Patents Examined by Liybett Martir
  • Mass flow sensor having an improved membrane stability
    Patent number: 6820481
    Abstract: A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor, in particular the reoxide layer which is present in the known mass flow sensor is replaced by a thicker PECVD silicon oxide layer. The thickness of the silicon oxide layer deposited on the platinum layer is increased, and the known mass flow sensor is also provided with a cover layer of PECVD silicon nitride forming a moisture barrier.
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: November 23, 2004
    Assignee: Robert Bosch GmbH
    Inventors: Heribert Weber, Werner Steiner