Abstract: Provided are a processing method and a processing apparatus which are capable of suppressing a disturbance attributable to a surface wave in a processing by interfered laser beams, in particular, a processing by the interfered laser beams of a pulsed laser having a pulse width of equal to or more than 1 fs and of equal to or less than 1 ps, in which the wavelength of a surface wave that propagates in a direction of the interference of the laser is made longer than a pitch of the interference of the laser on a surface of an object to be processed to process the object.

Abstract: A method for displaying a result of measurement of eccentricity in an optical system is provided where an amount of eccentricity for each lens element's surface in a lens system can be displayed and where the amount of eccentricity displayed can be a magnified amount of eccentricity. Additionally a sectional view of the lens system can be displayed using scaling factor.

Abstract: A target system for determining positioning error between lithographically produced integrated circuit fields on at least one lithographic level. The target system includes a first target pattern on a lithographic field containing an integrated circuit pattern, with the first target pattern comprising a plurality of sub-patterns symmetric about a first target pattern center and at a same first distance from the first target pattern center. The target system also includes a second target pattern on a different lithographic field, with the second target pattern comprising a plurality of sub-patterns symmetric about a second target pattern center and at a same second distance from the second target pattern center. The second target pattern center is intended to be at the same location as the first target pattern center. The centers of the first and second target patterns may be determined and compared to determine positioning error between the lithographic fields.

Abstract: Optical mapping apparatus for imaging an object, comprising an optical coherence tomography (OCT) system including an OCT source, an OCT reference path leading from the OCT source to an OCT receiver, an OCT object path leading from the object to the OCT coupler, an OCT depth scanner adapted to alter at least one of the OCT reference path and the OCT receiver path. A confocal system is provided including a confocal optical receiver a confocal path leading from the object to the confocal optical receiver via a confocal input aperture. An adaptive optics (AO) system is provided to correct optical aberrations in the OCT object path and the confocal path.

Abstract: The present invention relates to a device and a method for determining the properties of surfaces having at least one first radiation means for collimated irradiation of a measurement surface to be examined and at least one second radiation means for non-collimated irradiation of said measurement surface wherein the space above said measurement surface has substantially radiation-absorbing properties. The device of the invention further comprises at least one radiation detector means which captures at least a portion of the radiation reflected and/or diffused off the surface to be examined and emits at least one measurement signal which is characteristic of the reflected and/or diffused radiation.

Abstract: A system and method employing optical disk drives for quantitative analysis of chemical and biochemical parameters, in which sensor materials disposed on an optical disk are responsive to physical, chemical, biochemical, and other parameters in the environment. The light interacts with the sensor materials when the light propagates through the sensor material, reflects off the optical media's reflective layer, and propagates back through the sensor region. The interacted light is captured by a photodetector, which outputs a response analog signal, for example, an analog voltage signal, which is indicative of a condition of the environment to which the sensor materials have been exposed. The system includes software algorithms which cause the laser source and optical detector to move to a specified location or logical block address of the disk, measure the optical signal during disk rotation, display a map of the sensor material response, and reduce the noise level in the measured signal.

Abstract: A hyperspectral imager that achieves accurate spectral and spatial resolution by using a micro-lens array as a series of field lenses, with each lens distributing a point in the image scene received through an objective lens across an area of a detector array forming a hyperspectral detector super-pixel. Spectral filtering is performed by a spectral filter array positioned at the objective lens so that each sub-pixel within a super-pixel receives light that has been filtered by a bandpass or other type filter and is responsive to a different band of the image spectrum. The micro-lens spatially corrects the focused image point to project the same image scene point onto all sub-pixels within a super-pixel.

Abstract: Common path frequency domain optical coherence reflectometry/tomography devices include a portion of optical fiber with predetermined optical properties adapted for producing two eigen modes of the optical radiation propagating therethrough with a predetermined optical path length difference. The two replicas of the optical radiation outgoing from the portion of the optical fiber are then delivered to an associated sample by an optical fiber probe. The tip of the optical fiber serves as a reference reflector and also serves as a combining element that produces a combination optical radiation by combining an optical radiation returning from the associated sample with a reference optical radiation reflected from the reference reflector. The topology of the devices allows for registering a cross-polarized or a parallel-polarized component of the optical radiation reflected or backscattered from the associated sample.

Abstract: An imaging-type interferometric optical profiler splits a beam reflected from a sample into two beam portions. One portion is a reference beam and the other a sample beam. The reference and sample beams are combined to create interference patterns which are used to obtain a surface profile of the sample. Since vibration of the sample causes the same optical path change, and no reference mirror is used, the interferometric optical profiler is relatively vibration-insensitive and has a fast measurement speed.

Abstract: A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.

Abstract: A method for determining the shape of a rough surface of an object comprises the steps of providing an object having a given roughness related height variation; providing an interferometer for wave front measurement comprising a measurement beam of electromagnetic radiation having a wavelength ? not exceeding 10 times of the roughness related height variation of the object surface, which measurement beam comprises an incoming wave for illuminating the object surface and an outgoing wave comprising radiation from the incoming wave reflected off the object surface; directing the incoming wave of the measurement beam onto the object surface at least two different probing locations, thereby illuminating an areal element of the object surface at each of the probing locations; and measuring the respective phase distribution of the outgoing wave by means of the interferometer of each of the at least two different probing locations.

Abstract: An improvement in a PVT apparatus, which improvement includes a fluid path model having a fluid path and a sampling section, wherein the depth of the fluid path within the sampling section is substantially uniform and is less than about 100 ?m. The apparatus may be configured to provide a micron-scale slim tube which may be used in a manner similar to a conventional slim tube apparatus. A method for characterizing an interfacial property of a dispersion such as, for example, miscibility of a first fluid and a second fluid as a function of pressure. The method includes collecting sets of transmittance images representing transmittance of electromagnetic radiation through the dispersion, generating values of a general interfacial property factor from the transmittance images, and characterizing the interfacial property using the values of the general interfacial property factor.

Abstract: There is provided a chirp indicator of ultrashort optical pulse in which a target ultrashort optical pulse is introduced into a spatial filter formed of a hologram in which is recorded information of chirp quantity of an ultrashort optical pulse used as a reference. The chirp indicator identifies the chirp quantity of the ultrashort optical pulse by detecting an optical correlation between the target ultrashort optical pulse and the ultrashort optical pulse used as a reference. Here, the ultrashort optical pulse to be detected is detected for each hologram, and depending on intensity of an amplitude of light emitted from each hologram, a composition ratio of chirp quantity corresponding to each hologram is deteremined. Then, based on the determined mixture ratio of the chirp quantity, chirp quantity of the ultrashort optical pulse to be detected is determined.

Abstract: A position determining system (PDS)(100) or multiple parameters measurement system (MPMS)(300) particularly useful for translation and rotation measurement of objects having up to five degrees of freedom. A light source (122, 302) provides light beams (124, 304) into at least two channels. Each channel may include an interferometer (310), reflective target (110, 314), beam splitter (128, 312), detector (132, 316), and receiver (318). In concert, the detectors (132, 316) sense horizontal, vertical, and roll position and the receivers (318) sense longitudinal and yaw position change. Optionally, modulation can be imposed on the light beams (124, 304) and phase-sensitive synchronous demodulation used to enhance accuracy.

Abstract: A ring laser gyroscope is described that includes at least one laser gyroscope block and a dither motor, where the gyroscope blocks are configured to engage the dither motor. The dither motor has an outer ring, a hub section, at least one radially extending reed extending between the outer ring and the hub section, and at least one piezoelectric transducer attached the reed. The piezoelectric transducer includes a common piezo-ceramic having a contiguous void line that allows for a separate electrical connection to be made to electrode surfaces on each side of the void line.

Abstract: A spectroscopic detection system is described for monitoring ambient air for toxic chemical substances. The system can be a compact, portable multiple gas analyzer capable of detecting and discriminating a broad range of chemical constituents including various nerve and blister agents as well as toxic industrial chemicals at low or sub part per billion (ppb) levels. The system minimizes false alarms (e.g., false positives or negatives), features high specificity, and can operate with response times on the order of a few seconds to a few minutes, depending on the application. The system can be an entirely self-contained analyzer, with a Fourier Transform Infrared (FTIR) spectrometer, a gas sample cell, a detector, an embedded processor, a display, power supplies, an air pump, heating elements, and other components onboard the unit with an air intake to collect a sample and an electronic communications port to interface with external devices.

Abstract: Disclosed herein is an apparatus for measuring the differential mode delay of multimode optical fiber. The apparatus includes a tunable laser source, an interferometer, a data collecting device, and a computer. The tunable laser source outputs light, frequencies of which vary linearly. The interferometer generates multimode light and single mode light by separating light, which is output from the tunable laser source, transmitting the multimode light and the single mode light to the multimode optical fiber, which is a measurement target, and a single mode path, which is a reference, and generating a beating signal by causing the multimode light and the single mode light to interfere with each other. The data collecting device collects the beating signal from the interferometer. The computer converts the frequency components of the beating signal into components in a time domain, and calculating the mode delay of the multimode light.

Abstract: In measuring an optical path length difference, light from a light source is guided through a first and a second path. A three-way coupler combines light from the first and the second path in at least three combination, with at least three mutually different added relative phase displacements. A detector measures interference intensities of the at least three combinations. From the intensities, a calculation unit determines a phase difference between the light from the first and second path while eliminating an effect of a contrast between the light from the first and second path.

Abstract: Systems and techniques for detecting the presence of foreign material in food utilizing optical backlighting and/or ultrasonic inspection are presented. In optical backlighting, a substantially monochromatic light source optically backlights a food stream with source light having a wavelength between about 500 and 600 nm. An image of the food stream is captured and the presence of foreign material is determined when a portion of the detected image exceeds a predetermined threshold. The technique is especially suitable for the detection of bone in chicken meat, and the light source can be a planar array of green LEDs. In ultrasonic inspection, a process stream is interrogated with pulses of ultrasound and the presence of foreign material is determined based on the detected off-angle ultrasound scattering response.

Abstract: An interferometer can achieve a high dynamic range for measurements along vertical and horizontal directions using a first measurement channel providing a high dynamic range measurement of a path including components respectively parallel and perpendicular to the optics-object separation and a second measurement channel providing a high dynamic range measurement with just a perpendicular component. Further, using the same techniques at multiple locations around permits a high dynamic range for measurements of the degrees of freedom of an object.