Abstract: A lapping system for lapping portions of a workpiece. The lapping system includes, a lap that is defined by a surface. Portions of the surface are a lapping surface. The lapping surface has a coating that enhances material removal from a workpiece in a lapping process. The lapping system further includes, a scanning probe microscope having a tip and a substrate. The scanning probe microscope controls lapping motion of the lap and workpiece.

Abstract: An abrasive recovery system for a waterjet cutter, the abrasive recovery system comprising: a drain coupler including at least one drain nozzle, the drain nozzle having at least one wall defining a drain nozzle bore, the drain coupler defining a drain opening wherein the drain opening is in fluid communication with the drain nozzle bore; and a flexible hose coupled to the drain nozzle to establish fluid communication between the drain opening and the flexible hose.

Abstract: The present invention addresses the problem of providing a water-soluble cutting or grinding fluid that has excellent permeability and washability, that can be widely used in cutting or grinding, and that is particularly suitable for use in superfinishing. The present invention provides a water-soluble cutting or grinding fluid that contains a glycol compound (A), at least one substance (B) selected from the group consisting of organic amines and inorganic alkalis, a surfactant (C), and water (D), the water-soluble cutting or grinding fluid having a contact angle of 2 to 15° as measured using the ?/2 method one second after a drop of a dilution of the water-soluble cutting or grinding fluid is dropped on an SPCC-SB plate.

Abstract: Before a first surface of a substrate is polished using a chemical mechanical process, the substrate is transferred to a modification station. The substrate comprises a side wall connected with the first surface at an edge and a second surface opposite to the first surface and also connected to the side wall. The first surface is substantially flat. The side wall is substantially perpendicular to the first surface. The edge of the substrate is modified at the modification station by removing material from a region of the first surface. The side wall of the substrate is a boundary of the region. The modified edge comprises a modified first surface that tapers within the region towards the second surface. The side wall remains substantially perpendicular to the first surface.

Abstract: A continuous-generation gear grinding method of conducting a gear grinding process such that while a thread-shaped grinding wheel is rotated around an axial center thereof and fed in an axial center direction, a position coming into contact with abrasive grains is constantly changed in the presence of a water-soluble grinding fluid by performing a grinding feed in a direction parallel to an axial center of a gear blank and by serially rotating the gear blank around the axial center, the grinding wheel being a vitrified grinding wheel having abrasive grains bonded by a vitrified bond with pores formed among the abrasive grains, and the abrasive grains having a grain size of F120 to F180.

Abstract: A component in a CMP tool disclosed herein having a surface and a hydrophobic layer deposited on the surface. In one example, the component is a component for delivering a fluid in a CMP tool. The component for delivering a fluid in a CMP tool includes an elongated member having a first end and a second end, and an elongated upper surface extending between the two ends. A hydrophobic layer is deposited on the elongated upper surface. In another example, the component is a ring shaped body having an upper side and a lower side. A hydrophobic layer is deposited on the inner surfaces of both the upper and lower sides. In another example, the component is a disk shaped body having a top surface, bottom surface, and ledge defined by the top and bottom surfaces. A hydrophobic layer is deposited on the surfaces and the ledge.

Abstract: A method of conducting a material removal operation using a grinding system including moving an abrasive article relative to a workpiece, detecting a change in a dimension of the abrasive article during moving, and reducing resonance vibrations in the grinding system.

Abstract: A polishing apparatus includes a polishing table for supporting a polishing pad and a substrate holding device for pressing a substrate against the polishing pad. The substrate holding device includes an elastic film to form multiple pressure chambers to press the substrate, and a pressure control unit controlling pressure of the pressure chambers. The pressure control unit includes a first flow path connected to a first pressure chamber, and first and second pressure regulation mechanisms. The pressure control unit performs switching control from first pressure regulation mechanism to second pressure regulation mechanism when a set pressure within first pressure chamber reaches a first threshold value. Then, the pressure control unit performs switching control from second pressure regulation mechanism to first pressure regulation mechanism when the set pressure within the first pressure chamber reaches a second threshold value lower than the first threshold value.

Abstract: A device and a method for polishing of an optical lens by means of rotary tool are proposed, a fixture for the lens being pivotable around a pivoting axis transversely to the axis of rotation by means of a push-rod adjustment and being pivotable up out of a machining position such that the lens can be changed from overhead. This allows a compact structure and easy changing of the lens.

Abstract: An apparatus includes a slurry dispensing arm, multiple nozzles formed on the slurry dispensing arm, and a slurry supply module connected to the slurry dispensing arm. The slurry supply module is configured to provide slurry to the multiple nozzles and the multiple nozzles are configured to dispense the slurry.

Abstract: A grinding machine includes a manual rotating handle provided with a rotation detector that outputs a rotation detection signal so that the position of a grinding wheel with respect to a workpiece can be relatively moved in accordance with the rotation detection signal. The grinding machine further includes a grinding wheel, a moving apparatus that moves the position of the grinding wheel with respect to a workpiece W, a proximity detector that outputs a proximity detection signal corresponding to a relative position or a relative distance between the workpiece and the grinding wheel, a manual rotating handle provided with a rotation detector, and a control apparatus that controls the moving apparatus based on the rotation detection signal. The manual rotating handle is provided with a rotational-torque varying apparatus. The control apparatus controls the rotational-torque varying apparatus based on the proximity detection signal.