Patents Examined by M Budd
  • Surface acoustic wave element
    Patent number: 6657366
    Abstract: A surface acoustic wave element includes multilayer electrodes having much higher electric power durability compared to conventional surface acoustic wave elements. The multilayer electrodes are prepared by forming, on a piezoelectric substrate, a Ti base electrode film that improves the orientation characteristics of the multilayer electrodes, an Al-type electrode film, an electrode film having a diffusive material that can easily diffuse into the grain boundary of the Al electrode film, and then an Al electrode film, in this order.
    Type: Grant
    Filed: September 22, 2001
    Date of Patent: December 2, 2003
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Masanobu Watanabe, Kazuhiro Inoue