Patents Examined by Michael Cyga
  • Micro-electromechanical device inspection
    Patent number: 6223586
    Abstract: An inspection method for evaluating the hermeticity of integrated circuits and micro-electromechanical devices having a cavity. The method includes submerging one or more of the devices in a liquid, under pressure, for a given time period in order to allow the liquid to seep into any cavities that have leak paths. After the pressure soak, the devices are transferred to another liquid and observed under a microscope for signs of the liquid in any of the devices cavities, thereby determining if hermeticity is present.
    Type: Grant
    Filed: December 23, 1998
    Date of Patent: May 1, 2001
    Assignee: Visteon Global Technologies, Inc.
    Inventors: Karl Allen Dierenbach, Fred John Trusell, John Carlson Ames, Paul Elwin Stevenson