Abstract: A metal chalcogenide material layer of lower quality provides a transition between a metal chalcogenide material layer of higher quality and a gate insulator material that separates the metal chalcogenide material layers from a gate electrode of a metal-oxide semiconductor field effect transistor (MOSFET) structure. Gate insulator material may be more readily initiated and/or or precisely controlled to a particular thickness when formed on lower quality metal chalcogenide material. Accordingly, such a material stack may be integrated into a variety of transistor structures, including multi-gate, multi-channel nanowire or nanosheet transistor structures.
Type:
Grant
Filed:
December 22, 2021
Date of Patent:
September 22, 2026
Assignee:
Intel Corporation
Inventors:
Carl H. Naylor, Kirby Maxey, Chelsey Dorow, Sudarat Lee, Kevin O'Brien, Ashish V. Penumatcha, Scott B. Clendenning, Uygar Avci, Matthew Metz
Abstract: Peak concentration of the carrier accumulation layer is equal to or higher than 1.0E16/cm3. A bottom part of the trench is positioned inside the n-type carrier accumulation layer. When a concentration ratio is a result of division of a concentration of the carrier accumulation layer by a concentration of the drift layer at a depth of the bottom part of the trench, the depth of the bottom part of the trench is a position at which the concentration ratio is larger than one and equal to or smaller than 10.
Abstract: A method for manufacturing a capacitive device comprising the following steps: a) providing a metallic layer, b) depositing a full-sheet aluminium layer, c) structuring pores in the aluminium layer by a full-sheet anodic etching process, subsequently to which a continuous porous alumina layer is obtained comprising a first main face and a second main face, longitudinal pores extending from the first main face to the second main face, d) forming a capacitive area at a first area of the porous alumina layer, e) forming an upper electrode over the capacitive area, f) forming a contact resumption at a second area of the porous alumina layer, g) forming a lower electrode over the contact resumption.
Type:
Grant
Filed:
March 16, 2022
Date of Patent:
November 18, 2025
Assignee:
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Abstract: The present application provides a method for making gates of different sizes compatible with the double patterning technology, comprising: forming a plurality of dummy gate structures and spacers on the sidewalls; covering the spacers and a region of large-sized gates with an SOC(silicon-on-carbon) layer; etching the SOC layer to expose the spacers of at least one dummy gate structure; respectively forming the first and the second SOC pattern structures, wherein the first SOC pattern structure covers the spacer of at least one dummy gate structure, and the second SOC pattern structure is disposed in region of the large-sized gates; etching the first SOC pattern structure to form a third SOC pattern structure, one side of the third SOC pattern structure covers one side of the spacer, wherein the other uncovered side of the spacer is used to define one side of the gate of medium-sized width.