Abstract: A substrate transporting device and method 19 transports a plurality of wafers W standing upright in a row, from a previous process, i.e., a cleaning process. A substrate holder 40 is carried by a transporting device 50 arranged outside a drying chamber 20. The substrate holder 40 receives the wafers W from the substrate transporting device 19 while maintaining a posture of the wafers W. The transporting device 50 lowers the substrate holder 40 and sequentially moves it into the drying chamber 20 through an unloading and loading port 21 above the drying chamber 20. Thereafter, the substrate holder 40 is fixed to a rotor 30. After closing the unloading and loading port 21 with a lid body 25, the rotor 30 is rotated. In this way, moisture sticking to surfaces of the wafers W is eliminated.

Abstract: The machine (1) includes a tunnel structure (2) which defines a chamber (8) with inclined, downwardly converging longitudinal side walls (9) and in which a substantially horizontal conveyor (10) for conveying a layered flow of shredded tobacco (T) from the input end (6) to the output end (7) of the chamber (8) extends adjacent the lower edges (9b) of the converging side walls (9).

Abstract: In vehicle spraying booths (1), air is supplied to and discharged from the inner chamber (1a) by an air feeding device. The air supplied is conditioned so that its temperature lies in a desired temperature range and air pollution limit values can be ensured for a person working in the inner chamber (I). A displacement device (10) with a vehicle receiving region that can be moved in at least one direction of displacement in the spraying booth (1) is arranged in the spraying booth (1). This reduces the required booth width to the sum of the width required for working and the width of the vehicle being sprayed, and the required booth length to the length of the vehicle being treated.

Abstract: The fixed type ventilator according to the present invention includes: a support at the base with openings at the top and bottom; a first air current guide plate with an inclined surface with an angle of inclination of approximately 120° to 130°, which has an opening therethrough, and is coupled over the support; a second air current guide plate, with an inclined surface with an angle of inclination of approximately 120° to 130°, is coupled over the first air current guide plate with a gap of approximately 5 to 10 cm between the second air current guide plate and the inclined enclosed surface of the first air current guide plate. An air passage for the indoor air is provide through the bottom opening of the support and the gap, and natural outdoor air is allowed to flow therethrough the gap of the ventilator.

Abstract: A continuous flow fluid bed dryer has a dryer housing having a drying chamber and a plenum chamber located beneath the drying chamber. Moist product to be dried is introduced to the drying chamber at a product inlet and proceeds through the drying chamber to a discharge housing. A porous screen partially separates the drying chamber and the plenum chamber. Heated air is introduced into the plenum chamber which then passes through the screen to the drying chamber to dry product in the drying chamber. A shaft extends centrally through the drying chamber and is mounted for slow rotation therein. A plurality of paddles are connected to the shaft. The paddles move about a path of rotation whereby paddle ends sequentially sweep over the surface of the screen. In doing so, the paddles momentarily move product away from the screen permitting a rush of heated into the drying chamber locally fluidizing the bed and further drying the product.

Abstract: An integrated HVAC system for an automotive vehicle, including mating forward and rearward shells each have mating portions of left and right duct arms for delivering conditioned air therethrough. The mating shells define a central enclosure within which a drop-in heater core module may be operatively placed.

Abstract: A process chamber 25 for processing a semiconductor substrate, comprises a support for supporting a substrate 50. A gas distributor 90 provided for introducing process gas into the chamber 25, comprises a gas nozzle for injecting process gas at an inclined angle relative to a plane of the substrate 50, into the chamber 25. Optionally, a gas flow controller 100 controls and pulses the flow of process gas through one or more gas nozzles 140. An exhaust is used to exhaust the process gas from the chamber 25.

Abstract: Steam blower box for the application of steam onto a paper or cardboard web, the steam blower box connected to a plurality of steam lines. The steam lines are routed to at least one support plate, where the steam lines are each to be attached to a supply line connected to the steam source. The supply lines are equipped with connecting nipples, each having a stop, and the support plate has openings into which the connecting nipples can be inserted from one side of the support plate. The supply lines are locked down to the support plate by at least one retaining strip which works in conjunction with the stops and is movable behind the stops.

Abstract: A pass-through, wafer-processing tool for treating a moving semiconductor wafer with a process gas. The tool comprises an open-ended, non-isolated processing module having a wafer path through the module, vacuum manifolds mounted adjacent the wafer entry to and wafer exit from the module, and a gas manifold between the vacuum manifolds adapted to direct process gas onto the moving wafer. The gas manifold may deliver plasma ions generated by a remote plasma unit outside the module. Instead, a plasma may be generated inside the pass-through, wafer processing tool and, if so, the tool further comprises a top electrode mounted above the wafer passage. A wafer handler, which may be a robotic handler, carries the wafer through the wafer passage and serves as a bottom electrode.

Abstract: A structure for detachably attaching a drying agent unit to a lens barrel without increasing the size of the lens barrel. An opening for ventilation is formed in the circumference of the lens barrel. The drying agent unit comprises a container containing the drying agent. The container is provided with an opening. The drying agent unit is detachably attached to the lens barrel through a fixing mechanism such as fixing screws. The container communicates with the inside of the lens barrel through the openings in the attached state. Alternatively, the drying agent may be formed in a shape capable of fitting itself into the opening of the lens barrel, and a part of an outer surface of the drying agent that is exposed in the attached state is coated with an unbreathable coating. This eliminates the necessity of providing a container for the drying agent.

Abstract: Annular drying element (15) for mounting on a rotor axle in a drying plant for indirect heating or cooling of moist, comminuted, biological material such as fishmeal, offal from slaughterhouses, mash from breweries and similar materials of animal, vegetable or chemical origin. The drying element is configured with a number of through-going openings (25) extending from the one side of the element to the other. The drying element can be made of two identical, annular plate elements (16) with holes (25), in that tubular stays are welded between oppositely-lying holes. Through the openings (25), elongated elements can be inserted which increase the stirring in the product mass which is to be heat-treated.

Abstract: Very dry air is made for drying grain and other particulates. The air is dried by first cooling under pressure to remove moisture, then contacted with a drying device such as a vessel containing desiccant, then heated and released into a bed of particulates.

Abstract: A drying machine includes a first chamber, a second chamber, a first control device mounted in the first chamber and including a first main condenser, a first secondary condenser, a first main evaporator, and a first secondary evaporator, a second control device mounted in the second chamber and including a second main condenser, a second secondary condenser, a second main evaporator, and a second secondary evaporator, and a common compressor supplying a refrigerant to the first control device and to the second control device. In such a manner, when the first control device performs a cycle to increase the temperature in the first chamber, the second control device performs a cycle to decrease the temperature in the second chamber, and when the first control device performs a cycle to decrease the temperature in the first chamber, the second control device performs a cycle to increase the temperature in the second chamber.

Abstract: The invention relates to a method of producing a thickened slimes fraction blended with a tailing fraction for delivery to a discharge or disposal point (38). The method includes the steps of forming a bed of tailings fraction on a de-watering screen (28) and delivering a thickened slimes fraction onto the bed of tailings fraction. The slimes fraction (30) is then allowed to de-water through the bed and the screen.

Abstract: The invention relates to a dryer apparatus for fiber webs (10), such as webs of natural fiber, synthetic fiber and the like. The apparatus comprises a rotating dryer cylinder (1), the interior of which is provided with elements (8) for injecting hot heat-transfer fluid against the inner cylinder surface and for discharging if from the cylinder interior. The invention relates also to a method for heating a cylinder by injecting hot heat-transfer fluid against the inner surface of the heating cylinder.

Abstract: The method detects impermissible operating states in a hot-air clothes dryer with a laundry drum. The temperature in the incoming air flow is detected periodically downstream of an incoming air heater and upstream of the drum. A differential value (difference value or gradient) is formed from two successively detected values. The differential value is compared with a predetermined differential value, and if the newly formed differential value is absolutely greater than the predetermined differential value, then a counting value is incremented by one step. The counting value is compared with a predetermined counting value and, if the current counting value is greater than the predetermined counting value, then the heating of the dryer is turned off and/or an operating state display is activated.

Abstract: A low pressure dryer for granular or powdery material includes a plurality of hoppers rotatable about a common vertical axis serially among material filling and heating, vacuum drying and material discharge positions; pneumatic piston-cylinder means for rotating the hoppers about said axis among said filling and heating, vacuum drying and discharge positions; means for heating contents of a hopper at said filling and heating positions; means for sealing a hopper at said vacuum and drying positions; means for drawing vacuum within a hopper at said vacuum drying position and means for selectably permitting downward flow of dried granular or powdery material out of a hopper at said discharge position where said hoppers move collectively and unitarily one with another.

Abstract: A material drying apparatus having a sealable chamber for receipt of wet material, such as clothing. Material placed into the chamber is dried upon the evacuation of air from the chamber wherein moisture drawn from the material is condensed on a condensate coil placed in the chamber. Heating coils placed around the chamber or beneath a drawer elevate the temperature to enhance condensate operation providing an energy efficient material dryer requiring no make-up air. Drum or thermal blanket enhances temperature elevation. Condensed water is purged after the drying process although provisions provide for an interim purge should excess liquid be drawn from the material.

Abstract: An apparatus for heat treating an object and specifically a substantially flat object described. The apparatus may be a hot plate post-baking apparatus for heat treating a substantially flat object such as a photomask used in a semiconductor photolithographic process. The apparatus is provided with an upper heat reflector plate that is equipped with upwardly curved edge portions such that the amount of heat reflected by the reflector can be controlled and the center region on the substantially flat object can be temperature compensated for achieving more uniform temperature profile across the entire surface of the mask. By utilizing the heat reflector plate in a post-baking apparatus, the normally observed 5.degree. C. temperature difference across a mask surface is substantially eliminated.

Abstract: A system and method is described for processing waste citrus peel to remove oil from the peel in a highly efficient manner for subsequent processing, where the temperature of the peel is elevated, the peel is then finely fragmented to create a slurry, the solid particles are removed from the slurry and dried, and the oil is separated from the water in the slurry. The temperature of the peel is elevated by exposing the peel to steam so that minimal water is added.