Patents Examined by Michael P. Safina
  • Spectroscopic ellipsometry analysis of object coatings during deposition
    Patent number: 6741353
    Abstract: Disclosed is methodology for determination of parameters which characterize parameters such as thickness, color or quality of films deposited onto objects of arbitrary shapes, utilizing spectroscopic ellipsometry applied to standard shaped objects.
    Type: Grant
    Filed: July 19, 2002
    Date of Patent: May 25, 2004
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Blaine D. Johs