Abstract: A laser end point detector incorporating adjustable-focus, variable-orientation detection optics for monitoring different types of structures such as laser-transparent thin films, isolated trenches or holes and patterned arrays of trenches or holes is disclosed. A collector lens package comprising a laser and a focusing lens are mounted in a hole in a collector lens which is pivotally mounted for selectively focusing zero, first and higher orders of diffractions reflected from the wafer onto an associated detector to monitor the etching of different types of structures. For example, zero order diffraction signals are used to monitor the etching of large target areas in transparent thin films or of non-patterned trenches or holes. First order (or higher) diffraction signals are used for monitoring the etching of patterned features which effect a two-dimensional diffraction grating, such as the capacitor holes in dynamic random access memories.

Abstract: A method of making printed circuit boards having gold dot contacts formed on the terminal pads is disclosed. A first layer of copper is overlayed with a pattern of tin or solder which acts as a resist. The gold dot contacts are resistance welded to the terminal pads. The copper underlayment and its pattern of tin or solder carrying the gold dots is then bonded to an electrically insulating substrate, which can be flexible, to form a composite board which is then etched to form a printed circuit board having gold dot contacts thereon. Other materials than tin or solder can be employed so long as there is a difference in etchability between it and the copper foil.

Abstract: A method and system for forming tungsten structures in a semiconductor device which uses a chromium protective layer to protect underlying semiconductor layers during the etching process and a chromium mask layer so that tungsten structures can be formed with high aspect ratios using a reactive ion etching to etch the tungsten with a carbon tetrafluoride oxygen plasma in a reactive ion etcher. Long overetches can be achieved because of the high selectivity of chromium to the carbon tetrafluoride/oxygen plasma. The anisotropic nature of the reactive ion etcher prevents undercut during long overetches of the tungsten to further decrease losses in linewidth or increases in resistance as a result of overetching.

Abstract: In producing a preform for an optical fiber by MCVD technology, involving the buildup of a core matrix of doped silica layers inside a glass tube with subsequent thermal collapse of the structure, a layer of dopant is deposited on the inner surface of the finished core matrix before the collapse. The thickness of this dopant layer, which advantageously is in a colloidal state, progressively diminishes along the tube axis in a direction away from an end of the tube at which the collapse begins. The law of thickness variation is chosen to maintain an internal gas pressure of vaporized dopant equal to the vapor pressure of the dopant in the core material at the collapsing temperature, in order to prevent the appearance of a paraxial dip in the refractive-index profile of an optical fiber subsequently drawn from the collapsed preform.

Abstract: A method for dry etching metals that form low volatility chlordes, in which Z-Cl reaction products are controllably introduced into a conventional Cl-based plasma independent of the workpiece. The Z-Cl products (e.g., AlCl.sub.3, GaCl.sub.3, etc.) are metal chlorides that have both electron acceptor and chloride donor properties. Thus, metals M (e.g., cobalt, copper and nickel) that usually produce low volatility chlorides can be controllably complexed to form high volatility Z.sub.x Cl.sub.y M.sub.z reaction products.

Abstract: A microcreping process is improved by using a razor sharp retarder blade positioned such that its razor edge is overlapped by either the primary blade or a back-up blade, whichever extends the furthest downstream. Preferably, pressure is applied to the primary blade through one or more back-up blades arranged in a stepwise configuration.

Abstract: A process of removing platinum inclusions from laser glass is disclosed, comprising bubbling the laser glass in a molten state with PCl.sub.3 or POCl.sub.3.

Abstract: A method of fabricating a semiconductor device comprising a step of forming a trench on a semiconductor substrate, a step of positioning the semiconductor substrate in a first position such that the direction of the ion beams is inclined to a plane which is perpendicular to the principal surface of the semiconductor substrate and which is parallel to a first side-wall of the trench, a step of implanting ions into the first side-wall by emitting ion beams onto the first side-wall of the trench of the semiconductor substrate at the first position, a step of rotating the semiconductor substrate about an axis perpendicular to the principal surface thereof to a second position which is different from the first position, a step of implanting ions into a second side-wall by emitting ion beams onto the second side-wall of the trench of the semiconductor substrate at the second position, a step of rotating the semiconductor substrate about the axis to a third position which is different from the first and second posit

Abstract: A glass soot deposition torch (30; FIG. 2) having gas passages arranged to provide an inner (34) and outer (36) flame front is disclosed in which the temperature of the inner front is higher than the outer front. A passage is located within the outer front (36) through which glass soot (32) is directed onto the surface of a growing soot-form core (38).

Abstract: An improved method for fabricating an optical fiber preform by the vapor phase axial deposition (VAD) method, comprises forming core and cladding soots at the same time by the use of core and cladding burners. The improvement is that the cladding burner is designed so that at least one of the outlets for a feed material gas, a fuel gas, an auxiliary fuel gas, and an inert gas is composed of a plurality of openings. In this improved method, the temperature distribution from the boundary of the core soot to the periphery of the cladding soot is made smooth, and thus the cladding soot is prevented from cracking.

Abstract: Optical fluorophosphate glasses based on Ba(PO.sub.3).sub.2, Al(PO.sub.3).sub.3, alkaline earth metal fluorides and AlF.sub.3 are described which have a refractive index n.sub.e between 1.47 and 1.50, an Abbe-value .nu..sub.e between 85 and 80 and a positive anomalous partial dispersion value .DELTA..nu..sub.e between +17 and +22. They comprise (in wt.-%) 0.5-3 Mg, 8-10 Ca, 12-20 Sr, 9-12 Ba, 7-9 Al, 5-9 P, 8-12 O and 35-38 F. Ti, Na, K and H may additionally be present. The improved physico-chemical parameters (expansion coefficient, glass transition temperature, density, Knoop-hardness) and the transmission characteristics are given, and a process for producing these optical glasses is described.

Abstract: A counter reflector for use in drying webs, e.g. in a paper making machine, receives heat radiation, which has passed through the paper and returns the energy to the web by reflection. The counter reflector consists of a frame, glass ceramic shields (5) facing the paper web and having a chamber (14) to be pressurized with a drying gas, which issues through openings (10, 11, 12, 13) in and between the glass ceramic shields (5) and thus, the said of the paper web facing the counter reflector is dried by reflected heat radiation as well as warm gas flow in a continuous and steady way, resulting in easily controlled drying/curing conditions in the paper web. The issuing gas flow also serves to pressurize and thus stabilize the space between the counter reflector and the adjacent web and to keep away the latter from the former when saturated with heat. The counter reflector is provided to entrap all further heat which is generated in the drying/curing zone.

Abstract: The poles are suited for mounting on the side of a slider carrying a magnetic head. The method allows very narrow gaps between poles. In one embodiment of the invention, a magnetic pole is deposited on a substrate. A nonmagnetic material such as Al.sub.2 O.sub.3 is deposited from the side onto the pole and substrate. A preselected pattern of photoresist is next deposited on the nonmagnetic layer and a second magnetic material is deposited. The photoresist is removed and excess magnetic material is removed by ion milling from the side opposite to that of the nonmagnetic material deposition. Another embodiment is disclosed for making two- and three-pole heads.

Abstract: An automated device for deconcentration and potentiation of homeopathic remedies, comprising a preparations flask held by a support fastened to a horizontal shaft driven in rotation. The mouth of the flask describes a circle and can be moved among several positions, particularly an original position for introduction of the dose to be diluted or rediluted and for introduction of the solvent, and a position for pouring the dilution into a wide-mouth bottle containing granules to be impregnated and put into rotation. Between each deconcentration, the flask is cleaned by washing means and drying means located on its path in other positions.

Abstract: In order to eliminate the effect of water attack on silica optical fibres, the fibres are provided with a surface layer of silicon nitride or silicon oxynitride. The method proposed comprises direct nitridation. This may be achieved by adding a nitriding atmosphere to the drawing furnace gases, or to the reactive gases (TiCl.sub.4 and SiCl.sub.4) incorporated in the flame of an oxyhydrogen torch for the formation of a compressive silica/titania layer on an optical fibre by a glass soot deposition and sintering process.

Abstract: A process for producing a support for a lithographic printing plate is described, which comprises jetting a high-pressure liquid from at least one nozzle at a high rate, joining the jetted stream with a slurry containing a fine abrasive powder having a specific gravity of not less than 2.5 and having a sharp-angled tip having a radius of not more than 20 .mu.m, said slurry being spouted from at least one spout, directing the resulting mixed stream to strike against a surface of a metal sheet to carry out first graining, and modifying the first roughness thus formed on the metal sheet by brush graining to form a second roughness. Lithographic printing plates produced by using the resulting support are free from stain formation during printing and exhibit satisfactory printing durability.

Abstract: A preform for fabrication of a glass fiber optical transmission line is prepared by chemical reaction of vapor ingredients within a glass tube. Reaction, which may be between chlorides or hydrides of, for example, silicon and germanium with oxygen, occurs preferentially within a constantly traversing hot zone. Flow rates and temperature are sufficient to result in glass formation in the form of particulate matter on the inner surface of the tube. The particulate matter deposits on the tube and is fused with each passage of the hot zone. Continuous rotation of the tube during processing permits attainment of higher temperatures within the heated zone without distortion of the tube.

Abstract: A foreign object removal system is disclosed including a removal chamber projecting laterally from the combustion chamber of a fluid bed reactor and connected via a downwardly directed pipe to a material flow control plenum chamber, which includes means for fluidizing the mixture of inert bed particles and foreign objects at the bottom of the pipe for lateral movement into an air classifier, wherein the foreign objects are dropped to a collection tank and the fluid bed particles are carried upwardly by a stream of classifying air to a deentrainment chamber where their velocity is reduced and they are returned to the combustion chamber.

Abstract: A fiber optic coupler is formed as follows. Glass optical fibers, each having a core, cladding and coating are disposed within the longitudinal aperture of a capillary tube, the fibers extending beyond each end thereof. The fibers are preferably held taut to effect a tension therein. The coating is removed from that portion of the fibers in the midregion of the tube by oxidation, depolymerization or the like. The coating remains on those portions of the fibers extending into the ends of the apertures to precisely orient the fibers within the tube. The midregion of the tube is heated, collapsed about the fibers, and drawn to reduce the diameter thereof.

Abstract: A method of producing a gradient-index lens includes a first step in which a glass body is immersed into a molten salt containing ions which are able to provide a refractive index higher than that of ions constituting the glass body, in order to perform ion diffusion into the glass body. Thereafter, in a second step the glass body obtained from the first step is immersed into a molten salt containing ions which provide a refractive index lower than that of the ions of the molten salt used in the first step. In this way there is formed a predetermined refractive index distribution in the glass body.