Abstract: A MEMS gyroscope includes a mixed analog and digital drive loop. A drive sense signal from a suspended spring-mass system is received by the drive loop, rectified, and compared to a reference signal. The result of the comparison is processed and converted into a digital signal that is processed by a digital filter and a digital pulse-width modulator of the drive loop. The output of the pulse width modulator controls a high-voltage drive of the drive loop that generates a drive signal having an amplitude based on the pulse width modulator output signal and supplies the drive signal to drive the suspended spring-mass system.

Abstract: Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

Abstract: According to an aspect, a force sensor includes: a plurality of first electrodes that are arranged along a substrate; an elastic body that is in contact with the first electrodes; a second electrode that is in contact with the elastic body, the elastic body being interposed between the second electrode and the first electrodes; and a third electrode that is provided on the substrate side of the second electrode and configured to be electrically coupled to the second electrode. The elastic body includes a conductive particle that electrically couples the first electrodes and the second electrode when force is applied that causes the first electrodes and the second electrode to be approached. The third electrode has a continuous lattice shape that separates at least the first electrodes adjacent in one direction from each other.

Abstract: A level-measuring device, for determining a level of a medium is described, with an evaluation unit, that generates a measuring signal for determining the level based on a digitally converted signal of a reflected signal emitted from the level-measuring device toward the medium, wherein the level is determined based on a characteristic feature of the measuring signal; and that monitors, by way of a monitoring function, the determination of the level based on the characteristic feature and wherein the monitoring function selectively has at least one of a higher quality level and a lower quality level to the determination of the level.

Abstract: In a leak detection device comprising a gas analyzer, a vacuum pump, a first gas inlet, and a second gas inlet, it is provided that a first multi-way valve is connected to a first inlet and at least a first and a second outlet, wherein the inlet is connected to the first gas inlet, a second multi-way valve is connected to first inlet and at least a first and a second outlet, wherein the inlet is connected to the second gas inlet, wherein the two first outlets of the two multi-way valves are connected to the gas analyzer, and the two second outlets of the two multi-way valves are connected to the vacuum pump.

Abstract: MEMS gyroscope, having a first movable mass configured to move with respect to a fixed structure along a first drive direction and along a first sense direction, transverse to the first drive direction; a first drive assembly, coupled to the first movable mass and configured to generate a first alternate drive movement; a first drive elastic structure, coupled to the first movable mass and to the first drive assembly, rigid in the first drive direction and compliant in the first sense direction; a second movable mass, configured to move with respect to the fixed structure in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction; a second drive assembly, coupled to the second movable mass and configured to generate a second alternate drive movement in the second drive direction; and a second drive elastic structure, coupled to the second movable mass and to the second drive assembly, rigid in the second drive direction and compliant

Abstract: A medical gas separator for testing for leaks on a medical gas delivery system. The separator can be used to selectively fluidly join or separate an upstream portion and a downstream portion of the medical gas delivery system for testing for leaks on the downstream portion while the upstream portion can remain in use. The separator includes an upstream element connected to the upstream portion, a downstream element connected to the downstream element, and either a spacer element or a blanking element arranged therebetween. The separator is convertible between a first configuration that fluidly joins the upstream and downstream portions, and a second configuration that fluidly separates the upstream and downstream portions. The separator is convertible between each configuration by switching out the spacer element with the blanking element.

Abstract: A mine safety arrangement and a method for facilitating mine safe operation of a vehicle is provided. The vehicle includes a vehicle body and a vehicle body connected ground engaging arrangement for moving the vehicle. The vehicle body also includes a bottom portion and an inner space having a floor portion associated with the bottom portion. The inner space includes a mine safe level at a predetermined distance from the floor portion. Persons housed in the inner space having all body portions at or above the mine safe level are expected to be safe should the vehicle be subjected to a mine. The mine safety arrangement includes a sensor arrangement configured to provide signals at the mine safe level so that body portions crossing the mine safe level are detected by the signals for alerting persons that body portions crossed the mine safe level.

Abstract: A vehicle component balancing robot apparatus, for on vehicle balancing of one or more of a tire, a wheel, bearings, brake components, and vehicle components that impart vibrations to the vehicle. The apparatus includes a frame arranged so as to connect with the vehicle. A robot of the apparatus moves relative to the frame, and is configured so that the move, relative to the frame, resolves a predetermined location of a tire-wheel assembly relative to a reference frame of the robot. The robot has at least one end effector arranged to interface the tire-wheel assembly and the robot moves the at least one end effector to other predetermined locations on a wheel rim of the tire-wheel assembly, determined based on resolution of the predetermined location of the tire-wheel assembly relative to the reference frame.

Abstract: An adapter assembly that includes a housing, a channel formed within the housing that is configured to receive a medical device, a first groove formed along an interior wall of the channel that is configured to at least partially receive a first retaining element, and a second groove formed along the interior wall of the channel that is configured to at least partially receive a second retaining element. The first retaining element is configured to extend outward from the first groove and the second retaining element is configured to extend outward from the second groove, such that the first and second retaining elements abut against the medical device received through the channel.

Abstract: Three-dimensional (3D) micro-scale shells are presented with selectively removed regions/openings and which can be used in sensors and actuators, including gyroscopes. Example shells consisting of a suspended ring-shaped resonator that is supported using multiple beams that are not in the plane of the ring and are attached to a support post can be formed. Shells with various sizes and geometries of selectively removed regions and openings allow the creation of micro electromechanical systems (MEMS) sensors and actuators with a wide range of engineered mechanical and electrical properties. These shells can be used to form stacked 3D structures for various types of MEMS sensor and actuator devices, such as resonant gyroscopes, with sense and drive electrodes that conform to the curved profile of the resonant shell using for gyroscopes. 3D shells formed from a starting parent substrate are released and separated from their parent substrate using a number of techniques.

Abstract: Described herein are examples of tool based welding technique monitoring systems that provide an inexpensive, intuitive, and relatively robust way of tracking an orientation of a welding-type tool, and providing welding technique feedback based on the orientation. The system requires no sensors apart from a simple and/or relatively inexpensive sensor module that can travel with the welding-type tool, which makes the system highly portable. The system can also provide some feedback with minimal calibration, which can be valuable in situations where an operator forgets, or is unwilling, to take the time to fully calibrate the system. Additionally, full calibration of the system can be accomplished with a fast, simple, intuitive calibration technique.

Abstract: According to one embodiment, a sensor includes a housing, a sensor section, and a plurality of first fixing members. The housing includes a housing base. The sensor section is surrounded by the housing. The sensor section includes a sensor base, a support portion fixed to the sensor base, a movable portion supported by the support portion, and a plurality of fixed electrodes fixed to the sensor base and facing the movable portion. A first gap is provided between the sensor base and the movable portion. The fixed electrodes are provided in n-rotational symmetry in a first plane perpendicular to a first direction from the sensor base to the support portion. The n is an integer of 2 or more. The plurality of first fixing members fix the sensor base to the housing base. The first fixing members are provided in the n-rotational symmetry in the first plane.

Abstract: Disclosed is an innovative sensor mounting system featuring a pivot mechanism that allows the sensor unit to automatically return to its original sensor detection area after being displaced by impacts, such as those from forklifts, workers or the like. The pivot mechanism enables the sensor unit to maintain a comprehensive sensor detection area, ensuring complete visibility for monitoring loading and unloading operations.

Abstract: The embodiments of the present disclosure disclose a refrigeration chip, a refrigeration system, and a sample testing system and method. The refrigeration chip is in contact with a low-temperature cold source, is used for refrigerating a sample, and comprises a heating layer and a heat conducting layer that are disposed in sequence. The heating layer comprises at least one temperature control unit that is disposed on the heat conducting layer; and the heat generated by the temperature control unit is transferred to the low-temperature cold source along the thickness direction of the heat conducting layer. The described technology enables a particular time period to be selected for refrigeration and thawing during the in-situ observation and representation of a sample, and refrigeration and heating rates higher than 105° C./s are attained by means of an interface thermal resistance design, thus ensuring that the sample is not damaged.

Abstract: An inertial sensor including a substrate, sense frames, drive frames configured to put into motion the sense frames, and a sense lever pivotably mounted around a rotation axis. The sense frames, drive frames and sense lever are connected to each other in such a way that when the inertial sensor is subjected to a rotational movement around the rotation axis, the first sense frame, the second sense frame and the sense lever respectively feature a first tilt ?1 a second tilt ?2 and a lever tilt ?S relatively to the device plane, and both ?1/?S and ?2/?S are lower than 0.1. The inertial sensor features strain gauges that get stressed when the lever rotates due to the motion of the sense frames.

Abstract: A method of and system for inspecting a sealed compartment within a gas turbine engine is provided. The method includes using at least one acoustic transmitter to produce at least one emitted acoustic signal into a compartment interior cavity. The acoustic transmitter is in communication with the at least one port. The array of acoustic sensors is used to sense acoustic signals. The acoustic sensors are disposed in proximity to the seal outside of the interior cavity of the sealed compartment. Each acoustic sensor is configured to sense emitted acoustic signals produced by the acoustic transmitter and to produce signal data representative of sensed acoustic signals. The presence or absence of a compromised region of the seal is determined using the signal data from at least one of the acoustic sensors of the array of acoustic sensors.

Abstract: In one aspect, a vehicle and associated method includes a liquid reservoir, a first sensor mounted in front of the liquid reservoir, a second sensor mounted behind the liquid reservoir, a memory storing instructions, at least one processor configured to access the memory and receive a plurality of inputs from the first and second sensors, the at least one processor being configured to compare a first sensor output from the first sensor to a second sensor output from the second sensor, and based on a determined difference between the first and second sensor outputs, initiate a notification of a detected leak in the liquid reservoir.

Abstract: A sensor device for determining and/or monitoring a process variable of a medium in a container includes: a crystal body having at least one defect; and a magnetic field device for generating a magnetic field, the magnetic field device arranged such that a magnetic field can be generated in the region of the crystal body and in the region of the medium located within the container, so that a change of the magnetic field in the region of the crystal body is amplified, wherein the crystal body and the magnetic field device are arranged from the outside on a wall of the container. A method for determining and/or monitoring a process variable of a medium in a container using the sensor device is also disclosed.

Abstract: A micro-electromechanical device includes a frame; a proof mass connected to the frame through a first mechanical link which allows pivoting of the proof mass to relative to the frame about a first axis of rotation parallel to a mean plane of the frame; and a lever for detecting pivoting of the mass, connected to the proof mass through a second mechanical link allowing rotation of the lever relative to the proof mass about a second axis. The second link includes two walls connecting perpendicularly to each other, one to the lever and the other to the proof mass, one of the walls being parallel to the second axis of rotation.