Patents Examined by M. Racuba
  • Patent number: 6402588
    Abstract: The object of the present invention is to provide a polishing apparatus having a grinding member in a compact design that can provide high efficiency for both polishing and dressing operations, and prevents tilting of the grinding member even if the rotation axis thereof is moved away from the outer periphery of the object. A polishing apparatus for an object, comprises: an object holder for holding an object to be polished, such that a surface of the object to be polished faces upward; a dresser disk holder for holding a dresser disk for dressing, such that a dressing surface thereof faces upward; and a grinding member for polishing the object, and for being dressed by the dresser disk, by pressing and sliding the grinding member relative to the object and the dresser disk.
    Type: Grant
    Filed: April 27, 1999
    Date of Patent: June 11, 2002
    Assignee: Ebara Corporation
    Inventors: Hisanori Matsuo, Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa