Abstract: There is disclosed an analytical method capable of performing an analysis in electron microscopy by directing an electron beam at set analysis points wherein a reference image is displayed on a monitor and a user selects plural analysis points within the image. The specimen stage is returned to the approximate position where the reference image was obtained and a new image is obtained. At this time, the newly obtained image does not completely agree in position with the reference image due to accuracy of movement of the stage. The two images are supplied to a deviation amount calculator, which, in turn, compares the images and finds the amount of deviation of the newly obtained image from the reference image.