Patents Examined by Michael P Maskell
  • Patent number: 11837434
    Abstract: A method for setting position of a component of a particle beam apparatus may be performed, for example, by the particle beam apparatus. The component may be embodied as a gas feed device, as a particle detector and/or as a beam detector. The method may include: aligning the component with a coincidence point of a particle beam of the particle beam apparatus, determining a rotation angle of a rotation of an object carrier about a rotation axis, loading a position of the component associated with the rotation angle from a database into a control unit, transmitting a control signal from the control unit to a drive unit for moving the component, and moving the component into the position loaded from the database by means of the drive unit, wherein the component arranged in the loaded position is at a pre-definable distance from the object.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: December 5, 2023
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Andreas Schmaunz, Gero Walter, Bernd Stenke