Abstract: A metrology target mask includes a first array of spaced, substantially parallel elements having essentially the same length and width. Ends of the individual elements are aligned to form opposing array edges. The target mask also includes a second array of elements comprising a central element having a length and a width, and a plurality of spaced, substantially parallel outer elements having a length and a width. The width of the outer elements is less than the width of the central element, with edges of outer elements on each side of and farthest from the central element forming opposing array edges. The pitch of the outer elements is selected such that the outer elements are not resolvable after lithographic printing. After printing, the first array is sensitive to both dose and focus, and the second array is sensitive to dose but not focus, of the energy beam.

Abstract: A technique capable of easily manufacturing a projector without deteriorating too much the optical characteristics of the projector. A projector includes an illuminating optical system for emitting illumination light, an electro-optical device for modulating light from the illuminating optical system according to image information, and a projection optical system for projecting a modulated light beam flux obtained by the electro-optical device. The electro-optical device includes a single-crystal sapphire substrate having nearly a rectangular shape, and a polarizer provided on the single-crystal sapphire substrate on at least one side of a light incidence surface and a light emission surface. The single-crystal sapphire substrate includes a c-axis substantially parallel to the surface of the substrate, and the c-axis has an inclination of about 3° to about 7° with respect to a reference side selected from perpendicularly intersecting two sides of the nearly rectangular shape.

Abstract: A camera opening device for use with a single-use camera having an exposure button and a canister containing a film therein includes a base, a winding portion disposed in the base and which winds the film into the canister, and at least one of an end opening portion disposed in the base and which can remove an end of the canister; and a bottom opening portion disposed in the base and which can remove a bottom portion of the camera. The winding portion may have a winding receptacle dimensioned and disposed to receive the camera, an exposure button pressing device an interlock switch which detects if the exposure button is pressed, a winding switch, a motorized wheel, and a camera winding holding device.

Abstract: A partially assembled one-time-use camera includes a film section that longitudinally extends from a rotatable film winding spool in a film cartridge and that is engaged with a rotatable metering sprocket, and a separate rear cover part that is to be placed over the film section and the film cartridge and is constructed to prevent the film section from retracting out of engagement with the metering sprocket. The film winding spool is rotatable in a film winding direction to wind the film section into the film cartridge. If the film cartridge is allowed to rotate in the film winding direction before the rear cover is placed over the film section and the film cartridge, the film section will retract out of engagement with the metering sprocket. Consequently, a cartridge retention piece is positioned against the film cartridge to prevent the film cartridge from being rotated in the film winding direction.