Abstract: Provided is a system for range detection including at least one beam source arrangement configured to provide illumination of certain coherence length, an optical arrangement, and a detection arrangement including at least one detector unit.

Abstract: A machine vision system includes a vision components portion and an inspection portion. The inspection portion includes a variable focal length (VFL) lens, a VFL lens controller, an inspection portion light source, an inspection portion objective lens, and an inspection portion camera. The vision components portion performs an autofocus process which indicates z-heights of a plurality of sampling points on a surface of a workpiece for determining coarse surface profile data. The inspection portion thereafter performs an inspection process, which comprises acquiring an extended depth of field (EDOF) image for each inspection point of a plurality of inspection points on the surface of the workpiece, and for which an inspection scan path is followed which includes adjustments in relation to the distance between the inspection portion and the surface of the workpiece and is determined based at least in part on the coarse surface profile data from the autofocus process.

Abstract: A car body inspection device includes a main inspection device includes an illuminator to illuminate a surface of a car body; a light receiver to receive specular reflection light from a first inspection area of the surface illuminated by the illuminator; and circuitry configured to inspect the first inspection area based on the specular reflection light received by the light receiver. The main inspection device is coupled to an auxiliary inspection device to inspect a second inspection area other than the first inspection area on the surface, and the light receiver of the main inspection device does not receive the specular reflection light in the second inspection area.

Abstract: A dispersion measuring device includes a pulsed laser light source, a pulse forming unit, a correlator, and an arithmetic operation unit. The pulse forming unit forms an optical pulse train from an optical pulse output from the pulsed laser light source. The correlator detects a temporal waveform of correlated light formed from the optical pulse train. The arithmetic operation unit estimates a wavelength dispersion amount of an optical component disposed between the pulsed laser light source and the correlator, based on the temporal waveform of the correlated light. A dispersion medium gives a group delay dispersion to the optical pulse train to increase the peak intensity of the correlated light to be equal to or greater than a threshold value of the correlator. The pulse forming unit gives a group delay dispersion having a sign opposite to the group delay dispersion given to the optical pulse train to the optical pulse.

Abstract: Disclosed herein is an interferometric range resolution apparatus comprising: an antenna and a transceiver configured to transmit and receive wireless pulses; a dish configured to direct the received wireless pulses to the antenna; and a processor electrically coupled to the antenna via the transceiver, the processor configured to provide range resolution of at least two objects along a same line-of-sight of the transmitted wireless pulses.

Abstract: In a configuration for analyzing data of cells measured by a cell measuring apparatus, accuracy of cell classification is improved without requiring the cell measuring apparatus to have high information processing capability. A cell analysis method, using a cell analyzer for analyzing cells in accordance with an artificial intelligence algorithm, includes: obtaining the data regarding the cells measured by the cell measuring apparatus; analyzing the data to generate information regarding a cell type of each of the cells; and transmitting the information to the cell measuring apparatus.

Abstract: Disclosed is a metrology apparatus and method for measurement of a diffractive structure on a substrate. The metrology apparatus comprises a radiation source operable to provide first radiation for excitation of the diffractive structure such that high harmonic second radiation is generated from said diffractive structure and/or substrate; and a detection arrangement operable to detect said second radiation, at least a portion of which having been diffracted by said diffractive structure.

Abstract: An optical coherence tomography (OCT) system comprises an interferometer configured to interfere a test beam reflected from a specimen with a reference beam to produce an interference pattern. The OCT system also comprises a spectrometer configured to measure a spectrum of the interference pattern to produce measurements of intensities of the interference pattern corresponding to different wavelengths. The OCT system further comprises a processor configured to determine noise statistics of the intensities of the interference pattern and use the noise statistics to set a threshold for detecting a number of layers of the specimen penetrated by the test beam at the location based on a pre-specified probability of false acceptance of noise as a signal. The processor is further configured to determine the profilometry measurements as an estimate of depths of the layers of the specimen causing the intensities of the interference pattern above the threshold.

Abstract: An adjustment method for a shape measuring device that radiates light from a light source to a master for adjustment and a reference surface respectively as measurement light and reference light and measures a shape of a surface to be measured of a measurement target using multiplexed light of the measurement light and the reference light respectively reflected by the master for adjustment and the reference surface, the adjustment method including; measuring the master for adjustment in an adjusted state in which a focus position matches an interference position and calculating and storing a matching degree parameter indicating a matching degree between the focus position and the interference position as an adjustment matching degree parameter; when the measurement target is measured, measuring the master for adjustment, calculating the matching degree parameter and comparing the matching degree parameter with the adjustment matching degree parameter, to confirm the matching degree.

Abstract: An imaging spectroscopic ellipsometry apparatus and method configured to measure thin films with high spatial resolution. The apparatus includes a rotating compensator that enables to simultaneously collect both spectrometric ellipsometric data and ellipsometric imaging with the use of the same measurement beam of light. Collecting both data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

Abstract: A sample mapping system includes a sample chuck including absolute reference marks, an imaging metrology tool to capture sets of alignment images at locations associated with sample marks on a sample on the sample chuck, and a controller. A particular set of alignment images at a particular location may include at least one alignment image associated with a particular sample mark and at least one alignment image associated with a particular portion of the absolute reference marks within a field of view of the imaging metrology tool visible through the sample. The controller may determine absolute coordinates of the sample marks based on the sets of alignment images. Determining the absolute coordinates of the particular sample mark may include determining the absolute coordinates of the particular sample mark based on a position of the particular sample mark relative to the particular portion of the absolute reference marks.

Abstract: Provided are a light scattering measurement device and a light scattering measurement method that specify a material of a particle included in a dispersion liquid including at least one type of particles.

Abstract: Favorable measurement workability is obtained by further enhancing a degree of freedom in handling a probe while enhancing measurement accuracy. A probe for a three-dimensional scanner includes a first marker block and a second marker block that are arrayed side by side in a first direction with a scanner unit positioned at a center, and a third marker block and a fourth marker block that are arrayed side by side in a second direction with the scanner unit positioned at the center. The marker blocks have self-luminous markers facing a plurality of directions, respectively. The fourth marker block is arranged to be separated from a plane defined by the first marker block, the second marker block, and the third marker block.

Abstract: Flowcells and Raman analysis systems provide improved signal collection dynamics through increased solid-angle geometries and improved numerical aperture for near-diffraction-limited performance. A combined excitation/collection beam passes through a first optical material, a sample conduit and a second optical material. A concave reflective aspheric surface focuses and re-collimates the combined beam to and from a region of the sample within the conduit. The optical materials may comprise separate windows or may integrally form sidewalls the conduit. The reflective surface may be spaced apart from the second window or may be integrally formed with the second optical material. The focused region in the sample may approximate a point or a line, and at least a portion of the interior wall of the conduit may be reflective, causing the combined beam to pass through the sample region more than once to enhance collection efficiency.

Abstract: A package quality inspection station (100) is provided. The station (100) comprises a first conveyor belt (102) and a second conveyor belt (108) arranged to abut a bottom portion (104) of a package (106). The second conveyor belt (108) is placed at distance (D) from the first conveyor belt (102) such that a gap (110) is formed. A belt brake (112) comprising a first and a second lateral belt arrangement (114, 116) arranged to hold the package (106) is provided to bridge the gap (110) and to hold the package (106) such that a top portion (160) and the bottom portion (104) are made visible when conveyed over the gap (110). A top camera (132) is configured to capture top image data (134) depicting the top portion (160), and a bottom camera (136) configured to capture bottom image data (138) depicting the bottom portion (104).

Abstract: A hyperspectral imaging device and method disclosed herein overcomes technical problems associated with the prior art by replacing the intensity measurement performed by the single high-resolution 2D sensor of state-of-the-art methodologies, with the measurement of intensity (fluctuation) correlations retrieved by two high-resolution 2D sensors: one—the imaging/spatial sensor dedicated to polychromatic image acquisition, the other—the spectral sensor dedicated to pure spectral measurement. In the hyperspectral correlation imaging disclosed herein, the spectral information is encoded into the intensity correlation without requiring any spectral scanning. Even though multiple exposures (frames) are generally required to reconstruct light statistics and perform correlation measurements, the exposure times are several orders of magnitude shorter than those required in the scanning approach.

Abstract: A plasma monitoring system includes a chamber with an interior space, the chamber being configured to perform a semiconductor process on a semiconductor substrate using plasma in the interior space, and the chamber including an optical window, a substrate stage within the chamber to support the semiconductor substrate, a light collecting device on the substrate stage, the light collecting device including a body and light collectors, the body having through holes therethrough, and the light collectors being configured to collect light respectively incident on the through holes from the plasma and to transfer the collected lights onto the optical window, and a light analyzer including a spectrometer that is configured to obtain an optical spectrum from each light irradiated onto the optical window, and to map a state of the plasma from the optical spectrum to correspond to positions of the through holes.

Abstract: A system and a method for synchronously detecting thickness and double-side surface profiles that belongs to the technical field of optical measurement. The system includes a light source system, a deflection reflection system, a camera acquisition system, and a processing system. The deflection reflection system includes a decomposition unit and an integration unit. In the system, an optical signal is projected to an upper surface and a lower surface of an object to be measured by the decomposition unit, and then reflected light is converged by the integration unit to form a composite signal, which is captured by a camera to generate an image. The processing system analyzes the image to accurately obtain the thickness and double-side surface profile data of the object.

Abstract: A high-dispersion retroreflector includes filter glass transparent at least in near infra-red (NIR) wavelengths and configured to cause differential dispersion of incident broadband low-coherent light in the at least NIR wavelengths.

Abstract: Provided is a laser scattered light measuring device capable of easily confirming the safety of laser scattered light to a human body. The laser scattered light measuring device includes a light receiving unit, a calculation unit, and a display unit. The light receiving unit receives laser scattered light generated by irradiating an object with laser light and detects intensity of the laser scattered light. The calculation unit compares the intensity of the laser scattered light received by the light receiving unit with a predetermined threshold value and calculates a degree of risk of the laser scattered light to a human body based on a comparison result. The display unit displays the degree of risk calculated by the calculation unit.