyzer including a spectrometer that is configured to obtain an optical spectrum from each light irradiated onto the optical window, and to map a state of the plasma from the optical spectrum to correspond to positions of the through holes.

Abstract: A system and a method for synchronously detecting thickness and double-side surface profiles that belongs to the technical field of optical measurement. The system includes a light source system, a deflection reflection system, a camera acquisition system, and a processing system. The deflection reflection system includes a decomposition unit and an integration unit. In the system, an optical signal is projected to an upper surface and a lower surface of an object to be measured by the decomposition unit, and then reflected light is converged by the integration unit to form a composite signal, which is captured by a camera to generate an image. The processing system analyzes the image to accurately obtain the thickness and double-side surface profile data of the object.

Abstract: A high-dispersion retroreflector includes filter glass transparent at least in near infra-red (NIR) wavelengths and configured to cause differential dispersion of incident broadband low-coherent light in the at least NIR wavelengths.

Abstract: Provided is a laser scattered light measuring device capable of easily confirming the safety of laser scattered light to a human body. The laser scattered light measuring device includes a light receiving unit, a calculation unit, and a display unit. The light receiving unit receives laser scattered light generated by irradiating an object with laser light and detects intensity of the laser scattered light. The calculation unit compares the intensity of the laser scattered light received by the light receiving unit with a predetermined threshold value and calculates a degree of risk of the laser scattered light to a human body based on a comparison result. The display unit displays the degree of risk calculated by the calculation unit.

Abstract: A method of Raman spectroscopy for determining concentrations of at least one target component included in a medium including a given combination of multiple components includes: for each component of the medium, providing a reference spectrum of the component; based on Raman peaks included in the reference spectra, identifying Raman peaks that occur within less than a predetermined minimum spectral distance from each other as disturbing peaks; for each component, determining a component spectrum by eliminating each Raman peak included in the reference spectrum of the respective component identified as a disturbing peak; based on the component spectra, determining synthetic spectra of samples of the medium including different concentrations of the components; and based on the synthetic spectra, determining and providing a model for determining concentrations of each target component based on measured spectra of samples of the medium.

Abstract: Systems and methods for grading a gemstone including its clarity are presented. An image capturing device disposed to capture images along a line of sight: a holder to support the gemstone thereon; a manipulator arm, carrying the holder, configured to rotate along a roll axis, and allow for rotation of the holder along a pitch axis: an illumination sub-system comprising a direct illumination arrangement, a dark-field illumination arrangement, and a facet illumination arrangement; and a controller arrangement configured to control the illumination arrangements to generate a plurality of illumination patterns for the gemstone, control the manipulator arm to position the holder for a plurality of orientations of the gemstone, control the image capturing device to capture an image of each of the generated illumination patterns, each of the orientations and each of one or more depths of focus, and process the captured images to grade the gemstone.

Abstract: A camera system configured to inspect an inspection target moving in a first direction includes an illumination unit configured to irradiate the inspection target with a terahertz wave, and a camera unit disposed at a position which the terahertz wave reflected on the inspection target enters, and configured to acquire an image formed by the reflected terahertz wave. The illumination unit includes a plurality of illumination elements two-dimensionally arranged in the first direction and a second direction different from the first direction. Angles formed between directions of optical axes of the plurality of illumination elements arranged in the second direction projected onto a first plane that includes a straight line in the first direction and a straight line in the second direction and the first direction become smaller as a position approaches a center portion of the plurality of illumination elements arranged in the second direction.

Abstract: The invention relates to an FCS method in which a sample that is to be measured and has fluorescent markers is illuminated with excitation radiation over a bleaching time in order to bleach selected fluorescent markers; and after bleaching has been carried out over at least one measurement period, FCS measurement data of the sample are acquired by illuminating the sample with excitation radiation and by detecting detection radiation brought about by the excitation radiation. The invention is characterized in that during the bleaching time, intensity values of fluorescence radiation that has been brought about by the excitation radiation which is directed at the sample for bleaching purposes are continuously or repeatedly acquired and compared with a threshold value, and the acquisition of the FCS measurement data is started when the threshold value has been reached.

Abstract: A diagnostic optical microscope according to the present embodiment includes at least one laser light source (11) configured to generate laser light for illuminating a sample (40) containing a light absorbing material, a lens configured to focus the laser light to be focused on the sample (40), scanning means for changing a focusing position of the laser light on the sample (40), and a light detector (31) configured to detect laser light transmitted through the sample (40) as signal light. A laser light intensity is changed to obtain a nonlinear region in which the laser light intensity and a signal light intensity have a nonlinear relation due to occurrence of saturation of absorption in the light absorbing material when the laser light intensity is maximized. An image is generated based on a nonlinear component of the signal light based on the saturation of absorption in the light absorbing material.

Abstract: One form of a metallic particle detection system detects automatically, through analysis of image data from a first sensor, a foreign metallic particle in or on an active material layer of an electrode strip moving between a section and a subsequent section on a roll-to-roll coated electrode manufacturing line that manufactures a plate electrode. The system also determines a position of the foreign metallic particle on the electrode strip moving on the roll-to-roll coated electrode manufacturing line. The system also triggers, in response to detection of the foreign metallic particle and based on the position of the foreign metallic particle and a speed at which the electrode strip is moving, the second sensor, the second sensor generating a reflectance spectrum of the foreign metallic particle. The system also analyzes the reflectance spectrum to identify a type of metal of which the foreign metallic particle is composed.

Abstract: A dust sensor includes a photo detector configured to detect light scattered from dust; and a signal processing circuit having a high-pass filter receiving an electric signal generated from output of the photo detector. The signal processing circuit generates a dust detection signal using a signal provided to the high-pass filter as well as a signal output from the high-pass filter.

Abstract: Provided is a slag component analysis method capable of quickly and accurately measuring slag components generated during refining of molten iron. The method comprises: irradiating a surface of slag to be analyzed with a pulse laser a plurality of times to turn part of the slag into plasma; dispersing excitation light obtained from the slag turned into plasma and acquiring an emission spectrum of an element contained in the slag per one pulse laser irradiation or per a plurality of pulse laser irradiations; and deriving a target component concentration or component amount ratio from the acquired emission spectrum, wherein the slag to be analyzed is slag generated in a converter-type refining furnace, and in the process of turning part of the slag into plasma, the pulse laser is applied from a side of the converter-type refining furnace tilted to remove the slag generated in the converter-type refining furnace.