Patents Examined by Mel Shulman
  • Cooling method, cooling apparatus and treatment apparatus
    Patent number: 5970717
    Abstract: An apparatus is provided with a cooling unit for cooling a treatment substrate, a supporting body for supporting the treatment substrate before being transferred to the cooling unit and a cooling apparatus for cooling the treatment substrate supported by the supporting body. The apparatus cools the treatment substrate in a position where the treatment substrate stands by before being transferred into the cooling unit and thereafter cools the cooled treatment substrate in the cooling unit, which makes rapid and accurate cooling possible.
    Type: Grant
    Filed: March 12, 1998
    Date of Patent: October 26, 1999
    Assignee: Tokyo Electron Limited
    Inventor: Kiyohisa Tateyama