Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.

Abstract: A substrate processing method is provided. The method includes a) causing a substrate to be attracted to an electrostatic chuck, and b) processing the substrate. The method includes c) determining a charge removal temperature based on information preliminarily stored in a storage, thereby adjusting a surface temperature of the electrostatic chuck to be greater than or equal to the determined charge removal temperature, the information indicating a relationship between a maximum surface temperature of the electrostatic chuck, during substrate processing, and a residual charge amount for the processed substrate. The method includes d) removing a charge from the processed substrate.

Abstract: The present disclosure provides a battery detection device. The detection circuit is disposed on the battery and produces an impedance value variation quantity according to a deformation of the battery. The detection circuit includes four connection nodes. The first connection node and the third connection node are connected with the battery. A voltage variation quantity is produced between the second connection node and the fourth connection node according to the impedance value variation quantity. The protection circuit is connected with the second connection node and the fourth connection node. The protection circuit is in an ON state when the voltage variation quantity is greater than or equal to a cut-off voltage. The protection circuit is in an OFF state when the voltage variation quantity is less than the cut-off voltage, so that an operation state of the battery is changed accordingly.

Abstract: Provided are a support apparatus and a flexible device. The support apparatus comprises a support substrate, an electromagnetic support cavity array which is located on the support substrate and includes a plurality of electromagnetic support cavities, a plurality of magnetic field generation circuits, and a control module, where the magnetic field generation circuits are electrically connected to the control module, and the control module is configured to control the plurality of magnetic field generation circuits to generate magnetic fields to make the electromagnetic support cavities deform along a direction perpendicular to a plane in which the support substrate is located. Through the scheme, the electromagnetic support cavity array is provided on the support substrate, and the magnetic field generation circuits are controlled by the control module to generate magnetic fields.

Abstract: A resonant energy stabilizer contains: a body, a lid, a mineral crystal, the current amplifier, and a medium frequency current device. The body includes an accommodation chamber. The lid includes an accommodating room. The mineral crystal includes a recess configured to accommodate a sapphire for producing far-infrared waves of electrostatic pulse. The recess is surrounded by a white crystal, a citrine and a green crystal which are surrounded by multiple titanium crystals, and a first magnetite is located above the white crystal, the citrine and the green crystal. The current amplifier includes multiple plasma pieces stacked together to increase a distance of the far-infrared waves of the electrostatic pulse, and each plasma piece has a copper coil layer, a red brass patch, and a red copper sheet. The medium frequency current device includes multiple second magnetites, an input segment, a central processing unit, a booster, and an output segment.

Abstract: Passive monitoring the integrity of current sensing devices and associated circuitry in GFCI and AFCI protective devices is provided. A protection circuit interrupter employs a capacitively coupled noise signal obtained by an arrangement of one or both of line side arms relative to a Rogowski coil. The noise signal is monitored while the line and load sides of a protective circuit interrupter are disconnected, and the connection of the line and load sides disabled if the noise signal fails to correlate sufficiently to a reference noise cycle. When the line and load sides are connected, the RMS value of the observed current signal is monitored such that the line and load sides are disconnected if the observed current signal fails to meet an RMS threshold. The observed current signal is compensated by subtracting the reference noise cycle prior to monitoring for the fault condition applicable to the protective device.

Abstract: A modular load management system comprises one or more compact modules designed to fit in the wiring troughs of a standard AC distribution panel of a building. The modules include one or more input terminals to receive electrical power from one or more circuit breakers in the panel and deliver power to load circuits of the building via one or more output terminals. The modules contain at least one disconnect switch for disconnecting circuits from breakers in response to a remote or locally-generated control signal. The modules may also include current sensors on some or all terminals, such that power and energy flow may be monitored on a per-circuit basis.

Abstract: Embodiments of the present disclosure generally relate to methods and apparatus for processing substrates. More specifically, embodiments of the present disclosure relate to transfer apparatus and substrate-supporting members. In an embodiment, an apparatus for transferring a substrate is provided. The apparatus includes a hub and a plurality of transfer arms extending from the hub. The apparatus further includes a plurality of substrate-supporting members, wherein each of the transfer arms has a first end coupled to the hub and a second end coupled to a respective one of the plurality of substrate-supporting members. The apparatus further includes a first electrical interface connection for electrostatically chucking a substrate and located at a first position on each substrate-supporting member, and a second electrical interface connection for electrostatically chucking the substrate and located at a second position on each substrate-supporting member. Substrate processing modules are also described.

Abstract: An electronic device for series connection on a power supply line includes a plurality of switches and a control unit configured to perform the following steps: operating error detection means during operation of the device in a first mode; operating the device in a second mode in response to an erroneous power state being detected by the error detection means during operation of the device in the first mode; operating the error detection means during operation of the device in the second mode in order to determine an error location associated with the erroneous power state detected by the error detection means during operation of the device in the first mode.

Abstract: An electrical stress protection circuit includes a detection circuit including a first transistor connected to a driving voltage rail and turned on when electrical stress is provided, and a bypass transistor turned on in response to a signal output when the first transistor is turned on and configured to provide electrical stress to a reference voltage rail. An electronic device configured to perform a predetermined function, includes a detection circuit including a first transistor connected to a driving voltage rail and turned on when electrical stress is provided, and an electrical stress protection circuit including a bypass transistor turned on in response to a signal output when the first transistor is turned on and configured to provide electrical stress to a reference voltage rail.

Abstract: A magnetic field propulsion unit includes a magnetic field generating device with multiple conductive lines conduct a current to generate a magnetic field; a contact breaker arrangement individually transitions each of the multiple conductive lines from a conductive state to a non-conductive state; an energy supply unit provides the magnetic field generating device with electrical energy; and a control unit controls the energy supply unit so that energy supply to each individual conductive line is controlled and control the contact breaker arrangement. The multiple conductive lines are arranged along a longitudinal axis. The control unit supplies a first conductive line with electrical energy so that a first magnetic field surrounding the first conductive line is generated, transitions the first conductive line to a non-conductive state, and supplies a second conductive line with electrical energy so that a second magnetic field is generated.

Abstract: A protective circuit includes a first line, a second line, and a signal line. A first and second diode are connected in series between the first and second lines. A resistor and a capacitor are connected between the first and second lines. A first inverter, a second inverter, a third inverter are connected in series between a node between the resistor and capacitor and a gate of a first transistor. A third diode is connected between the first and second lines. The first transistor is connected between the first and second lines. A second transistor is connected between the first line and a protected circuit. A gate of the second transistor is connected to the output of the first inverter. A third transistor is connected between the second line and the protected circuit. A gate of the third transistor is connected to output of the second inverter.

Abstract: In a particular implementation, an apparatus to control clamping devices includes a detection circuitry, a clamping device, inverter circuitry, and first and second control circuitry. In response to a first voltage corresponding to a gate terminal of the clamping device, the first control circuitry is configured to generate a second voltage to set the first voltage below a first voltage threshold. Also, in response to the second voltage, the second control circuitry is configured to generate a third voltage to set a voltage of the detection circuitry below a second voltage threshold.

Abstract: A system and method for fault location and isolation in an electrical power distribution network, where the network includes a plurality of switching devices provided along a feeder. The method includes detecting an overcurrent event in the network from the fault and interrupting the overcurrent event by opening and then immediately locking out or subsequently reclosing and testing the fault. A count value is increased in each switching device that detected the overcurrent event. A count and current (C&I) message is sent from each of the switching devices that detected the overcurrent event and then detected the loss of voltage upstream to an upstream neighbor switching device. Current measurements in the C&I messages, measured current by the devices and the counts values in the devices determine what devices are opened to isolate the fault.

Abstract: A method for identifying a type of fault condition with a circuit breaker includes detecting by the circuit breaker a fault condition of a plurality of fault conditions, storing in a memory device a trip code representing a type of the detected fault condition, interrupting current flow through the branch circuit in response to detecting the fault condition, and receiving a reset of the circuit breaker. The trip code may then be displayed in response to a momentary press of a test button that is a short duration press, and activating an LED interface in the circuit breaker to indicate the trip code representing the type of the detected fault condition.

Abstract: A safety apparatus is a terminal shield having an indication circuit incorporated therein. The safety apparatus is usable with a circuit interrupter to overlie one or more terminals of the circuit interrupter that are connected with line and load conductors and to thereby form a circuit interrupter apparatus. The safety apparatus can be employed at the line side of a circuit interrupter, at the load side of a circuit interrupter, or at both sides of a circuit interrupter. The safety apparatus can be provided as part of a new circuit interrupter apparatus or can be provided to retrofit existing circuit interrupters. The indication circuit advantageously outputs from a top surface of the terminal shield one of a visual indication and an audible indication when one or more terminals of the circuit interrupter are electrified, thereby easily conveying to a technician the portions of the circuit interrupter that are electrified.

Abstract: A controller for a linear solenoid valve is configured to: calculate an average value of an exciting current within a period including a natural number multiple of the dither cycle as an average current value; execute a feedback control on a control value of the pulse width modulation signal such that a target value of the exciting current and the average current value match; and calculate a dither correction amount by multiplying a ratio between the control value of the pulse width modulation signal obtained by the feedback control and the average current value by a dither current value that is a current value corresponding to the dither correction amount and calculating the dither correction amount such that an increase in the exciting current due to the dither correction amount is canceled out by a decrease in the exciting current due to the dither correction amount within one dither cycle.

Abstract: In an embodiment a thermal varistor protection device includes a casing, a varistor embedded in the casing, wherein the varistor includes a first metallization electrode, which is only partly covered by an insulating material of the casing to allow an electrically conductive connection, a first terminal wire electrically conductively connected to the first metallization electrode of the varistor and a contact element electrically conductively connected to the first metallization electrode of the varistor in a region where the varistor is not covered by the insulating material, wherein the contact element is pre-stressed to ensure a fast separation of the contact element and the first metallization electrode when the electrically conductive connection between the contact element and the first metallization electrode becomes loose.

Abstract: Disclosed are chuck assemblies, semiconductor device fabricating apparatuses, and methods of fabricating semiconductor devices. The chuck assembly comprises a chuck base including lower and upper bases, a ceramic plate on the upper base, an edge ring that surrounds the ceramic plate, a ground ring that surrounds an outer sidewall of the edge ring on an edge portion of the lower base, a coupling ring between the ground ring and the upper base and between the edge ring and the edge portion of the lower base, an upper heat sink between the coupling ring and the edge ring, and a sidewall heat sink between the coupling ring and the ground ring and between the coupling ring and the upper base.

Abstract: An electrical receptacle contains a plug outlet that has a pair of contacts for electrical connection to respective hot and neutral power lines. A controlled switch, such as a TRIAC, is connected in series relationship between the outlet contact and the hot power line. Sensors in the receptacle outputs signals to a processor having an output coupled to the control terminal of the controlled switch. The processor outputs an activation signal or a deactivation signal to the controlled switch in response to received sensor signals that are indicative of conditions relative to the first and second contacts.