Abstract: Thermal hot spots in the substrate of a semiconductor die, and the required surface area of the semiconductor die, are substantially reduced by forming thermal or thermal and electrical pipes in the substrate that extend from a bottom surface of the substrate to a point near the top surface of the substrate.
Type:
Grant
Filed:
May 17, 2006
Date of Patent:
March 4, 2008
Assignee:
National Semiconductor Corporation
Inventors:
Gobi R. Padmanabhan, Visvamohan Yegnashankaran