Patents Examined by Michael P. Stafira
  • Patent number: 11327013
    Abstract: A specular variable angle absolute reflectometer includes a light source and a mirror system in a light path of the light source. The mirror system is configured to reflect a light beam from the light source towards a sample that is optically reflective. The device also includes an elliptical roof mirror disposed in the light path after the sample having an ellipsoidal reflector surface configured to reflect the light beam back towards the sample. The device also includes a mechanism connected to the elliptical roof mirror. The mechanism is configured to rotate the elliptical roof mirror about an axis of the sample. The device also includes a detector in the light path after the elliptical roof mirror such that the detector receives light that has been reflected from the elliptical roof mirror, thence back to the sample, thence back to the mirror system, and thence to the detector.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: May 10, 2022
    Assignee: THE BOEING COMPANY
    Inventors: Loyal Bruce Shawgo, Jeffery Thomas Murphy
  • Patent number: 11313727
    Abstract: We have invented an EUV spectroscopic polarimeter including a light receiving element, a first polarizing modulation element, a second polarizing modulation element, an energy splitting element and a light detecting and analyzing apparatus. The light receiving element is for receiving a target light. The first polarizing modulation element is rotatably connected to the light receiving element for generating a first polarized light. The second polarizing modulation element is rotatably connected to the first polarizing modulation element for generating a second polarized light. The energy splitting element receives the second polarized light so as to generate a modulated-polarization and energy-resolved light.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: April 26, 2022
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Ming-Chang Chen, Kuang-Yu Chang, Pei-Chi Huang
  • Patent number: 11313793
    Abstract: An opto-magnetic device includes an integrated optical circuit having an input for an input optical radiation and at least one output for an output optical radiation. The optical circuit defines an area sensible to the variations of a local refraction index probed by the optical radiation, destined to come in contact with the sample. A plurality of probe molecules are included to anchor to the sensible area, and a plurality of magnetic particles are included to anchor to molecules of the analyte, bound to the probe molecules upon a molecular recognition. A magnetic actuator is configured to generate a variable magnetic field and oscillate the magnetic particles to cause variation of the refraction index probed by the optical radiation in the sensible area, and a variation of at least one characteristic parameter of the output optical radiation correlated to a concentration of the molecules of the analyte.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: April 26, 2022
    Assignee: POLITECNICO DI MILANO
    Inventors: Riccardo Bertacco, Andrea Ivano Melloni, Parikshit Pratim Sharma, Nicola Peserico
  • Patent number: 11313676
    Abstract: The three-dimensional measurement apparatus includes a projecting unit configured to project patterned light onto a measurement target and an image capturing unit configured to capture an image of the measurement target onto which the patterned light is projected, with a predetermined exposure time, a calculation unit configured to calculate positions of a three-dimensional point group expressing a three-dimensional shape of the measurement target based on the feature points included in the image, and a determination unit configured to determine the exposure time such that at least one of the number of feature points and the number of three-dimensional point groups is equal to or greater than a threshold that is defined based on one of their maximum numbers, and the exposure time is shorter than an exposure time for the maximum number.
    Type: Grant
    Filed: January 31, 2019
    Date of Patent: April 26, 2022
    Assignee: OMRON Corporation
    Inventors: Xingdou Fu, Takashi Shimizu
  • Patent number: 11307151
    Abstract: The present disclosure discloses a method for detecting a wafer backside defect, comprising: Step 1, providing a signal database comprising signal data corresponding to various different defects, the defects comprising convex defects and concave defects, the signal data reflecting 3D information of the corresponding defect; Step 2, performing backside scanning on a tested wafer by using oblique incident light, and collecting corresponding emitted and scattered light data; and Step 3, comparing the collected emitted and scattered light data with the signal data, and fitting a defect 3D distribution map of the backside of the tested wafer. The present disclosure can test the height or depth of a wafer backside defect and form a 3D distribution map of the wafer backside defect, which is beneficial for analyzing the source of the wafer backside defect and processing it in time, reducing the troubleshooting time and improving the product yield.
    Type: Grant
    Filed: June 2, 2020
    Date of Patent: April 19, 2022
    Assignee: Shanghai Huali Integrated Circuit Corporation
    Inventors: Zengyi Yuan, Yin Long, Kai Wang
  • Patent number: 11300400
    Abstract: A system and method of determining three-dimensional coordinates is provided. The method includes, with a projector, projecting onto an object a projection pattern that includes collection of object spots. With a first camera, a first image is captured that includes first-image spots. With a second camera, a second image is captured that includes second-image spots. Each first-image spot is divided into first-image spot rows. Each second-image spot is divided into second-image spot rows. Central values are determined for each first-image and second-image spot row. A correspondence is determined among first-image and second-image spot rows, the corresponding first-image and second-image spot rows being a spot-row image pair. Tach spot-row image pair having a corresponding object spot row on the object. Three-dimensional (3D) coordinates of each object spot row are determined on the central values of the corresponding spot-row image pairs. The 3D coordinates of the object spot rows are stored.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: April 12, 2022
    Assignee: FARO TECHNOLOGIES, INC.
    Inventors: Daniel Döring, Rolf Heidemann, Martin Ossig, Gerrit Hillebrand
  • Patent number: 11293748
    Abstract: A three-dimensional (3D) measurement system, a method of measuring 3D coordinates, and a method of generating dense 3D data is provided. The method of measuring 3D coordinates includes using a first 3D measurement device and a second 3D measurement device in a cooperative manner is provided. The method includes acquiring a first set of 3D coordinates with the first 3D measurement device. The first set of 3D coordinates are transferred to the second 3D measurement device. A second set of 3D coordinates is acquired with the second 3D measurement device. The second set of 3D coordinates are registered to the first set of 3D coordinates in real-time while the second 3D measurement device is acquiring the second set of 3D coordinates.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: April 5, 2022
    Assignee: FARO TECHNOLOGIES, INC.
    Inventors: Daniel Döring, Gerrit Hillebrand, Rasmus Debitsch, Rene Pfeiffer, Martin Ossig, Alexander Kramer
  • Patent number: 11287375
    Abstract: The invention aims to provide an inspection device that can sensitively detect a defect even if intensity of scattered light reflected from an inspection object greatly varies depending on portions of the inspection object. An inspection device according to the invention uses a history of detection signals to predict whether a next detection signal level exceeds a threshold. When the detection signal level is predicted to exceed the threshold, operation of the device is beforehand changed such that the detection signal level does not exceed the threshold.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: March 29, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventor: Shota Saito
  • Patent number: 11280723
    Abstract: A colorimetric sensor for detecting an analyte of interest that includes a metal layer disposed upon a substrate, a plurality of nanostructures, and a corresponding plurality of metal deposits spaced apart from the metal layer. The metal layer defines a plurality of holes, each nanostructure includes a first portion disposed within a respective hole, and each metal deposit is disposed upon a second portion of a respective nanostructure. The sensor also includes a molecularly imprinted polymer layer that may cover the metal layer, the nanostructures, and/or the metal deposits. The molecularly imprinted polymer layer defines a cavity shaped to receive the analyte of interest, and the sensor is configured such that, when an analyte contacts the molecularly imprinted polymer layer and becomes disposed within the cavity, an optical property of at least a portion of the sensor changes thereby to cause a detectable color change in and/or from the sensor.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: March 22, 2022
    Assignee: DrinkSavvy, Inc.
    Inventor: Min Hu
  • Patent number: 11280604
    Abstract: A film thickness measurement device includes a light output unit that outputs measurement light, a spectroscopic detection unit that detects detection light, and an analysis unit that compares a measured reflectance for each wavelength of a measurement object with a theoretical reflectance and analyzes a film thickness of a first film and a film thickness of a second film. The analysis unit acquire candidates for optimal solutions of the film thicknesses using a result of comparison between the measured reflectance and the theoretical reflectance for each wavelength of the measurement object in a first wavelength range and determines the optimal solutions of the film thicknesses out of the candidates for the optimal solutions using a result of comparison between the measured reflectance and the theoretical reflectance for each wavelength of the measurement object in a second wavelength range.
    Type: Grant
    Filed: October 1, 2018
    Date of Patent: March 22, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Kenichi Ohtsuka
  • Patent number: 11280742
    Abstract: The invention concerns an analyte measuring system comprising a test tape (22) having a plurality of functional elements (20) including a test field (46), a further comprising a meter (12) having a tape drive (24) operable to advance the test tape (22), a light source (30) adapted to illuminate at least one measuring spot at a measuring position, and a measuring engine (32) to receive optical signals from the at least one measuring spot for detection of the analyte in the body fluid. For tape positioning, it is proposed that the measuring engine (32) comprises a signal processor (34) operable to determine if a test field (46) is in the measuring position, said determination comprising an identification of a pre-determined distance between at least two functional elements (20) in the optical signals obtained while advancing the test tape (22).
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: March 22, 2022
    Assignee: ROCHE DIABETES CARE, INC.
    Inventors: Max Berg, Fredrik Hailer
  • Patent number: 11276198
    Abstract: An apparatus for determining at least one of dimensional and geometric properties of a measurement object has a first measurement arrangement, which records first measurement values. The first measurement values represent respective positions of first selected measurement points relative to a first coordinate system. The apparatus has a second measurement arrangement, which records second measurement values. The second measurement values represent respective surface normals at second selected measurement points. The first and second measurement arrangements are arranged spatially fixedly with respect to one another on a housing body. The apparatus further has a third measurement arrangement, which records third measurement values. The third measurement values represent a respective current position of the housing body relative to a further coordinate system.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: March 15, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventor: Christian Hoerr
  • Patent number: 11262316
    Abstract: A method of synchronizing a line scan camera. The method comprises: obtaining line scan data of a region of interest (ROI) of a travelling surface from the line scan camera, the line scan camera being oriented perpendicular to a direction of travel of the travelling surface, the line scan data comprising a plurality of lines; identifying occurrences of a major frequency of a repeated texture on the travelling surface using characterized line scan data for each line in the plurality of lines of the line scan data; determining a period of the major frequency; and changing a line rate of the line scan camera when the determined period is different than a reference period.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: March 1, 2022
    Assignee: Teledyne Digital Imaging, Inc.
    Inventors: Felicia Yan Shu, Matthias Sonder, Dale Deering
  • Patent number: 11262193
    Abstract: This three-dimensional measurement device includes: a light source, a lens guiding light from the light source to a subject, a photomask disposed on the optical axis between the light source and lens and having a predetermined pattern, a driving device changing the position of one member from the lens and photomask or changing an optical characteristic of the lens, and a control unit controlling the driving device. The control unit fixes an image formation position for light/dark pattern light formed by the photomask at the position of the subject by fixing the position of said member or the optical characteristic of the lens when specifying a first mode, and varies the position of the member or the optical characteristic of the lens to vary the image formation position for the light/dark pattern light such that the light/dark difference caused by the light/dark pattern light is smaller than in the first mode when specifying a second mode.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: March 1, 2022
    Assignee: OMRON Corporation
    Inventors: Motoharu Okuno, Hitoshi Nakatsuka
  • Patent number: 11262190
    Abstract: A method and machine comprising at least one non-contact sensor (52) on a functional testing platform (50) for workpiece inspection and/or measurement. The inclusion of at least one non-contact sensor on the functional testing platform results in the combination of two machine platforms into a single machine and provides the user with measurement characteristics of both methods, functional and analytical, saving significant cycle time and significant space.
    Type: Grant
    Filed: October 23, 2018
    Date of Patent: March 1, 2022
    Assignee: GLEASON METROLOGY SYSTEMS CORPORATION
    Inventors: Parag Prakash Wagaj, Douglas Charles Beerck, Ethan James Shepherd, Michael R. Tanner, Edward J. Damron, Aaron Timothy Slusser
  • Patent number: 11261076
    Abstract: A beverage dispenser includes a nozzle to dispense a beverage. The beverage dispenser further includes a camera to capture an image of the beverage as the beverage is dispensed from the nozzle. The camera has a field of view that includes the beverage. The beverage dispenser further includes a light source that illuminates the field of view of the camera. The beverage dispenser further includes a computer. The computer analyzes the image of the beverage and determines a characteristic of the beverage.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: March 1, 2022
    Assignee: PepsiCo, Inc.
    Inventors: Samuel Karol, Anthony Romano, Thore Mainart Bücking, Timothy Charles King, Joseph Albert Dolphin, Roger Bradley Millington
  • Patent number: 11262287
    Abstract: Provided is a sample property detecting apparatus including: a wave source configured to irradiate a wave towards a sample; a detector configured to detect a laser speckle that is generated when the wave is multiple-scattered by the sample, at every time point that is set in advance; and a controller configured to obtain a temporal correlation that is a variation in the detected laser speckle according to time, and to detect properties of the sample in real-time based on the temporal correlation, wherein the detector detects the laser speckle between the sample and the detector or from a region in the detector.
    Type: Grant
    Filed: January 6, 2021
    Date of Patent: March 1, 2022
    Assignee: Korea Advanced Institute Of Science And Technology
    Inventors: YongKeun Park, JongHee Yoon, KyeoReh Lee, Young Dug Kim
  • Patent number: 11249032
    Abstract: Methods for detecting defects on the surface of a sheet of material include collimating a beam of light and intersecting the collimated beam of light with a beam splitter. The beam splitter directs a first portion of the intersected beam of collimated light to illuminate a first surface of the sheet, wherein a first portion of the light illuminating the first surface is reflected and a second portion of the illuminating light is scattered by a defect. The reflected and scattered light is received with a first lens element that directs the reflected and scattered light to an inverse aperture. The reflected light is blocked by the inverse aperture and the scattered light is transmitted by the inverse aperture. The scattered light transmitted by the inverse aperture is directed with a second lens element to an imaging device.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: February 15, 2022
    Assignee: Corning Incorporated
    Inventors: Jeffrey Allen Knowles, Correy Robert Ustanik, Jiaxiang Zhang
  • Patent number: 11252386
    Abstract: A structured-light scanning system includes a plurality of switchable projectors that respectively generate emitted lights with a predetermined pattern, each switchable projector being capable of switchably generating either a two-dimensional (2D) emitted light or a three-dimensional (3D) emitted light; an optical alignment device that aligns the emitted lights to generate an aligned light, which is projected onto and reflected from a surface of an object, resulting in a reflected light; and an image sensor that detects the reflected light.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: February 15, 2022
    Assignee: Himax Technologies Limited
    Inventors: Wu-Feng Chen, Hsueh-Tsung Lu, Cheng-Che Tsai, Ching-Wen Wang
  • Patent number: 11249027
    Abstract: A SiC epitaxial wafer, including: a SiC substrate; and an epitaxial layer stacked on a first surface of the SiC substrate, wherein an area occupied by bar-shaped stacking faults on the first surface of the SiC substrate is identified, and the area occupied by bar-shaped stacking faults on the first surface of the SiC substrate is equal to or less than ¼ of the first surface area of the SiC substrate.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: February 15, 2022
    Assignee: SHOWA DENKO K.K.
    Inventors: Yoshitaka Nishihara, Koji Kamei