Patents Examined by Marianne L Padgett
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Patent number: 7404990Abstract: Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. In certain embodiments of the invention, there is provided a low-temperature process to remove at least a portion of at least one pore-forming phase within a multiphasic film thereby forming a porous film. The pore-forming phase may be removed via exposure to at least one energy source, preferably an ultraviolet light source, in a non-oxidizing atmosphere.Type: GrantFiled: November 14, 2002Date of Patent: July 29, 2008Assignee: Air Products and Chemicals, Inc.Inventors: Aaron Scott Lukas, Mark Leonard O'Neill, Mark Daniel Bitner, Jean Louise Vincent, Raymond Nicholas Vrtis, Eugene Joseph Karwacki, Jr.
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Patent number: 6423382Abstract: A high gloss coating on a mineral substrate, such as a roof tile or floor tile, can be achieved by a method comprising: i) applying a first coating consisting of an aqueous composition comprising a film forming polymeric binder to a surface of the uncured substrate; ii) exposing said first coating to hot air or infrared, ultraviolet or microwave radiation, for sufficient time for at least the surface of said coating remote from the substrate body to form a film of polymeric binder, and iii) applying a second coating consisting of an aqueous composition comprising a film forming polymeric binder on top of the first coating. After application of the second coating, the substrate and coatings are dried and cured, for example in an oven or autoclave.Type: GrantFiled: November 24, 1999Date of Patent: July 23, 2002Assignee: Rohm and Haas CompanyInventors: Michael Damian Bowe, John Maxfield
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Patent number: 5283087Abstract: A plasma process and an apparatus therefor are described. A number of substrates are disposed between a pair of electrodes, to which a high frequency electric power is applied in order to generate glow discharge and induce a plasma. The substrates in the plasma are applied with an alternating electric field. By virtue of the alternating electric field, the substrates are subjected to sputtering action.Type: GrantFiled: April 6, 1992Date of Patent: February 1, 1994Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Kazuhisa Nakashita, Toshiji Hamatani, Takashi Inushima, Kenji Itou
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Patent number: 5173330Abstract: A patterning composition is prepared by mixing a metallic salt of organic acid which separates a metal when reduced (e.g. copper (II) heptanoate), a reducing agent (e.g., 4-methoxy-1-naphthol), which shows reducing activity by being heated and loses the reducing activity by being irradiated by UV light, visible light or infrared light, gelatin and water, the composition is applied on a substrate, and the coating is irradiated by UV or visible infrared light through a mask and then heated, thereby to deposit metal in a pattern.Type: GrantFiled: April 3, 1990Date of Patent: December 22, 1992Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Takahiro Asano, Shinichi Mizuguchi, Toshio Ishikawa
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Patent number: 5171607Abstract: A diamond-like carbon film is deposited on an insulating substrate using a solid carbon source evaporated by an electron beam so as to maintain the substrate temperature below about 150.degree. C. in a differentially evacuated chamber containing a selective etchant gas such as hydrogen. In orer to bombard the substrate with positively charged ions while preventing accumulation of a repulsive surface charge, a radio frequency (RF) electric field is applied to a rotating fixture holding the substrate. The differentially evacuated chamber maintains the atmospheric pressure around the solid carbon source at one end of the chamber at a sufficiently low pressure to prevent loss of electron beam energy and thereby enable vaporization of the carbon while maintaining the substrate at the other end of the chamber at a higher pressure which enables the RF electric field to excite an ion gas plasma around the substrate and thereby facilitate deposition of the diamond-like carbon film.Type: GrantFiled: January 29, 1990Date of Patent: December 15, 1992Assignee: Bausch & Lomb IncorporatedInventor: Michael J. Cumbo
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Patent number: 5116639Abstract: A process and machine are provided to manufacture furniture parts and the like with a unique, durable, low gloss finish which has a soft, satin feel, and imparts a monolithic appearance to the part. A blank cut from a suitable substrate material is grooved about its marginal edge to a depth near the opposite surface of the blank. A liquid edge protection material is poured into the groove and fully cured. The blank is then cut through at the filled groove to create a decorative protection strip about the marginal edge of the blank. The formed blank is next coated with a preselected paint or base material. After the base coat is cured, a layer of UV curable, protective material is applied to the painted surfaces of the blank. The UV coated blank is then translated through a multi-stage, continuous feed, ultraviolet processor to selectively and sequentially cure the protective coat. Powered rollers arranged in spaced apart groups convey the parts through the processor.Type: GrantFiled: February 7, 1989Date of Patent: May 26, 1992Assignee: Steelcase Inc.Inventors: Stephen B. Kolk, James P. Theuerkauf, Fredrick J. Walz
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Patent number: 5114738Abstract: An optical fiber is formed by continuously coating a precursor core filam with a glass-forming coating. The precursor filament is continuously moved from a storage reel through a stationary coating station. The filament is then moved through a stationary glass-forming station and is continuously processed to convert the coating to a glass, with the core either removed from the fiber during glass forming or becoming an integral part of the ultimate fiber during glass forming. The glass fiber is then moved continuously through a glass densification station and is densified in a continuous process. The fiber is thereafter provided with a protective coating as it moves through a stationary coating station and the completed optical fiber is continuously reeled.Type: GrantFiled: July 20, 1990Date of Patent: May 19, 1992Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Robert O. Savage, Robert J. Fischer, Sam Divita
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Patent number: 5108543Abstract: Surface treatment is applied to a substrate by supplying thereto excited molecules in which the vibrational energy level is excited. SF.sub.6, O.sub.2, N.sub.2, etc., are used as the excited molecules and supplied to the substrate as beams. This method is particularly suitable for the surface treatment in the production of semiconductor devices.Type: GrantFiled: October 20, 1988Date of Patent: April 28, 1992Assignee: Hitachi, Ltd.Inventors: Keizo Suzuki, Ken Ninomiya, Shigeru Nishimatsu, Osami Okada
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Patent number: 5100691Abstract: A process for selective formation of a II-VI group compound film comprises applying a compound film forming treatment, in a gas phase including a starting material for supplying the group II atoms of periodic table and a starting material for supplying the group VI atoms of periodic table, on a substrate having a non-nucleation surface (S.sub.NDS) with small nucleation density and a nucleation surface (S.sub.NDL) with larger nucleation density (ND.sub.L) than the nucleation density (ND.sub.S) of said non-nucleation surface (S.sub.NDS) and a large area sufficient for a number of nuclei to be formed and forming selectively a II-VI group compound film only on said nucleation surface (S.sub.NDL).Type: GrantFiled: April 16, 1991Date of Patent: March 31, 1992Assignee: Canon Kabushiki KaishaInventors: Hiroyuki Tokunaga, Takao Yonehara
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Patent number: 5100692Abstract: A member is prepared by forming a magnetic surface layer on a magnetic base member having a different composition from the surface layer. A laser beam is radiated onto the member so as to fuse the member and the surface layer, thereby forming a fused portion having magnetic properties. A modified portion is formed in a portion of the fused portion corresponding to the surface layer such that this portion has different permeability from other portions of the surface layer.Type: GrantFiled: March 8, 1989Date of Patent: March 31, 1992Assignees: Kabushiki Kaisha Toshiba, Toshiba Machine Co., Ltd.Inventors: Ei Nakamura, Mitsuo Sasaki, Hiromi Nakamura
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Patent number: 5098737Abstract: A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser beam strikes the target at non-perpendicular angles of incidence. Also, selective placement of particles upon a substrate as well as simultaneous cleaning of the substrate is achieved by a secondary electrode placed within the laser beam path of travel between a first electrode and the substrate.Type: GrantFiled: May 9, 1990Date of Patent: March 24, 1992Assignee: Board of Regents The University of Texas SystemInventors: Carl B. Collins, Farzin Davanloo
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Patent number: 5096739Abstract: A novel method is presented for synthesizing ultrafine fiber composite materials by laser induced coevaporation of a metallic target and a ceramic target in the presence of a heated tungsten filament, within a reducing environment. The species produced by rapid condensation from the resultant laser plume, along with the products derived from the chemical transport reactions involving the heated filament, form layers of composite material comprising a metal matrix and a random weave fiber network. In a preferred embodiment of the present invention, composite layers are formed on a nickel alloy substrate surface at a rate of about 1 micron per second. The matrix of the composite films is either aluminum or tungsten and the dispersed phase is amorphous silica fibers. The diameter of the fibers are between 25 and 120 nm depending on the laser beam materials interaction time.Type: GrantFiled: November 27, 1989Date of Patent: March 17, 1992Assignee: The University of ConnecticutInventors: Peter R. Strutt, Gan-Moog Chow
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Patent number: 5087476Abstract: The method includes applying ions and electrons from an ion gun onto a polymer film while the polymer film is traveling circumferentially along a peripheral surface of a cylindrical can from a supply location to a take-up location of the polymer film relative to the cylindrical drum. The ions and electrons from the ion gun are applied onto a part of the polymer film while it is moving through a position near the supply location of the polymer film relative to the drum at which the polymer film begins to contact the outer peripheral surface of the drum. At a downstream location relative to the drum, electrons are applied from an electron gun onto the polymer film traveling on the drum surface. At a further downstream location relative to the drum, the thin film is deposited, e.g., by vacuum evaporation, on the polymer film travelling on the drum. This method enables a thin film, having no wrinkles and with a high adhesion strength with respect to the polymer film, to be produced in a stable manner.Type: GrantFiled: March 2, 1990Date of Patent: February 11, 1992Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kiyokazu Tohma, Ryuji Sugita, Kazuyoshi Honda, Yasuhiro Kawawake, Tatsuaki Ishida
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Patent number: 5087479Abstract: A method forming a compressible intermediate layer between a chip and a chip envelope provides that an ultraviolet-curable gel that is metered onto the chip with a multiple needle arrangement. The multiple needle arrangement is conducted over the chip surface with varying moving directions and, under certain circumstances, with varied speeds as well. After the application of the gel, the layer is pre-cured on a strips of ultraviolet light that follows the multiple needle arrangement at a defined distance therefrom.Type: GrantFiled: June 5, 1990Date of Patent: February 11, 1992Assignee: Siemens AktiengesellschaftInventors: Patrick McManus, Rudolf Kutscherauer
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Patent number: 5084300Abstract: A rotating cylindrical target has material ablated therefrom by a laser beam trained to contact the surface along a line parallel to the rotation axis, thereby avoiding problems of crater formation which arise with disc-shaped targets.Type: GrantFiled: May 2, 1990Date of Patent: January 28, 1992Assignee: Forschungszentrum Julich GmbHInventors: Willi Zander, Bernd Stritzker, Joachim Frohlingsdorf
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Patent number: 5084299Abstract: A method for patterning electroless plated metal on a polymer substrate. In a first embodiment a substrate is first coated with a polymer suitable for complexing a seed metal which can initiate electroless plating. The polymer is then mixed with a seed metal such as palladium, selectively irradiated to form the desired conductor pattern, and then etched so that the desired pattern remains. The substrate is subsequently placed in an electroless plating bath to form a metal pattern. In a second embodiment, before applying the seed metal a substrate immersed in a polymer solution suitable for complexing a seed metal can be selectively irradiated to selectively deposit polymer on the substrate, followed by applying a seed metal to form a polymer-seed metal mixture and an electroless plating bath. In addition, an alkaline chemical may be added to an acidic polymer to prevent the polymer from etching metal on the substrate.Type: GrantFiled: October 19, 1990Date of Patent: January 28, 1992Assignee: Microelectronics and Computer Technology CorporationInventors: Tom J. Hirsch, Charles W. C. Lin, Ian Y. K. Yee
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Patent number: 5080927Abstract: A thin film formation method includes the steps of holding a substrate in a reduced-pressure vapor phase reaction chamber having means for irradiating light in visible and ultraviolet ranges, supplying an organo-titanium compound containing a tri-azo group, and vapor-depositing a titanium nitride film on a surface of the substrate by an excitation reaction caused by light.Type: GrantFiled: July 6, 1990Date of Patent: January 14, 1992Assignee: Nippon Telegraph and Telephone Corp.Inventors: Koichi Ikeda, Masahiko Maeda, Yoshinobu Arita
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Patent number: 5079045Abstract: A method and apparatus are disclosed for achieving and maintaining an inert atmosphere as oxygen-deficient as possible in a treatment chamber, having a reaction zone, particularly an irradiation chamber, traversed by a length of material, wherein the length of material is supplied to the chamber through an inlet channel and conducted from the chamber through an outlet channel. A circulating inert gas stream, which detaches the entrained gas boundary layer held by the material, is moved countercurrently to the length of material in the inlet channel and is supplemented in a controlled manner with fresh inert gas in such amount that a given maximum oxygen concentration is not exceeded in the reaction zone and the flow rate of the inert gas stream is controlled, so that the pressure before the exit gap of the outlet channel is the same or slightly higher than the surrounding pressure.Type: GrantFiled: April 30, 1990Date of Patent: January 7, 1992Assignee: Th. Goldschmidt AGInventors: Gerhard Luhmann, Theodor Selbach, Jurgen Jachmann
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Patent number: 5077100Abstract: A method for forming connections between copper conductors disposed on a substrate includes the steps of coating the copper conductors with a layer of nickel, exposing the coated copper conductors to a gas which includes a tungsten-bearing compound, and irradiating the substrate with a laser beam to deposit the tungsten between the copper conductors. A system for forming connections between copper conductors disposed on a substrate, includes means for coating the copper conductors with a layer of nickel, means for exposing the coated copper conductors to a gas which includes a tungsten-bearing compound, and means for irradiating the substrate with a laser beam to deposit the tungsten between the copper conductors.Type: GrantFiled: October 17, 1989Date of Patent: December 31, 1991Assignee: Microelectronics and Computer Technology CorporationInventor: Robert F. Miracky
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Patent number: 5075131Abstract: A method for preservation treatment of wood comprises the steps of radiating a laser beam on a part of the surface of the wood at the least to form small holes therein, impregnating the wood with a preservative, and then applying high frequency waves to the wood to dry it by dielectric heating.Type: GrantFiled: March 12, 1990Date of Patent: December 24, 1991Assignee: Fuyo Lumber Sales Co., Ltd.Inventors: Nobuaki Hattori, Kuniharu Yokoo