Abstract: Some embodiments relate to methods and apparatus for mitigating high metal concentrations in photoresist residue and recycling sulfuric acid (H2SO4) in single wafer cleaning tools. In some embodiments, a disclosed single wafer cleaning tool has a processing chamber that houses a semiconductor substrate. A high oxidative treatment unit may apply a high oxidative chemical pre-treatment to the semiconductor substrate to remove a photoresist residue having metal impurities from the semiconductor substrate in a manner that results in a contaminant remainder. A SPM cleaning unit apply a sulfuric-peroxide mixture (SPM) cleaning solution to the semiconductor substrate to remove the contaminant remainder from the semiconductor substrate as an SPM effluent. The SPM effluent is provided to a recycling unit configured to recover sulfuric acid (H2SO4) from the SPM effluent and to provide the recovered H2SO4 to the SPM cleaning unit via a feedback conduit.

Abstract: A remotely operated device for inspecting and/or cleaning a subsea flexible pipe joint comprises a support assembly. In addition, the device comprises a tool positioning assembly coupled to the support assembly. The tool positioning assembly includes a rotating member disposed about a central axis. The tool positioning assembly is rotatable relative to the support assembly about the central axis. Further, the device comprises a cleaning assembly including a cleaning device adapted to clean the flexible pipe joint. The cleaning device is axially moveable relative to the rotating member. Still further, the device comprises a clamping assembly coupled to the support assembly. The clamping assembly has an open position disengaged with the section of the flexible pipe joint and a closed position engaging the section of the flexible pipe joint.

Abstract: A wash tub apparatus and method of manufacturing the wash tub for a laundry washing machine. The wash tub may include an interior rear wall and an exterior rear wall. The exterior rear wall may be molded with a portion of a side wall.

Abstract: A portable descaling apparatus for creating a forceful fluid flow through passages of a heat exchanger may comprise a cart, a fluid tank mounted on the cart and having an interior configured to hold a quantity of fluid, a fluid pump mounted on the cart and being configured to pump fluid from the tank under pressure and a pump motor mounted on the cart and being connected to the fluid pump to operate the pump.

Abstract: A dishwasher filtration system includes a coarse filter disposed in a tub of a dishwasher, the coarse filter configured to filter water directed to a main wash pump. The system also includes a soil accumulation chamber configured to receive a portion of water from the main wash pump. The system further includes a fine filter covering an opening of the soil accumulation chamber, the fine filter configured to filter the portion of water received inside the soil accumulation chamber. The system also includes a backwash nozzle configured to supply water to the fine filter. In addition, the system may include a deflector that deflects the water from the backwash nozzle to the fine filter.

Abstract: A washing machine appliance includes an additive reservoir positioned below a top panel of the washing machine appliance for receiving large quantities of a first fluid additive, such as detergent. In addition, the additive reservoir defines an additive passageway that extends through the additive reservoir and is configured for receiving a second fluid additive, such as bleach, and directing that additive directly into a tub of the washing machine appliance. In this manner, bulk detergent and an additional additive may be added into the washing machine appliance without requiring the manufacturing and assembly of two separate parts which must be installed within the limited space under the top panel of the washing machine appliance.

Abstract: A dishwasher includes a circulation pump that supplies water to nozzles; a drainage pump that discharges the water; a driving current supply unit that supplies a driving current to one of the circulation pump and the drainage pump; a controller that transmits driving control signals to the driving current supply unit; and a door opening detection unit that, if opening of a door is detected, transmits door opening detection signals to the controller and the driving current supply unit, wherein, if the door opening detection signals are received while the circulation pump operates, the driving current supply unit stops supply of the driving current to the circulation pump and supplies the driving current to the drainage pump.

Abstract: A laundry treatment apparatus according to the present invention includes a casing; an outer tub suspended in the casing; a rack extending vertically; a pinion, which is moved along the rack when the outer tub vibrates and which is rotated via cooperation with the rack; and a torsion element for creating a torsional twisting moment to attenuate rotation of the pinion when the pinion is rotated.

Abstract: A washer-dryer is provided with at least one condenser for condensing moisture-laden air exiting the laundry during a drying cycle. The washer-dryer includes a washing tub (10) comprising a cylindrical lateral wall (12) and a rear wall (14) and a rotatable laundry drum (24) arranged or arrangeable inside the washing tub (10). An inlet (20) of the condenser is arranged at or connected to the rear wall of the washing tub (10). An outlet of the condenser is connected to the washing tub (10). The rear wall (14) of the washing tub (10) comprises a duct (18) fluidly connected to the inlet (20) of the condenser, so that the air stream from the laundry drum (24) to the inlet (20) of the condenser passes the duct (18). At least one sensor (22) is arranged inside the duct (18).

Abstract: A cleaning fixture assembly for protecting an electrostatic chuck suitable for supporting semiconductor substrates during a cleaning process contains a plate configured to align with and engage a backside of the electrostatic chuck, the plate having an annular seal portion surrounding a pocket. The cleaning fixture assembly also contains a first O-ring engaging the annular seal portion of the plate, a plurality of through-holes in the pocket of the plate, and a plurality of O-rings surrounding the plurality of through-holes in the pocket of the plate. The plurality of through-holes are configured to be aligned with and in fluid communication with lift pin holes and helium holes in the backside of the electrostatic chuck, and the plurality of O-rings are positioned to allow cleaning media to engage the lift pin holes and helium holes in the electrostatic chuck during a cleaning process while sealing the cleaning media from reaching the backside of the electrostatic chuck.

Abstract: A laundry treating apparatus is provided that may include a cabinet having a laundry opening formed therein, a door mounted to the cabinet to open and close the laundry opening, and a control panel arranged at or on the cabinet. The control panel may include a control panel body that projects forward from a front plate. A front side of the control panel body may be sloped to face upward, thereby permitting enhanced utilization of an inside space of the cabinet, easy display of information on the control panel to a user, and easy operation of the control panel by a user.

Abstract: A washing machine including a tub, an air supply unit, disposed over the tub, to heat and circulate air in the tub, a detergent dispenser, disposed over the tub, a dispenser cover for opening the detergent dispenser, a detecting unit for detecting when the dispenser cover is open, and a controller for stopping the operation of the air supply unit when the detecting unit detects that the dispenser cover is open.

Abstract: A substrate cleaning apparatus includes: a pure water supply line provided with a pure water flow regulator and a pure water supply valve; chemical supply lines each provided with a chemical flow regulator and a chemical supply valve; a merging line where pure water and a plurality of liquid chemicals meet to form a cleaning liquid; a cleaning liquid supply line configured to supply the cleaning liquid to a substrate; and a controller configured to control the pure water flow regulator, the pure water supply valve, the chemical flow regulators, and the chemical supply valves such that the pure water and the plurality of liquid chemicals are present at a predetermined ratio at a meeting point.

Abstract: A cycle of operation for a laundry treating appliance having a rotatable treating chamber for receiving a laundry load including a washing phase having an application of a treating chemistry to the laundry load to separate soils from the laundry load, an extracting phase having a centrifugal extraction of at least some of the treating chemistry from the laundry load, and a rinsing phase having a spraying of an amount of rinse water onto the laundry load to evenly wet the laundry load to form a wetted laundry load and an applying of a bleach solution to the wetted laundry load.

Abstract: A system for cleaning an object may include a cleaning medium dispenser configured to deliver a cleaning medium to a surface of the object, wherein the cleaning medium dislodges and captures debris from the surface, an ultrasonic device configured to deliver ultrasonic waves to the object, wherein the ultrasonic waves generate ultrasonic vibrations in the object to atomize the cleaning medium from the surface and a vacuum configured to provide a vacuum airflow, wherein the vacuum airflow collects atomized cleaning medium and debris from the surface.

Abstract: A warewash machine arm mechanism includes a liquid supply shaft assembly including a rotatable sleeve bearing mounted thereon, and an arm assembly including an elongated interior liquid flow space along an arm body and one or more liquid ejection orifices. The arm assembly is releasably mounted to the supply shaft assembly via a latch mechanism of the arm assembly that engages the rotatable sleeve bearing such that the arm assembly rotates with the rotatable sleeve bearing during ejection of liquid from the liquid ejection orifices.

Abstract: A wall-mounted drum-type washing machine includes a rear panel mounted on a wall surface; a tub containing wash water, supported by the rear panel; a front panel on the tub; a box unit on the rear panel, surrounding the tub and having a connection hole in a front side thereof; a cover unit in the connection hole; and an elastic assembly unit connecting the box unit and the rear panel, generating an elastic force between the cover unit and the box unit.

Abstract: A dishwasher, a door assembly for the dishwasher and a method of drying the dishware in the dishwasher are provided. The dishwasher may include a tub portion adapted to hold dishware. The dishwasher may also include a duct having an inlet proximate to the top of the tub portion. The duct may be configured to receive warm air and vaporized water from within the tub portion. The dishwasher may further include a single blower configured to direct the warm air and vaporized water into the duct during a drying cycle. The blower may be configured to operate in a cyclic manner. In various embodiments, the blower may be configured to operate in a reverse direction for at least a portion of the drying cycle.

Abstract: A warewasher has at least one treatment system comprising a jet system (60, 61, 62, 63, 202) with at least one jet for spraying treatment liquid onto the items within at least one treatment zone (32, 33, 201), a fresh water system and a control device (10), wherein the fresh water system has at least one water feed (71), with at least one fresh water inlet (70) for the introduction of fresh water into the at least one treatment zone (32, 33, 201) as well as a controllable capacitive deionization unit (50), wherein the at least one cell (50a, 50b) is designed to be operated in a deionization mode and in at least one further operating mode, wherein the control device (10) is designed to change the operating mode of the at least one cell (50a, 50b) in accordance with at least one operating parameter of the warewasher.

Abstract: The present application thus provides a wash system for use with a compressor having a bellmouth and one or more extraction pipes. The wash system may include a water source, a first fluid source, a mixing chamber in communication with the water source and the first fluid source, a bellmouth line in communication with the mixing chamber and the bellmouth, and a stage line in communication with one of the extraction pipes.