Abstract: An attenuated total reflection (“ATR”) sensor (3) determines a substance dissolved in a measurement medium (2). A method is taught to verify a calibration and/or to perform an in-line calibration of the sensor. The ATR sensor includes a housing (7) and an ATR body (4). A light source (12) and a detector (13) are arranged in the housing. The ATR body has at least one measurement surface (5) and, arranged parallel to the latter, a calibration surface (10). The measurement surface (5) can be brought into contact with the measurement medium. A calibration chamber (9), arranged in the housing, is delimited on at least one side by the calibration surface.

Abstract: Method and apparatus for the single particle detection of submicron structures such as biological molecules and viruses utilises an optical element (100) comprising an optically transparent substrate (1) partially coated with a thin film of metal (2) illuminated with an optical beam (4) incident on a non-metal coated region (3) of the surface of the optical element at a point adjacent or close to the metal coated region of the optical element such that the beam propagates above but close and substantially parallel to the metal surface defining a measurement zone from within which submicron particles (7) contained in a sample (6) placed in contact with the optical element scatter or emit light which can be detected in the far field by conventional photodetection systems. The apparatus can be configured in a flow cell or optical microscope configuration.

Abstract: An improved technique for acoustic sensing involves, in one embodiment, launching into a medium, a plurality of groups of pulse-modulated electromagnetic-waves. The frequency of electromagnetic waves in a pulse within a group differs from the frequency of the electromagnetic waves in another pulse within the group. The energy scattered by the medium is detected and, in one embodiment, the beat signal may be used to determine a characteristic of the environment of the medium. For example, if the medium is a buried optical fiber into which light pulses have been launched in accordance with the invention, the presence of acoustic waves within the region of the buried fiber can be detected.

Abstract: An apparatus for checking concentricity between a barrel holder and a lens barrel rotatably engaging with the barrel holder is provided. The lens barrel includes at least one lens coaxially received therein. The apparatus includes a barrel holder retaining member, a rotating member, a driving unit, a light source, and an image sensor. The barrel holder retaining member is used for fixedly retaining the barrel holder in position. The rotating member is structured for meshing with the lens barrel. The driving unit is used for driving the rotating member to rotate, thereby rotates the lens barrel. The light source is configured for emitting light toward a first end of the lens barrel. The image sensor is arranged to face toward an opposite second end of the lens barrel. The image sensor is configured for sensing the light emitted from the light source.

Abstract: A laser maintenance apparatus including a laser system which includes an optical system for emitting, in a first irradiation condition, a generation laser beam for generating an ultrasonic wave in a portion of an object on which maintenance is to be performed, and including a laser source configured to generate and detect a detection laser beam which interacts with the ultrasonic wave generated by the laser light beam in the first condition. The laser maintenance apparatus also includes a light transmitting device for transmitting laser light emitted from the laser system, a laser irradiation device for irradiating laser light transmitted by the light transmitting device to the object portion, and a transporting/scanning mechanism for transporting the light transmitting device and the laser irradiation device to a portion near the object portion, and scanning over an arbitrary range at the object portion.

Abstract: A reflection characteristic measuring apparatus for measuring a characteristic, such as a gloss, of a sample surface. The apparatus includes at least one illuminator for illuminating a sample surface to be measured with light and a plurality of light receiving sections which are arranged axially symmetrically to each other with respect to a normal to an intended object surface and which output two-dimensional light receiving data. A deriving section derives a characteristic of the sample surface such as gloss based on a weighted average obtained by applying a weighting factor to each of the light receiving data outputted from the light receiving sections.

Abstract: In a defect inspection for a semiconductor substrate, inspection objects include, in addition to a bare Si wafer, a wafer with various films formed on the surface thereof. For a sample formed with a metal film in particular, scattering light generated by surface roughness thereof is large, thus making it difficult to detect a minute defect and a minute foreign substance. It is desirable that a minute defect and a minute foreign substance be detected regardless of scattering light generated by the roughness of the sample surface. Insertion of an analyzer in an optical path of a detection optical system at such an angle that the scattering light generated by the roughness becomes minimum permits suppressing the scattering light generated by the roughness.

Abstract: A three-dimensional shape measuring system is provided with a measuring unit having a three-dimensional measurement range and adapted to measure the three-dimensional shape of a measurement object in a noncontact manner, a measurement range shifting unit for shifting the position of the measurement range of the measuring unit, a shape calculating unit for calculating the overall three-dimensional shape of the measurement object from a plurality of measurement data obtained by shifting the measurement range relative to the measurement object, and a judging unit for setting judgment areas in specified peripheral areas within the measurement range and judging the presence or absence of any unmeasured area of the measurement object outside the measurement range based on measurement data corresponding to the judgment areas.

Abstract: A shape measuring apparatus and a shape measuring method suited for measuring an edge profile of a thin sample such as a semiconductor wafer or the like is provided. A distribution of surface angle and an edge profile of a measurement site is calculated by emitting light at sequentially different angle to the measurement site of a wafer by sequentially switching and lighting a plurality of LEDs each disposed at one of plurality of positions in one plane by an LED driving circuit, obtaining an image data showing a luminance distribution of the reflected light form the measurement site through a camera by a calculator each time light is emitted and, estimating an emitting angle of the light when the luminance of the reflected light becomes peak based on image data and emitting angle of the light corresponding to each LED by the calculator.

Abstract: Before applying a processing laser beam to a surface of a substrate through a film of liquid, distance M2 between a reference point on an axis of a first laser displacement meter and the surface of the substrate is measured to correct distance M1 between a lower end of an optical unit and the surface of the substrate, on the basis of distance M2, the processing laser beam is applied to the surface of the substrate, thereby cutting and removing a part of the surface of the substrate, and a depth to which the surface of the substrate has been cut and removed with the processing laser beam is measured by a second laser displacement meter.

Abstract: A surface plasmon sensor includes a light guide reflection plate, a surface plasmon resonance layer formed on a first surface of the light guide reflection plate, a light emitting unit having a light source disposed on an end surface of the light guide reflection plate, and a light receiving element. The surface plasmon resonance layer includes a metal layer. The light guide reflection plate includes at least one first reflection surface inclined against the first surface. The light guide reflection plate is configured to transmit light emitted by the light source. The at least one first reflection surface is configured reflect the light to the surface plasmon resonance layer. The metal layer is configured to reflect the light reflected by the at least one first reflection surface. The light receiving element is configured to receive the light reflected by the metal layer.

Abstract: An absorptiometry microchip testing device with which, after one-time startup, test results of blood analyses are automatically obtained without a special tester. The microchip testing device has a rotary drive source which can be stopped at a prescribed angle; a centrifugal rotor connected to the rotary drive source via the main shaft; a direction switching mechanism for controlling the main shaft gear; a planetary gear which engages the main shaft gear which is located on the centrifugal rotor; a chip holder which turns together with the planetary gear; a microchip which is held in the chip holder and has a part for measuring absorbance; a light source from which light is incident in the absorbance measuring part of the microchip; a detector which receives light transmitted by the absorbance measuring part; and a controller which controls movements of the rotary drive source and the direction switching mechanism.

Abstract: The invention is directed to a device for determining the thickness, distance and/or profile of areas of a transparent and/or diffuse object that are spaced apart, in particular for measuring distances in the eye. In the device for determining position using an interferometer arrangement based on the Michelson principle, a scanning unit is arranged for the change in path length in the reference beam or measurement beam path. The scanning unit comprises a scan table which is movable translationally in corresponding guides, the movement direction enclosing an angle ? to the reference beam. At least two reference mirrors having a distance d in direction of the reference beam and slightly overlapping laterally are arranged on the scan table so that during the oscillating movement of the scan table carried out by a motor the reference beam is reflected in itself first by the first reference mirror and then by the second reference mirror.

Abstract: A support designed for observing between intersecting polarizers an object located in its vicinity in a medium (3) of index n0 with incident convergent incoherent illumination under an angle ?0 at a wavelength ?. The support includes a substrate (1) with complex refractive index n2 and a layer (2) of refractive index n1 and thickness e1. The value of the thickness e1 of the layer (2) is at ±2% such that d2?/de21 lnIóI2=0 with Ó=Ó01+Ó12 (1+?01)e(?2j?1)+Ó01 ?12e (?4j?1)/1+r01(p)+r12(p)e(?2j?1))(1+r01(s)r12(s)e(?2j?1)). Observation devices incorporating such a support are also disclosed.

Abstract: In a chemical sensing apparatus utilizing a surface plasmon resonance in a small aperture formed in a metal thin film or on a surface of a metal fine particle, a capturing substance is disposed in the small aperture or on the surface of the metal fine particle for capturing a target substance. A marker substance, having a size comparable to that of the small aperture or the metal fine particle is combined with the target substance. As a result, a spectral change is increased in the transmitted light or the scattered light, induced by a surface plasmon resonance and resulting from the capture of the target substance.

Abstract: An optical metrology system is disclosed that has a measuring system configured to irradiate a metrology mark and record a portion of a reflected, a transmitted, or both, electromagnetic field and a characterization device configured to determine from the recorded field a mark shape parameter indicative of the structure of the metrology mark, the characterization device comprising: a field calculation unit configured to calculate an expected field for reflection, transmission, or both, from a theoretical reference mark based on an algebraic eigenvalue-eigenvector representation of the expected field, a field derivative calculation unit configured to calculate a first order derivative, a higher order derivative, or both, of the expected field with respect to the mark shape parameter by first deriving analytical forms for corresponding derivatives of eigenvalues and eigenvectors of the eigenvalue-eigenvector representation, and an optimization unit configured to use the outputs from the field and field derivati

Abstract: In order to measure a complex dielectric constant of a thin film on a substrate, a method includes irradiating the thin film sample with light at a first incident angle so that the light undergoes multiple internal reflections within the thin film sample. The method also includes measuring light that has transmitted through or reflected on the thin film sample following the multiple internal reflections, and determining a complex dielectric constant of the thin film sample based upon a spectrum of the transmitted or reflected light that has undergone the multiple internal reflections.

Abstract: A device for automatically measuring characteristics of an ophthalmic lens (L1), includes: a support (2) designed to receive such a lens; on one first side of the lens support, illuminating elements (208) including an optical system for producing a light beam directed towards the ophthalmic lens mounted on the support; and on a second side of the support, elements for analyzing (210) the image transmitted by the ophthalmic lens mounted on the support and illuminated by the illuminating elements (208); elements for splitting the light beam including a first mask (220) forming a Hartmann array and arranged on the first side of the lens support to be illuminated, upstream of the lens by the light beam.

Abstract: A three-dimensional shape measuring system includes: a light projecting/receiving apparatus which causes a light receiver to receive light reflected on a surface of a measurement object onto a light receiving surface thereof at a predetermined cycle multiple times, while changing a projecting direction of the light; and a measuring apparatus for measuring a three-dimensional shape of the measurement object, utilizing light receiving data.

Abstract: A Michelson interferometer has transversely arranged arms defining first and second transverse optical axes of the interferometer. The interferometer includes a beamsplitter for receiving an incoming ray, and transmitting an output ray. The beamsplitter is configured as an optical wedge. The first optical axis is terminated by a first cube corner retro-reflector, and the second optical axis is terminated by a second cube corner retro-reflector. The first and second cube corner retro-reflectors provide self compensation for chromatic aberration and anamorphism between the incoming ray and the output ray, and the transversely arranged arms are free-of any compensator.