Patents Examined by Leonid Fastorsky
  • Vacuum pump and vacuum apparatus
    Patent number: 6607365
    Abstract: A vacuum pump capable of controlling a gas sucking performance is provided. A conductance variable mechanism (50) is arranged at an inlet port (16) formed inside a flange (11). The conductance variable mechanism (50) allows the area of a cross-section of the inlet port to be increased or decreased relative to the direction where gas is fed, so that an amount of gas to be sucked from the inlet port (16) can be controlled.
    Type: Grant
    Filed: August 26, 1999
    Date of Patent: August 19, 2003
    Assignee: Seiko Seki Kabushiki Kaisha
    Inventors: Takashi Kabasawa, Takashi Okada, Manabu Nonaka