Abstract: Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
Type:
Grant
Filed:
March 26, 2010
Date of Patent:
May 21, 2013
Assignee:
Sand 9, Inc.
Inventors:
Behraad Bahreyni, David M. Chen, Alexei Gaidarzhy, Guiti Zolfagharkhani, Pritiraj Mohanty, Klaus Juergen Schoepf