Patents Examined by Michael Lebenetritt
  • Patent number: 8963261
    Abstract: Provided are a capacitive transducer, and methods of manufacturing and operating the same. The capacitive transducer includes: a monolithic substrate comprising a first doping region, a second doping region that is opposite in conductivity to the first doping region, and a vibrating portion; and an empty space that is disposed between the first doping region and the vibrating portion. The vibrating portion includes a plurality of through-holes, and a material film for sealing the plurality of through-holes is disposed on the vibrating portion.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: February 24, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Che-heung Kim