Abstract: A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group disposed along a linear first line; a second unit group disposed along a linear second line crossing the first line at a predetermined angle; and a transfer robot capable of transferring and receiving a substrate to and from the first unit group and the second unit group.

Abstract: A multiple loader, also adapted to operate as a magazine for storing vertically arranged panels, comprises, at a front head portion thereof, a step-by-step pushing device including a carriage driven by pneumatic cylinders causing the carriage to slide with a rectilinear reciprocating horizontal movement, to provide a pushing action on a first of a series of separating elements, arranged at a top sliding platform.

Abstract: The cargo transport system according to this invention employs a tow vehicle that can automatically follow and run upon guide lines. The tow vehicle can tow cargo laden equipment such as container dollies to thereby automatically transport the air cargo. The air cargo is conveyed by an underground air cargo conveyor mechanism which has the conveyor line including the guide line installed underground to link the air cargo holding area in the airport terminal building and the aircraft parking area. Further, the system connects the loading/unloading cargo door of the aircraft and the underground loading/unloading position for the underground air cargo conveyor mechanism by an air cargo elevator.

Abstract: A trailer for a walk greensmower comprises a trailer frame supported by a pair of ground engaging trailer wheels. The trailer frame includes a pair of spaced, parallel wheel ramps. A tongue is provided for connecting to a tow vehicle. The trailer frame is pivotal relative to the tongue and to the trailer wheels to tilt into an inclined loading position for loading the walk greensmower by driving the walk greensmower up the wheel ramps using the powered transport wheels of the walk greensmower. Once the walk greensmower is loaded onto the wheel ramps, the trailer frame is pivoted into a transport position in which the wheel ramps no longer engage the ground and the walk greensmower is carried on the wheel ramps. In one embodiment of this trailer, the wheel ramps comprise cylindrical rails and the transport wheels are grooved to ride on the top sides of the rails.

Abstract: A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis.

Abstract: End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.

Abstract: A roller mechanism for transporting loads over a surface, the roller mechanism including a body, at least one roller assembly that permits the body to move in at least one translational direction, the roller assembly being rotatably connected to the body, and a lifting mechanism attached to the body such that the body is selectively rotatable relative to the lifting mechanism, wherein the lifting mechanism can be operated to lift the roller assemblies out of contact with the surface.

Abstract: A rotary transfer apparatus, comprising a frame structure; a rotatable main shaft supported by the frame structure; a first planetary member connected to the main shaft; at least one first planetary shaft rotatably connected to the first planetary member and rotating in relation to the main shaft; a secondary body connected to each first planetary shaft; a second planetary shaft rotatably connected to each secondary body and rotating in relation to the first planetary shaft; an article transfer mechanism connected to each second planetary shaft; and an offset cam mechanism. The article transfer mechanism is adapted for picking and placing articles, and has at least one stem connected to the second planetary shaft. Each stem has a distal end whose motion defines a product path about the main shaft. The product path has at least two apexes, with one apex wherein the distal end of the stem moves in an in-line motion and another apex wherein the distal end of the stem moves in a non-identical motion.

Abstract: An agricultural commodity cart loading conveyor apparatus comprises a conveyor mounted to an agricultural commodity cart. A hopper is pivotally attached to the lower end of the conveyor tube and a hopper conveyor section is mounted along a bottom of the hopper. The hopper pivots from an extended position to a folded position. In the extended position the hopper is oriented at an angle to the conveyor tube such that the hopper extends along the ground when the conveyor is in the operating position, and is connected to the lower end of the conveyor tube such that the hopper conveyor section conveys material entering the hopper into the lower end of the conveyor tube for conveyance up the conveyor tube. A lock is operative to lock the hopper and conveyor together when the hopper is in the extended position. Hydraulic cylinders can be provided to facilitate use with larger conveyors.