Patents Examined by Margaret Baeker
  • Multi-chamber deposition system
    Patent number: 4841908
    Abstract: A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.
    Type: Grant
    Filed: February 16, 1988
    Date of Patent: June 27, 1989
    Assignee: Minnesota Mining and Manufacturing Company
    Inventors: Richard L. Jacobson, Frank R. Jeffrey, Roger K. Westerberg