Abstract: A method for forming an ink jet nozzle plate includes providing a structure having a top substrate layer, a bottom substrate layer, and a buried layer disposed between the top substrate layer and the bottom substrate layer; providing a patterned bore mask having openings which extend to the top substrate layer; anisotropically etching through the openings through the top substrate layer, the buried layer, and into a portion of the bottom substrate layer; providing a bore liner into the openings formed through the top substrate layer, the buried layer, and into the etched portion of the bottom substrate layer; removing the bore mask and providing a cavity mask having openings aligned with the bore liners; anisotropically etching the top substrate layer to expose the bore liners; and removing the cavity mask and providing an ink jet nozzle plate layer over the top substrate layer and extending to be in contact with the bore liners to form bore regions in the ink jet nozzle plate layer; attaching the ink jet noz