Abstract: A mass spectrometer (1) suitable for the analysis of the eluent of a liquid or supercritical fluid chromatograph is disclosed. In order to maximize the flow rate of fluid which can be accepted into its ionization chamber (13), aperture closing means (13) are provided between an electron or particle source (27) and an entrance aperture (40) into the ionization chamber through which electrons or particles enter the chamber when required to ionize the sample therein. The aperture closing means are operable to close said aperture when such ionization is not required, thereby increasing the maximum flow rate into the ionization chamber. Sample ionization may then be effected by means of a glow discharge in the chamber or by a liquid ionization process such as thermospray ionization.

Abstract: A reference and calibration grid (44a or 44b) of silicon is incorporated into a particle beam lithography system (10) and used to calibrate the system (10). The grid (44a or 44b) is formed in a silicon die (50) of much thicker structure and with square holes (64) and with a period to enable direct coordination with binary electronics. The grid (44a or 44b) is coated with a suitable material, preferably gold (72), to prevent charged particles or electrons from passing through the solid portions of the grid and the grid is preferably mounted on a grid holder (52) which can be aligned to the X-Y reference on the workpiece stage (32) and may be adjusted in tilt and in height (Z direction). The crystallography of silicon provides accuracies in orthogonality, corner radii, and edge roughness required for grids used as fiducials for particle beam lithography.

Abstract: The basic unit of a modern electron microscope incorporates a computer, a ROM, and a RAM. According to this invention, an external computer connected with the microscope also has a RAM. In the initial condition, the contents of the ROM in the microscope are read into the RAM of the external computer. When the magnification is set to a desired value, the external computer selects currents which are fed to the electron lenses and deflector coils, corresponding to the two values of magnification closest to the desired value of magnification, from the data stored in the ROM. Then, the computer calculates the currents which should be fed to the lenses and coils, corresponding to the desired value of magnification, from the selected values. The obtained data is held in either RAM. The external computer controls the lenses and coils according to the data held in this RAM.

Abstract: A proton beam therapy sysstem for selectively generating and transporting proton beams from a single proton source and accelerator to selected ones of a plurality of patient treatment stations each having a rotatable gantry for delivering the proton beam at different angles to patients supported in fixed orientations at the stations.

Abstract: A system and method for detecting trace levels of a sample gas in a mass spectrometer having a vacuum chamber with a vacuum pump, an ionizer, extracting and imaging lens and a detector. A high pressure sample gas pulse is introduced into the vacuum chamber through a small orifice to produce a high density of sample gas in a region near the orifice. The density of the sample gas pulse is sufficient to substantially sweep residual background gas from the path of the pulse. A portion of the sample gas pulse is ionized and ions are extracted and imaged.

Abstract: A physical instrument for electron-photon interactions and more particularly a physical instrument for production, recording, observation and transmission of temporo-spatially adjustable electron-photon interactions. The instrument comprises a ring-shaped vacuum tube with an electron injector, a linear accelerator, signal deflecting and collimating means operatively connected to the vacuum tube with free-flight intervals of the tube between adjacent means, interaction recording components associated with the tube in the free-flight intervals thereof, and a computer processing unit with a display, which is operatively connected to the accelerator and the interaction recording components.

Abstract: A radiation shield suitable for preventing radiation and radioisotopes from reaching or contacting a person using a vessel containing a radioactive solution. The shield includes a radiopaque container having a top and a bottom opening, and a means for supporting the vessel within the container. The container reduces emission of radiation through the sides of the vessel.

Abstract: An improved liquid chromatography/mass spectrometer apparatus is disclosed of the type wherein the liquid eluent from a chromatograph column is injected as a heated spray into an ionization chamber located between the chromatograph and the mass spectrometer to form ionized adducts containing solvent and the molecule to be analyzed which are then passed into the mass spectrometer through an exit port in the sidewall of the ionization chamber. The improvement comprises an acceleration electrode located in the sidewall of the ionization chamber at a position opposite the exit port into the mass spectrometer, an electron emission source located between the acceleration electrode and the point of injection of the heated spray into the chamber, and means for providing a positive voltage on the acceleration electrode with respect to the electron emission source in the ionization chamber.

Abstract: An apparatus is described for exposing a coating of a UV-curable material on a filamentary body to ultraviolet light. Use is made of a bright UV-light source, for example a high-pressure mercury lamp with a small radiating surface, an elongate image of said source being formed at the location of the filamentary body by means of an optical system which preferably comprises mirrors.

Abstract: A system for implanting ions into a target element including a source arrangement for producing an ion beam; a beam analyzing arrangement for receiving the ion beam and selectively separating various ion species in the beam on the basis of mass to produce an analyzed beam; and a beam resolving arrangement disposed in the path of the analyzed beam for permitting a preselected ion species to pass to the target element. The analyzing arrangement has an ion dispersion plane associated therewith. The source arrangement has an associated ion emitting envelope including an area of substantial extension in a plane parallel to the ion dispersion plane and producing ions entering said analyzing arrangement which are travelling substantially either toward or from a common apparent line object lying in a plane perpendicular to the ion dispersion plane.

Abstract: High energy resolution at high electron current at the specimen or at the detector is obtained by an electron beam guiding with focusing energy selection, in particular in an electron spectrometer with emission system and at least one energy dispersive system with different focusing in two mutually perpendicular directions, by a non-circular-symmetrical lens system placed after or before the energy dispersive system and correcting the different focusing of the electrons in the two mutually perpendicular directions such that either the virtual or the real entry stop of the energy dispersive system is imaged on an accessible image plane outside the energy dispersive system or an object outside the energy dispersive system is imaged on the virtual or real exit stop of the latter.

Abstract: A method and apparatus for producing ions by surface ionization by increasing the molecular energy of the substance to be ionized to the hyperthermal energy range, and directing a beam of the substance to impinge against a solid surface disposed in a vacuum chamber. The solid surface is one e.g., clean diamond or dirty molybdenum, which is capable of inducing from the substance, e.g., an organic halide, molecular ionization or dissociative ionization of the substance, and one which does not react with the molecules or tend to neutralize the produced ions. The molecular energy includes kinetic energy gained in aerodynamic acceleration by seeding a light gas, e.g., hydrogen or helium, with molecules of the substance to be ionized, thereby producing a hyperthermal beam of 0.5-20 electron volts of the substance to be ionized.

Abstract: An improved ion source for characterization of a surface of a sample including a housing oriented about a central axis, Z; a magnet cooperatively disposed within the housing for producing a magnetic field along the Z axis direction an anode radially disposed within the housing and within the magnetic field of the magnet that defines an annular ionization chamber having an open annular space and further forming a central tubular space about the Z axis; a cathode cooperatively disposed at the anode and within the annular ionization chamber; an extractor grids means cooperatively disposed within the housing so as to form a boundary of the ionization chamber; annular focusing rings disposed on the housing and externally to the extractor grids for focusing ions emerging therefrom; neutralizer filament cooperatively disposed with focusing rings; a central lens cooperatively disposed about the central axis Z in the central tubular space formed by the anode and adapted to accept ions and neutrals emanating from a sam

Abstract: The operating characteristics of an SEM apparatus are enhanced by carrying out in situ deflection during electron beam scanning of an object to be examined. Differential signals derived from the in situ deflection are a direct measure of the spatial derivative of any geometric or material variations on the surface of the scanned object.

Abstract: A thermally compensated tube scanner scanning tunneling microscope utilizes two concentric piezoelectric tubes, one for scanning and one for coarse translation as well as fine adjustment of sample position while in tunneling range. There are no mechanical components such as springs, levers, gears, or stepper motors which are known to result in considerable vibration sensitivity and thermal drift. Consequently, the standard mode of atomic resolution operation for the device is without vibration isolation and with a thermal drift of less than 1 angstrom per hour.

Abstract: An ion implantation system includes an ion source generating a horizontally directed ion beam. A quadrupole shapes the beam and a pair of deflector plates deflect the beam downwardly to wafers disposed on a horizontally disposed wheel. The beam is shifted radially relative to the wheel by a deflector plate carrier apparatus. This apparatus includes a stepper motor controlled driver magnet disposed externally of a beam/wheel evacuated enclosure. A driven magnet disposed in the enclosure is joined to the deflector plates all of which ride on linear bearings. Movement of the driving magnet moves the driven magnet, and therefore, the deflector plates and beam. An evacuatable transport is used to transport wafers in cassettes on or wafer mounting plates in a vacuum. A robot arm in the wheel enclosure retrieves wafers from a cassette in the transporter through adjoining sealable ports for placement on and removal from wafer support plates on the wheel.

Abstract: An electron beam attenuator decreases the intensity of an electron beam incident on a parallel electron detector by alternately deflecting the electron beam onto and away from the detector. A power supply controlling the attenuator is synchronized with the operation of the detector such that the electron beam only strikes the detector when the detector is not being read-out. The ratio of the time that the electron beam is incident on the detector to the time that the beam is off the detector is varied to give an adjustable attenuation of the detected electron signal. The intensity of the electron beam incident on the detector is monitored by a sensor separate from the parallel detector. When the beam intensity exceeds a pre-determined threshold, the attenuator is automatically activated, in order to prevent damage to the detector.

Abstract: This invention is a switchable neutron generating apparatus comprised of a pair of plates, the first plate having an alpha emitter section on it and the second plate having a target material portion on it which generates neutrons when its nuclei absorb an alpha particle. In operation, the alpha portion of the first plate is aligned with the neutron portion of the second plate to produce neutrons and brought out of alignment to cease production of neutrons.

Abstract: A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.

Abstract: An EMI/RFI radiation and static electricity suppression device for shielding radiation from various electronic and electrical sources. The suppression device includes a shielding membrane having the waveguide barrier with a multiplicity of protrusions facing the radiation emitting source for minimizing reflection of electromagnetic radiation incident thereupon. A plurality of conductive layers are each separated by spacers formed of a radiation absorbing media. The conductive layers include an inner-mesh disposed adjacent to the waveguide barrier and adapted for blocking low frequency radiation. A deflection layer formed of a multiplicity of spaced apart metallic deflection pads is provided for deflecting incident radiation thereabout. An absorption funneling layer disposed behind the deflection layer includes a plurality of apertures designed to receive the deflected radiation.