Patents Examined by Michael Maskell
  • Patent number: 12683139
    Abstract: A method for assigning charge state in mass spectrometry includes receiving a detector response signal corresponding to a plurality of ion arrival events. The detector response signal includes information related to individual ion responses generated by a detector for each ion arrival event. Detector response profiles are generated for mass-to-charge (m/z) bins of a mass spectrum generated from the ion arrival events based on the detector response signal. The m/z bins are grouped into a plurality of groups based on a similarity of the detector response profiles of the m/z bins. A charge state is assigned to one or more features based on the groups of m/z bins.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: July 14, 2026
    Assignee: DH Technologies Development Pte. Ltd.
    Inventors: Nic Bloomfield, Gordana Ivosev, Pavel Ryumin
  • Patent number: 12674662
    Abstract: Systems and methods for acquiring measurements of structures of a bonded sample are disclosed. Such systems and methods may include determining a first registration measurement of a first registration structure and a first interface target structure of a first sample, and a second registration measurement of a second sample prior to coupling the samples together. Such systems and methods may include, after such a coupling of the samples, determining a third registration measurement of the coupled sample at least partially by measuring the first registration structure through the top face of the first sample. Such systems and methods may include acquiring an overlay measurement based on the first registration measurement, the second registration measurement, and the third registration measurement. Such systems and methods may include adjusting an inter-sample coupling recipe based on the overlay measurement, where the inter-sample coupling recipe may include a final bonding recipe.
    Type: Grant
    Filed: September 16, 2022
    Date of Patent: July 7, 2026
    Assignee: KLA Coporation
    Inventors: Nimrod Shuall, Jordan Pio, Frank Laske, Stefan Eyring, Ohad Bachar
  • Patent number: 12673218
    Abstract: A variable thickness energy selection system for use in a charged particle therapy system is arranged within the nozzle housing downstream of monitoring systems, such as a dose monitor and spot position monitor. This positions the energy selection system proximal to the patient. The thickness of an absorber within the energy selection system can be varied quickly without requiring the ion beam to be turned off between energy selections, thereby allowing for rapid control of the energy selection of the ion beam. The absorber may include one or more high density solid absorbers, or a high-density liquid absorber contained in a closed fluid dynamic system that includes an enclosure positioned within the beam path and a reservoir positioned outside of the beam path.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: July 7, 2026
    Assignee: Mayo Foundation for Medical Education and Research
    Inventors: Chris J. Beltran, Keith M. Furutani
  • Patent number: 12671053
    Abstract: Assessment systems and methods are disclosed. In one arrangement, an effect of electrode distortion in an objective lens array is compensated. An electrode distortion is adjusted by varying an electrostatic field in the objective lens array. The adjustment is such as to compensate for an effect of electrode distortion on sub-beams of a multi-beam impinging on a sample. A sub-beam is refocused in response to the variation in electrostatic field in the objective lens array. The adjusting and the refocusing comprises changing potentials applied to at least two electrodes of the objective lens array.
    Type: Grant
    Filed: December 8, 2023
    Date of Patent: June 30, 2026
    Assignee: ASML Netherlands B.V.
    Inventor: Marco Jan-Jaco Wieland
  • Patent number: 12658419
    Abstract: A mass spectrometry method comprises: choosing an RF drive frequency that best optimizes isolation of a precursor ion species of interest by a quadrupole mass filter (QMF); isolating the precursor ion species by passing ions through the QMF while the chosen RF drive frequency is applied thereto; fragmenting the precursor ion species, thereby generating a plurality of first-generation fragment ion species; returning the plurality of first-generation fragment ion species to an inlet end of the QMF; choosing a second quadrupole RF drive frequency that best optimizes isolation of a first-generation fragment ion species of interest by the QMF; isolating the first-generation fragment ion species of interest by passing the fragment ions through the QMF while the second chosen RF drive frequency is applied thereto; fragmenting the chosen first-generation fragment ion species of interest, thereby generating a plurality of second-generation fragment ion species; and mass analyzing the second-generation fragment ion spe
    Type: Grant
    Filed: May 26, 2022
    Date of Patent: June 16, 2026
    Inventor: Christopher Mullen
  • Patent number: 12651722
    Abstract: Ion implantation systems and methods implant varying energies of an ion beam across a workpiece in a serial single-workpiece end station, where electrodes of an acceleration/deceleration stage, bend electrode and/or energy filter control a final energy or path of the ion beam to the workpiece. The bend electrode or an energy filter can form part of the acceleration/deceleration stage or can be positioned downstream. A scanning apparatus scans the ion beam and/or the workpiece, and a power source provides varied electrical bias signals to the electrodes. A controller selectively varies the electrical bias signals concurrent with the scanning of the ion beam and/or workpiece through the ion beam based on a desired ion beam energy at the workpiece. A waveform generator can provide the variation and synchronize the electrical bias signals supplied to the acceleration/deceleration stage, bend electrode and/or energy filter.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: June 9, 2026
    Assignee: Axcelis Technologies, Inc.
    Inventors: James S DeLuca, Dwight Roh, Patrick Heres, Atul Gupta
  • Patent number: 12651733
    Abstract: Methods for acquiring mass spectral data of a sample across at least a portion of an m/z range include receiving mass spectral data of the sample across the m/z range. The m/z range is partitioned into one or more sets of m/z sub-ranges, each set comprising one or more m/z sub-ranges, by dividing the m/z range into a plurality of m/z bins, determining an indication of ion abundance for each m/z bin, based on the mass spectral data, and forming an m/z sub-range of the one or more sets of m/z sub-ranges by assigning m/z bins having ion abundances that correspond to at least a threshold degree to the formed m/z sub-range. A mass analysis is performed on the sample for each set of m/z sub-ranges, thereby acquiring one or more partial mass spectral data sets.
    Type: Grant
    Filed: August 11, 2023
    Date of Patent: June 9, 2026
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Christian Thöing, Alexander Makarov, Denis Chernyshev
  • Patent number: 12640332
    Abstract: In some embodiments, a scientific instrument includes an electron-beam column configured to scan an electron beam across a sample. The electron-beam column includes a beam blanker configured to gate the electron beam in response to a drive signal. The scientific instrument also includes an electron detector configured to measure a flux of transmitted or scattered electrons having interacted with the sample and an electronic controller configured to acquire an image of the sample using values of the flux measured with the electron detector for a plurality of electron-beam scan locations. The electronic controller is further configured to cause the drive signal to have a gating frequency at which the image has a moiré pattern therein.
    Type: Grant
    Filed: September 22, 2023
    Date of Patent: May 26, 2026
    Assignee: FEI Company
    Inventors: Bert Freitag, Erik Kieft
  • Patent number: 12640357
    Abstract: A method of adjusting a position of an electrode within a nebulizer probe of a mass spectrometry device having an open port interface for receiving a sample includes performing a first analysis of the sample at a first analysis condition including a first position of the electrode and a first flow rate. After performing the first analysis, a second analysis of the sample is performed at a second analysis condition including the first position of the electrode and a second flow rate higher than the first flow rate. Thereafter, a third analysis of the sample is performed at a third analysis condition including a second position of the electrode and the second flow rate.
    Type: Grant
    Filed: December 21, 2021
    Date of Patent: May 26, 2026
    Assignee: DH Technologies Development Pte. Ltd.
    Inventors: Chang Liu, Thomas Covey, Peter Kovarik
  • Patent number: 12633494
    Abstract: Provided is a stage device comprising a stage, a Z-axis motor that magnetically floats the stage, and an X-axis motor that drives, in one axial direction within a plane, the stage floated by the Z-axis motor, wherein: the X-axis motor is provided with an X-axis coil, a pair of X-axis magnets that face each other and that sandwich the X-axis coil in the vertical direction without contacting the X-axis coil, and an X-axis yoke that holds the pair of X-axis magnets; the Z-axis motor is provided with a Z-axis coil, a Z-axis magnet, and a Z-axis yoke that holds the Z-axis magnet; and the Z-axis motor is disposed at a position that is below the X-axis motor such that the magnetic field which has leaked from the Z-axis motor is blocked by the X-axis yoke. Thus, it is possible to suppress magnetic field leakage and to perform high-speed positioning.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: May 19, 2026
    Assignee: Hitachi High-Tech Corporation
    Inventors: Motohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Raifu Yamamoto, Tomotaka Shibazaki, Keiichiro Hosobuchi, Akira Nishioka, Hironori Ogawa, Takanori Kato
  • Patent number: 12625118
    Abstract: Systems or techniques are provided for facilitating idle-triggered diagnostics for scientific instruments. In various embodiments, a scientific instrument can comprise a mass spectrometer coupled to a chromatograph. In various aspects, the scientific instrument can determine, via a temperature sensor of the chromatograph or via a clock of the mass spectrometer, whether the scientific instrument is in an idle-time period. In various instances, the scientific instrument can, in response to a determination that the scientific instrument is in the idle-time period, apply one or more electronic control signals to the mass spectrometer or to the chromatograph, measure one or more resultant ion spectra via an ion detector of the mass spectrometer, and determine whether the mass spectrometer or the chromatograph is operating correctly based on the one or more resultant ion spectra.
    Type: Grant
    Filed: August 18, 2023
    Date of Patent: May 12, 2026
    Assignee: Thermo Finnigan LLC
    Inventor: Deven Lee Shinholt
  • Patent number: 12617713
    Abstract: The problem of the present invention is to provide a substrate with high versatility, a method for producing the substrate, and a method for producing a unit cell using the substrate. The problem is solved by providing a substrate comprising a plurality of alkali metal azide spots on a substantially flat surface.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: May 5, 2026
    Assignees: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY, TOYOBO MC CORPORATION
    Inventors: Motoaki Hara, Yuichiro Yano, Tetsuya Ido, Hikaru Tanaka, Kazutake Hagiya, Yasuhiro Sato
  • Patent number: 12620568
    Abstract: A method of analysing a field of a mass spectrometer comprising a mass analyser and a static field mass filter having a first Wien filter and a second Wien filter is provided. The method includes, for each of a plurality of predetermined strengths of one of an electric field or a magnetic field of the first and second Wien filters: setting the one of the electric field or the magnetic field of the first and second Wien filters to the predetermined strength; causing a beam of ions comprising one or more ion species to be injected through the static field mass filter; and measuring, using the mass analyser, a respective intensity of ions of each of the one or more ion species in the beam.
    Type: Grant
    Filed: September 13, 2023
    Date of Patent: May 5, 2026
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventor: Markus Pfeifer
  • Patent number: 12609561
    Abstract: A transmission unit of a wireless optical charging system with an adjustable output direction attached to a ceiling of an indoor space according to the present disclosure includes: an optical generation unit that generates laser light; a vertical axis rotation unit that rotates along an axis perpendicular to a floor of the indoor space and transmits the laser light; a horizontal axis rotation unit that rotates while attached to the vertical axis rotation unit, is attached to a plurality of cameras, outputs the transmitted laser light, and rotates an output direction of the laser light and a direction of the plurality of cameras along an axis horizontal to the floor of the indoor space; and a control unit that controls the vertical axis rotation unit and the horizontal axis rotation unit according to rotation angles in vertical and horizontal directions calculated using images captured by the plurality of cameras.
    Type: Grant
    Filed: December 27, 2023
    Date of Patent: April 21, 2026
    Assignee: INDUSTRY-ACADEMIA COOPERATION GROUP OF SEJONG UNIVERSITY
    Inventors: Jin Yong Ha, Ngoc Luu Nguyen, Khanh Hung Nguyen
  • Patent number: 12592359
    Abstract: An ion implanter may include an ion source, arranged to generate a continuous ion beam, a DC acceleration system, to accelerate the continuous ion beam, as well as an AC linear accelerator to receive the continuous ion beam and to output a bunched ion beam. The ion implanter may also include an energy spreading electrode assembly, to receive the bunched ion beam and to apply an RF voltage between a plurality of electrodes of the energy spreading electrode assembly, along a local direction of propagation of the bunched ion beam.
    Type: Grant
    Filed: September 29, 2023
    Date of Patent: March 31, 2026
    Assignee: Applied Materials, Inc.
    Inventors: Paul J. Murphy, Frank Sinclair, Jun Lu, Daniel Tieger, Anthony Renau
  • Patent number: 12586748
    Abstract: Provided are a structure for particle acceleration and a charged particle beam apparatus, which enable the suppression of electric field concentration occurring near a negative electrode part. The structure for particle acceleration includes: a ceramic body 1 having a through hole 10 formed by an inner wall surface; and a negative electrode 2 and a positive electrode 3 which are arranged, respectively, on one end and the other end of the through hole 10 in the ceramic body. The inner wall surface of the ceramic body 1 is configured such that a first region 22, which is electrically connected with the negative electrode 2, and a second region 23, which is electrically connected with the positive electrode 3, are electrically connected to each other. The surface resistivity of the first region 22 is lower than the surface resistivity of the second region 23.
    Type: Grant
    Filed: May 21, 2021
    Date of Patent: March 24, 2026
    Assignee: Hitachi High-Tech Corporation
    Inventors: Ryo Sugiyama, Kenji Tanimoto, Shuhei Ishikawa
  • Patent number: 12584943
    Abstract: One embodiment of the present disclosure is related to a method for producing a substrate comprising a plurality of tips suitable to be used in scanning probe microscopy (SPM), wherein as a first step, a substrate is produced or provided comprising a plurality of nano-sized tips, preferably arranged in a regular array and spaced apart by nano-sized interspacings. A mask is applied to this substrate, comprising multiple mask portions, wherein each mask portion covers at least one tip, whereafter the substrate is subjected to an etching process relative to the mask portions. After the removal of the mask portions, the method results in the creation of a substrate comprising multiple pedestals having each at least one nanotip on the upper surface thereof and spaced apart at a distance suitable for performing an SPM measurement of a given type.
    Type: Grant
    Filed: November 30, 2023
    Date of Patent: March 24, 2026
    Assignee: IMEC VZW
    Inventors: Thomas Hantschel, XiuMei Xu
  • Patent number: 12580092
    Abstract: A collimator includes a collimator cover formed from a material with low radiation attenuation, and a plurality of septa formed from a radiation attenuating material. The collimator cover includes a base plate, a first side plate extending from the base plate, and a second, opposing side plate extending from the base plate. The first side plate has a plurality of first slots defined therein and the second side plate has a plurality of second slots defined therein. Each septum includes a first end retained in one first slot of the plurality of first slots and a second end retained in one corresponding second slot of the plurality of second slots.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: March 17, 2026
    Assignee: SMITHS DETECTION INC.
    Inventor: Pedro Andres Garzon
  • Patent number: 12555737
    Abstract: Provided is a charged particle beam device that can impart a function of an energy filter to even a small BSE detector. The charged particle beam device includes a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light; a detector that detects the light emitted from the fluorescent substance; a light guide element for guiding the light from the fluorescent substance to the detector; a light amount adjuster that adjusts the amount of light that is received by the detector through the fluorescent substance and the light guide element; and a control unit that controls the light amount adjuster.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: February 17, 2026
    Assignee: Hitachi High-Tech Corporation
    Inventors: Yusuke Abe, Yusuke Nakamura, Shunsuke Mizutani, Muneyuki Fukuda
  • Patent number: 12555764
    Abstract: A method of analysing a sample comprises analysing a sample in a first mode of operation so as to produce a spatially resolved data set representative of the sample, and analysing the data set so as to identify one or more regions of the sample. For each of one or more identified regions of the sample, a tandem mass spectrometry (MS/MS) data set is produced for that region by determining a path through the region, and analysing the sample along the path using Desorption Electrospray Ionisation (“DESI”) in a tandem mass spectrometry (MS/MS) mode of operation.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: February 17, 2026
    Assignee: Micromass UK Limited
    Inventors: Emrys Jones, Richard Denny, Emmy Hoyes, Keith George Richardson